Inventor · disambiguated record
Hiromitsu Yoshimoto
Also filed as: YOSHIMOTO HIROMITSU
8 granted patents·13 pending applications·31 citations·filing 2002–2022
80Inventor score
Top patents by PatentIndex Score
21 records- 0177US6727981B2Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing methodNIKON CORP·Filed 2002·Granted Apr 27, 2004·20 cites·32 claims
- 0264US7081946B2Holding apparatus, holding method, exposure apparatus and device manufacturing methodNIKON CORP·Filed 2003·Granted Jul 25, 2006·8 cites·45 claims
- 0363US8358401B2Stage apparatus, exposure apparatus and device manufacturing methodNIKON CORP·Filed 2009·Granted Jan 22, 2013·1 cites·19 claims
- 0460US8323855B2Pellicle frame apparatus, mask, exposing method, exposure apparatus, and device fabricating methodMIYAKAWA TOMOKI·Filed 2008·Granted Dec 4, 2012·2 cites·31 claims
- 0554US2010186942A1Reticle error reduction by coolingPHILLIPS ALTON H·Filed 2009·Application pending·0 cites
- 0653US11929344B2Die bonding for chip conveying apparatusDISCO CORP·Filed 2022·Granted Mar 12, 2024·0 cites·1 claims
- 0750US2016336101A1Armature coil for electromagnetic actuator, electromagnetic actuator, exposure apparatus, and device manufacturing methodCKD CORP·Filed 2014·Application pending·0 cites
- 0848US2006146312A1Holding apparatus, holding method, exposure apparatus and device manufacturing methodNIKON CORP·Filed 2006·Application pending·0 cites
- 0948US2009033907A1Devices and methods for decreasing residual chucking forcesNIKON CORP·Filed 2008·Application pending·0 cites
- 1047US9304385B2Exposure method and device manufacturing method including selective deformation of a maskPHILLIPS ALTON H·Filed 2009·Granted Apr 5, 2016·0 cites·20 claims
- 1147US2012120379A1System and method for controlling the distortion of a reticlePHILLIPS ALTON H·Filed 2011·Application pending·0 cites
- 1246US11986864B2Cleaning apparatusDISCO CORP·Filed 2021·Granted May 21, 2024·0 cites·10 claims
- 1344US2007292245A1Stage assembly with secure device holderNIKON CORP·Filed 2007·Application pending·0 cites
- 1441US10043609B2Cooling structure for electromagnetic coil, and electromagnetic actuatorCKD CORP·Filed 2016·Granted Aug 7, 2018·0 cites·12 claims
- 1535US2011123913A1Exposure apparatus, exposing method, and device fabricating methodNIKON CORP·Filed 2010·Application pending·0 cites
- 1635US2011128523A1Stage apparatus, exposure apparatus, driving method, exposing method, and device fabricating methodNIKON CORP·Filed 2010·Application pending·0 cites
- 1735US2011164238A1Exposure apparatus and device fabricating methodNIKON CORP·Filed 2010·Application pending·0 cites
- 1834US2011096318A1Exposure apparatus and device fabricating methodNIKON CORP·Filed 2010·Application pending·0 cites
- 1934US2011096306A1Stage apparatus, exposure apparatus, driving method, exposing method, and device fabricating methodNIKON CORP·Filed 2010·Application pending·0 cites
- 2034US2011102761A1Stage apparatus, exposure apparatus, and device fabricating methodNIKON CORP·Filed 2010·Application pending·0 cites
- 2134US2011096312A1Exposure apparatus and device fabricating methodNIKON CORP·Filed 2010·Application pending·0 cites
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