P

Inventor

MATSUURA HIROYUKI

JP91 patents
⚠️ This page may combine multiple inventors who share the name “MATSUURA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

14 patents
US7632757B2Dec 15, 2009

Method for forming silicon oxynitride film

TOKYO ELECTRON LTD63 citations98
US7625609B2Dec 1, 2009

Formation of silicon nitride film

TOKYO ELECTRON LTD59 citations98
US7815739B2Oct 19, 2010

Vertical batch processing apparatus

TOKYO ELECTRON LTD37 citations93
USD600659SSep 22, 2009

Process tube for manufacturing semiconductor wafers

TOKYO ELECTRON LTD36 citations92
US8051870B2Nov 8, 2011

Pressure reduction process device, pressure reduction process method, and pressure regulation valve

TOKYO ELECTRON LTD8 citations84
US7927662B2Apr 19, 2011

CVD method in vertical CVD apparatus using different reactive gases

TOKYO ELECTRON LTD15 citations84
US7442656B2Oct 28, 2008

Method and apparatus for forming silicon oxide film

TOKYO ELECTRON LTD10 citations84
USD521465SMay 23, 2006

Process tube for semiconductor device manufacturing apparatus

TOKYO ELECTRON LTD13 citations84
USD521464SMay 23, 2006

Process tube for semiconductor device manufacturing apparatus

TOKYO ELECTRON LTD15 citations84
USD564462SMar 18, 2008

RF electrode for a process tube of semiconductor manufacturing apparatus

TOKYO ELECTRON LTD6 citations74
USD520467SMay 9, 2006

Process tube for semiconductor device manufacturing apparatus

TOKYO ELECTRON LTD8 citations74
US10186429B2Jan 22, 2019

Heat treatment apparatus, heat treatment method, and program

TOKYO ELECTRON LTD3 citations73
US8354623B2Jan 15, 2013

Treatment apparatus, treatment method, and storage medium

TOKYO ELECTRON LTD6 citations73
US12525432B2Jan 13, 2026

Plasma processing apparatus and plasma processing method

TOKYO ELECTRON LTD0 citations63

TDK CORP

4 patents

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

4 patents

YOKOGAWA HOKUSHIN ELECTRIC

4 patents

MATSUURA HIROYUKI

4 patents

YOKOGAWA ELECTRIC CORP

4 patents

PANASONIC CORP

4 patents

PANASONIC IP MAN CO LTD

2 patents

SYSMEX CORP

2 patents

AOYAMA TATSUJI

2 patents

HAMAMATSU PHOTONICS KK

1 patent

FUJITSU LTD

1 patent

ABE TOSHIJI

1 patent

HITACHI LTD

1 patent

SUMITOMO ELECTRIC INDUSTRIES

1 patent

TERADA HIROTOSHI

1 patent

Showing the top 50 of 91 patents by PatentIndex Score.