Inventor · disambiguated record
Bin-Ming Benjamin Tsai
Also filed as: TSAI BIN-MING B · TSAI BIN-MING BEN · TSAI BIN-MING BENJAMIN · TSAI BIN-MING BENJANIM
56 granted patents·10 pending applications·3,234 citations·filing 1987–2018
99Inventor score
Top patents by PatentIndex Score
66 records- 0199US5717518ABroad spectrum ultraviolet catadioptric imaging systemKLA INSTR CORP·Filed 1996·Granted Feb 10, 1998·243 cites·20 claims
- 0298US6771806B1Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devicesKLA TENCOR·Filed 2000·Granted Aug 3, 2004·258 cites·27 claims
- 0398US5999310AUltra-broadband UV microscope imaging system with wide range zoom capabilityFiled 1997·Granted Dec 7, 1999·224 cites·23 claims
- 0497US6288780B1High throughput brightfield/darkfield wafer inspection system using advanced optical techniquesKLA TENCOR TECH CORP·Filed 1997·Granted Sep 11, 2001·207 cites·26 claims
- 0597US6064517AHigh NA system for multiple mode imagingKLA TENCOR CORP·Filed 1998·Granted May 16, 2000·135 cites·65 claims
- 0697US5822055AOptical inspection of a specimen using multi-channel responses from the specimen using bright and darkfield detectionKLA INSTR CORP·Filed 1997·Granted Oct 13, 1998·297 cites·36 claims
- 0796US6433561B1Methods and apparatus for optimizing semiconductor inspection toolsKLA TENCOR CORP·Filed 2000·Granted Aug 13, 2002·159 cites·18 claims
- 0896US5537669AInspection method and apparatus for the inspection of either random or repeating patternsKLA INSTR CORP·Filed 1993·Granted Jul 16, 1996·224 cites·30 claims
- 0996US4845558AMethod and apparatus for detecting defects in repeated microminiature patternsKLA INSTR CORP·Filed 1987·Granted Jul 4, 1989·247 cites·14 claims
- 1095US10325004B1Method of optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrologyDZIURA THADDEUS G·Filed 2016·Granted Jun 18, 2019·11 cites·14 claims
- 1195US8879073B2Optical metrology using targets with field enhancement elementsKLA TENCOR CORP·Filed 2013·Granted Nov 4, 2014·23 cites·20 claims
- 1295US7136159B2Excimer laser inspection systemKLA TENCOR TECH CORP·Filed 2002·Granted Nov 14, 2006·69 cites·44 claims
- 1395US6816249B2High throughput brightfield/darkfield wafer inspection system using advanced optical techniquesKLA TENCOR CORP·Filed 2001·Granted Nov 9, 2004·49 cites·35 claims
- 1495US6524873B1Continuous movement scans of test structures on semiconductor integrated circuitsKLA TENCOR·Filed 2000·Granted Feb 25, 2003·102 cites·23 claims
- 1595US6445199B1Methods and apparatus for generating spatially resolved voltage contrast maps of semiconductor test structuresKLA TENCOR CORP·Filed 2000·Granted Sep 3, 2002·106 cites·20 claims
- 1695US6137570ASystem and method for analyzing topological features on a surfaceKLA TENCOR CORP·Filed 1998·Granted Oct 24, 2000·161 cites·29 claims
- 1794US10788759B2Prediction based chucking and lithography control optimizationKLA TENCOR CORP·Filed 2018·Granted Sep 29, 2020·5 cites·27 claims
- 1894US6078386AInspection system simultaneously utilizing monochromatic darkfield and broadband brightfield illumination sourcesKLA INSTR CORP·Filed 1998·Granted Jun 20, 2000·140 cites·24 claims
- 1993US6392793B1High NA imaging systemKLA TENCOR CORP·Filed 2000·Granted May 21, 2002·39 cites·20 claims
- 2092US7554655B2High throughput brightfield/darkfield water inspection system using advanced optical techniquesKLA TENCOR CORP·Filed 2008·Granted Jun 30, 2009·16 cites·21 claims
- 2192US6867406B1Confocal wafer inspection method and apparatus using fly lens arrangementKLA TENCOR CORP·Filed 2000·Granted Mar 15, 2005·43 cites·32 claims
- 2292US6483638B1Ultra-broadband UV microscope imaging system with wide range zoom capabilityKLA TENCOR CORP·Filed 2000·Granted Nov 19, 2002·34 cites·18 claims
- 2391US7728968B2Excimer laser inspection systemKLA TENCOR TECH CORP·Filed 2006·Granted Jun 1, 2010·14 cites·30 claims
- 2490US6133576ABroad spectrum ultraviolet inspection methods employing catadioptric imagingKLA INSTR CORP·Filed 1997·Granted Oct 17, 2000·66 cites·11 claims
- 2589US7858911B2Confocal wafer inspection system and methodKLA TENCOR CORP·Filed 2008·Granted Dec 28, 2010·15 cites·19 claims
- 2689US7109458B2Confocal wafer depth scanning inspection methodKLA TENCOR CORP·Filed 2005·Granted Sep 19, 2006·15 cites·20 claims
- 2789US6313467B1Broad spectrum ultraviolet inspection methods employing catadioptric imagingKLA TENCOR INC·Filed 2000·Granted Nov 6, 2001·28 cites·36 claims
- 2886US7164475B2High throughput brightfield/darkfield wafer inspection system using advanced optical techniquesKLA TENCOR TECH CORP·Filed 2004·Granted Jan 16, 2007·17 cites·32 claims
- 2985US7733111B1Segmented optical and electrical testing for photovoltaic devicesKLA TENCOR CORP·Filed 2008·Granted Jun 8, 2010·28 cites·16 claims
- 3085US6956694B2Broad spectrum ultraviolet inspection systems employing catadioptric imagingKLA TENCOR TECH CORP·Filed 2001·Granted Oct 18, 2005·16 cites·20 claims
- 3184US8832611B2Process aware metrologyKLA TENCOR CORP·Filed 2013·Granted Sep 9, 2014·5 cites·13 claims
- 3284US7465913B2System and method for sensing using adjustable modulation transfer function (MTF) with voltage variations relative to depletion depth at a pixelKLA TENCOR CORP·Filed 2006·Granted Dec 16, 2008·6 cites·19 claims
- 3383US8468471B2Process aware metrologyLIU XUEFENG·Filed 2012·Granted Jun 18, 2013·5 cites·23 claims
- 3483US6665432B1Inspection method and apparatus for the inspection of either random or repeating patternsFiled 2000·Granted Dec 16, 2003·37 cites·9 claims
- 3582US8553217B2EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafersCHUANG YUNG-HO·Filed 2010·Granted Oct 8, 2013·3 cites·56 claims
- 3682US7660686B1Ion implant metrology system with fault detection and identificationKLA TENCOR CORP·Filed 2008·Granted Feb 9, 2010·9 cites·21 claims
- 3781US9377414B2EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafersKLA TENCOR CORP·Filed 2014·Granted Jun 28, 2016·2 cites·18 claims
- 3881US6560011B2High NA system for multiple mode imagingKLA TENCOR CORP·Filed 2002·Granted May 6, 2003·12 cites·20 claims
- 3980US7457034B2High NA system for multiple mode imagingKLA TENCOR CORP·Filed 2006·Granted Nov 25, 2008·3 cites·21 claims
- 4078US7399950B2Confocal wafer inspection method and apparatus using fly lens arrangementKLA TENCOR CORP·Filed 2006·Granted Jul 15, 2008·6 cites·19 claims
- 4178US7035001B2High NA system for multiple mode imagingKLA TENCOR CORP·Filed 2003·Granted Apr 25, 2006·10 cites·20 claims
- 4278US6801357B2Ultra-broadband UV microscope imaging system with wide range zoom capabilityKLA TENCOR CORP·Filed 2002·Granted Oct 5, 2004·13 cites·23 claims
- 4377US7379173B2High throughput brightfield/darkfield wafer inspection system using advanced optical techniquesKLA TENCOR CORP·Filed 2004·Granted May 27, 2008·9 cites·25 claims
- 4477US6021214AInspection method and apparatus for the inspection of either random or repeating patternsKLA INSTR CORP·Filed 1995·Granted Feb 1, 2000·83 cites·4 claims
- 4576US9310296B2Optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrologyDZIURA THADDEUS G·Filed 2011·Granted Apr 12, 2016·4 cites·24 claims
- 4675US7126100B1System and method for sensing using adjustable modulation transfer function (MTF)KLA TENCOR TECH CORP·Filed 2004·Granted Oct 24, 2006·10 cites·26 claims
- 4774US8692986B2EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafersKLA TENCOR CORP·Filed 2013·Granted Apr 8, 2014·1 cites·19 claims
- 4874US7259844B2High throughput darkfield/brightfield wafer inspection system using advanced optical techniquesKLA TENCOR CORP·Filed 2007·Granted Aug 21, 2007·2 cites·20 claims
- 4970US7522275B2High throughput darkfield/brightfield wafer inspection system using advanced optical techniquesKLA TENCOR CORP·Filed 2007·Granted Apr 21, 2009·1 cites·20 claims
- 5064US2010033716A1Optical inspection of a specimen using multi-channel responses from the specimenTSAI BIN-MING BENJAMIN·Filed 2009·Application pending·0 cites
Showing the top 50 of 66 patent records by PatentIndex Score.
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