Inventor
KALATHIPARAMBIL KISHOR KUMAR
US8 patents
Patents
8 patentsUSD998575SSep 12, 2023
Collimator for use in a physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC10 citations84
USD997111SAug 29, 2023
Collimator for use in a physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC9 citations84
USD1026054SMay 7, 2024
Collimator for a physical vapor deposition (PVD) chamber
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USD1009816SJan 2, 2024
Collimator for a physical vapor deposition chamber
APPLIED MATERIALS INC5 citations73
US11492699B2Nov 8, 2022
Substrate temperature non-uniformity reduction over target life using spacing compensation
APPLIED MATERIALS INC0 citations59
US12581926B2Mar 17, 2026
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations49
US12027352B2Jul 2, 2024
Apparatus for generating magnetic fields on substrates during semiconductor processing
APPLIED MATERIALS INC0 citations49
US12203163B2Jan 21, 2025
Methods for shaping magnetic fields during semiconductor processing
APPLIED MATERIALS INC0 citations47