Inventor · disambiguated record
Hisashi Nishinaga
Also filed as: NISHINAGA HISASHI
11 granted patents·6 pending applications·304 citations·filing 2001–2018
91Inventor score
Top patents by PatentIndex Score
17 records- 0198US7423731B2Illumination optical system, exposure apparatus, and exposure method with polarized switching deviceNIKON CORP·Filed 2005·Granted Sep 9, 2008·59 cites·58 claims
- 0297US7515248B2Illumination optical system, exposure apparatus, and exposure method with polarized state detection result and adjustmentNIKON CORP·Filed 2007·Granted Apr 7, 2009·25 cites·28 claims
- 0395US6771350B2Exposure apparatus and exposure method capable of controlling illumination distributionNIKON CORP·Filed 2001·Granted Aug 3, 2004·131 cites·80 claims
- 0493US6927836B2Exposure apparatus and exposure method capable of controlling illumination distributionNIKON CORP·Filed 2004·Granted Aug 9, 2005·69 cites·16 claims
- 0589US8305552B2Exposure apparatus, exposure method, and method for producing deviceNISHINAGA HISASHI·Filed 2006·Granted Nov 6, 2012·10 cites·20 claims
- 0683US8139198B2Exposure apparatus, exposure method, and method for producing deviceNISHINAGA HISASHI·Filed 2006·Granted Mar 20, 2012·5 cites·12 claims
- 0780US10025194B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2016·Granted Jul 17, 2018·1 cites·15 claims
- 0876US9513558B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2014·Granted Dec 6, 2016·1 cites·38 claims
- 0976US8749759B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2012·Granted Jun 10, 2014·1 cites·30 claims
- 1075US7515247B2Illumination optical system, exposure apparatus, and exposure method with polarized state fluctuation correcting deviceNIKON CORP·Filed 2007·Granted Apr 7, 2009·2 cites·30 claims
- 1165US2018348643A1Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2018·Application pending·0 cites
- 1258US2008239274A1Illumination optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2008·Application pending·0 cites
- 1358US2012236285A1Illumination optical system, exposure apparatus, and exposure methodTANITSU OSAMU·Filed 2012·Application pending·0 cites
- 1454US2010225895A1Illumination optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2010·Application pending·0 cites
- 1554US2010149511A1Illumination optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2010·Application pending·0 cites
- 1646US2009046266A1Exposing method, exposing device, and device manufacturing methodNIKON CORP·Filed 2008·Application pending·0 cites
- 1745US8223318B2Illuminating optical apparatus, exposure apparatus and device manufacturing methodMURAMATSU KOUJI·Filed 2008·Granted Jul 17, 2012·0 cites·27 claims
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