Inventor
SANSONI STEVEN
US8 patents
Patents
8 patentsUSD893441SAug 18, 2020
Base plate for a processing chamber substrate support
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US6469283B1Oct 22, 2002
Method and apparatus for reducing thermal gradients within a substrate support
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USD420022SFeb 1, 2000
Electrostatic chuck with improved spacing and charge migration reduction mask
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US5886865AMar 23, 1999
Method and apparatus for predicting failure of an eletrostatic chuck
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USD407073SMar 23, 1999
Electrostatic chuck with improved spacing and charge migration reduction mask
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USD420023SFeb 1, 2000
Electrostatic chuck with improved spacing mask and workpiece detection device
APPLIED MATERIALS INC13 citations73
USD406852SMar 16, 1999
Electrostatic chuck with improved spacing mask and workpiece detection device
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US11047039B2Jun 29, 2021
Substrate carrier having hard mask
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