Inventor
BURKHART VINCENT E
US27 patents
⚠️ This page may combine multiple inventors who share the name “BURKHART VINCENT E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
22 patentsUS5656093AAug 12, 1997
Wafer spacing mask for a substrate support chuck and method of fabricating same
APPLIED MATERIALS INC849 citations98
US5764471AJun 9, 1998
Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck
APPLIED MATERIALS INC83 citations96
US6469283B1Oct 22, 2002
Method and apparatus for reducing thermal gradients within a substrate support
APPLIED MATERIALS INC112 citations95
US6075375AJun 13, 2000
Apparatus for wafer detection
APPLIED MATERIALS INC92 citations95
US6377060B1Apr 23, 2002
Method and apparatus for wafer detection
APPLIED MATERIALS INC75 citations93
US7018515B2Mar 28, 2006
Selectable dual position magnetron
APPLIED MATERIALS INC21 citations92
US6488820B1Dec 3, 2002
Method and apparatus for reducing migration of conductive material on a component
APPLIED MATERIALS INC21 citations92
US6303879B1Oct 16, 2001
Laminated ceramic with multilayer electrodes and method of fabrication
APPLIED MATERIALS INC50 citations92
USD420022SFeb 1, 2000
Electrostatic chuck with improved spacing and charge migration reduction mask
APPLIED MATERIALS INC31 citations92
US5923521AJul 13, 1999
Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck
APPLIED MATERIALS INC38 citations92
USD407073SMar 23, 1999
Electrostatic chuck with improved spacing and charge migration reduction mask
APPLIED MATERIALS INC20 citations92
US5886865AMar 23, 1999
Method and apparatus for predicting failure of an eletrostatic chuck
APPLIED MATERIALS INC43 citations92
US5825607AOct 20, 1998
Insulated wafer spacing mask for a substrate support chuck and method of fabricating same
APPLIED MATERIALS INC36 citations92
US5745332AApr 28, 1998
Monopolar electrostatic chuck having an electrode in contact with a workpiece
APPLIED MATERIALS INC26 citations89
US7736473B2Jun 15, 2010
Magnetron having continuously variable radial position
APPLIED MATERIALS INC11 citations83
US7138039B2Nov 21, 2006
Liquid isolation of contact rings
APPLIED MATERIALS INC7 citations74
US6291777B1Sep 18, 2001
Conductive feed-through for creating a surface electrode connection within a dielectric body and method of fabricating same
APPLIED MATERIALS INC11 citations74
USD420023SFeb 1, 2000
Electrostatic chuck with improved spacing mask and workpiece detection device
APPLIED MATERIALS INC13 citations73
USD406852SMar 16, 1999
Electrostatic chuck with improved spacing mask and workpiece detection device
APPLIED MATERIALS INC12 citations73
US6869516B2Mar 22, 2005
Method for removing electrolyte from electrical contacts and wafer touching areas
APPLIED MATERIALS INC2 citations63
US7067045B2Jun 27, 2006
Method and apparatus for sealing electrical contacts during an electrochemical deposition process
APPLIED MATERIALS INC3 citations62
US5982607ANov 9, 1999
Monopolar electrostatic chuck having an electrode in contact with a workpiece
APPLIED MATERIALS INC3 citations59
ROY SHAMBHU N
2 patentsLAM RES CORP
2 patentsUS11183368B2Nov 23, 2021
RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks
LAM RES CORP12 citations85
US12217939B2Feb 4, 2025
RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks
LAM RES CORP1 citations63