Inventor
TIAN CAI ZHONG
JP15 patents
⚠️ This page may combine multiple inventors who share the name “TIAN CAI ZHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUSD593585SJun 2, 2009
Top panel for microwave introduction window of a plasma processing apparatus
TOKYO ELECTRON LTD424 citations98
USD571831SJun 24, 2008
Top panel for microwave introduction window of a plasma processing apparatus
TOKYO ELECTRON LTD437 citations98
USD571383SJun 17, 2008
Top panel for microwave introduction window of a plasma processing apparatus
TOKYO ELECTRON LTD431 citations98
USD572733SJul 8, 2008
Top panel for microwave introduction window of a plasma processing apparatus
TOKYO ELECTRON LTD26 citations92
USD571833SJun 24, 2008
Top panel for microwave introduction window of plasma processing apparatus
TOKYO ELECTRON LTD24 citations92
USD571832SJun 24, 2008
Top panel for microwave introduction window of a plasma processing apparatus
TOKYO ELECTRON LTD15 citations83
USD594485SJun 16, 2009
Top panel for microwave introduction window of a plasma processing apparatus
TOKYO ELECTRON LTD3 citations62
USD589034SMar 24, 2009
Microwave introducing antenna for a plasma processing apparatus
TOKYO ELECTRON LTD2 citations62
USD563951SMar 11, 2008
Microwave introducing antenna for a plasma processing apparatus
TOKYO ELECTRON LTD2 citations62
USD563949SMar 11, 2008
Microwave introducing antenna for a plasma processing apparatus
TOKYO ELECTRON LTD2 citations62
US7993488B2Aug 9, 2011
Microwave plasma processing device and gate valve for microwave plasma processing device
TOKYO ELECTRON LTD4 citations61
USD563950SMar 11, 2008
Microwave introducing antenna for a plasma processing apparatus
TOKYO ELECTRON LTD3 citations61
USD572707SJul 8, 2008
Microwave introducing antenna for a plasma processing apparatus
TOKYO ELECTRON LTD0 citations52