Inventor
XIE XIANGJIN
US33 patents
Patents
33 patentsUS9460959B1Oct 4, 2016
Methods for pre-cleaning conductive interconnect structures
APPLIED MATERIALS INC113 citations97
USD1026839SMay 14, 2024
Collimator for a physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC4 citations73
USD1025935SMay 7, 2024
Collimator for a physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC4 citations73
USD1025936SMay 7, 2024
Collimator for a physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC4 citations73
USD1026054SMay 7, 2024
Collimator for a physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC4 citations73
USD1024149SApr 23, 2024
Collimator for a physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC4 citations73
USD1009816SJan 2, 2024
Collimator for a physical vapor deposition chamber
APPLIED MATERIALS INC5 citations73
US11848229B2Dec 19, 2023
Selective blocking of metal surfaces using bifunctional self-assembled monolayers
APPLIED MATERIALS INC3 citations71
USD1110289SJan 27, 2026
Process chamber collimator
APPLIED MATERIALS INC0 citations62
US12431387B2Sep 30, 2025
Self-assembled monolayer for selective deposition
APPLIED MATERIALS INC0 citations62
US12412738B1Sep 9, 2025
System for target arcing mapping and plasma diagnosis
APPLIED MATERIALS INC0 citations62
US12243774B2Mar 4, 2025
Impurity removal in doped ALD tantalum nitride
APPLIED MATERIALS INC0 citations62
US11410881B2Aug 9, 2022
Impurity removal in doped ALD tantalum nitride
APPLIED MATERIALS INC1 citations62
US10563304B2Feb 18, 2020
Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers
APPLIED MATERIALS INC1 citations62
USD1110979SFeb 3, 2026
Process chamber collimator
APPLIED MATERIALS INC0 citations61
USD1103950SDec 2, 2025
Process chamber collimator
APPLIED MATERIALS INC0 citations61
US12094766B2Sep 17, 2024
Selective blocking of metal surfaces using bifunctional self-assembled monolayers
APPLIED MATERIALS INC0 citations61
US11756784B2Sep 12, 2023
Methods for aluminum oxide surface recovery
APPLIED MATERIALS INC0 citations60
US11443936B2Sep 13, 2022
Methods and apparatus for aluminum oxide surface recovery
APPLIED MATERIALS INC0 citations60
US11222816B2Jan 11, 2022
Methods and apparatus for semi-dynamic bottom up reflow
APPLIED MATERIALS INC0 citations60
US12568803B2Mar 3, 2026
Methods of forming interconnect structures
APPLIED MATERIALS INC0 citations58
US11289329B2Mar 29, 2022
Methods and apparatus for filling a feature disposed in a substrate
APPLIED MATERIALS INC0 citations58
US11990319B2May 21, 2024
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations57
US11527437B2Dec 13, 2022
Methods and apparatus for intermixing layer for enhanced metal reflow
APPLIED MATERIALS INC0 citations52
US12322573B2Jun 3, 2025
Pulsing plasma treatment for film densification
APPLIED MATERIALS INC0 citations51
US11967523B2Apr 23, 2024
Self-assembled monolayer for selective deposition
APPLIED MATERIALS INC0 citations51
US11562925B2Jan 24, 2023
Method of depositing multilayer stack including copper over features of a device structure
APPLIED MATERIALS INC0 citations51
US10283345B2May 7, 2019
Methods for pre-cleaning conductive materials on a substrate
APPLIED MATERIALS INC0 citations51
US11939666B2Mar 26, 2024
Methods and apparatus for precleaning and treating wafer surfaces
APPLIED MATERIALS INC0 citations50
US12581926B2Mar 17, 2026
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations49
US12252779B2Mar 18, 2025
Methods for in-situ chamber monitoring
APPLIED MATERIALS INC0 citations49
US12394619B2Aug 19, 2025
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL
APPLIED MATERIALS INC0 citations48
US11315771B2Apr 26, 2022
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations46