Inventor
TAUCHI SUSUMU
JP31 patents
⚠️ This page may combine multiple inventors who share the name “TAUCHI SUSUMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
20 patentsUSD556704SDec 4, 2007
Grounded electrode for a plasma processing apparatus
HITACHI HIGH TECH CORP445 citations99
USD770992SNov 8, 2016
Electrode cover for a plasma processing apparatus
HITACHI HIGH TECH CORP107 citations98
USD812578SMar 13, 2018
Upper chamber for a plasma processing apparatus
HITACHI HIGH TECH CORP21 citations94
USD804436SDec 5, 2017
Upper chamber for a plasma processing apparatus
HITACHI HIGH TECH CORP37 citations94
USD802790SNov 14, 2017
Cover ring for a plasma processing apparatus
HITACHI HIGH TECH CORP18 citations92
US7828928B2Nov 9, 2010
Vacuum processing apparatus
HITACHI HIGH TECH CORP10 citations92
US7335277B2Feb 26, 2008
Vacuum processing apparatus
HITACHI HIGH TECH CORP24 citations92
USD557425SDec 11, 2007
Cover ring for a plasma processing apparatus
HITACHI HIGH TECH CORP31 citations92
US7247207B2Jul 24, 2007
Vacuum processing apparatus
HITACHI HIGH TECH CORP11 citations92
USD802545SNov 14, 2017
Lower chamber for a plasma processing apparatus
HITACHI HIGH TECH CORP13 citations84
US7416633B2Aug 26, 2008
Plasma processing apparatus
HITACHI HIGH TECH CORP9 citations84
US7194821B2Mar 27, 2007
Vacuum processing apparatus and vacuum processing method
HITACHI HIGH TECH CORP12 citations83
US7674351B2Mar 9, 2010
Plasma processing apparatus
HITACHI HIGH TECH CORP3 citations63
US7641069B2Jan 5, 2010
Vacuum processing apparatus
HITACHI HIGH TECH CORP3 citations63
US7322561B2Jan 29, 2008
Vacuum processing apparatus
HITACHI HIGH TECH CORP2 citations63
US7833382B2Nov 16, 2010
Vacuum processing apparatus
HITACHI HIGH TECH CORP1 citations62
US10665436B2May 26, 2020
Plasma processing apparatus
HITACHI HIGH TECH CORP1 citations56
US7976632B2Jul 12, 2011
Vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations52
US7807581B2Oct 5, 2010
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations52
US6837937B2Jan 4, 2005
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations51