Inventor · disambiguated record
Alan D. Brodie
Also filed as: BRODIE ALAN · BRODIE ALAN D · BRODIE ALAN DAVID
35 granted patents·5 pending applications·1,537 citations·filing 1994–2024
97Inventor score
Top patents by PatentIndex Score
40 records- 0198US6844550B1Multi-beam multi-column electron beam inspection systemMULTIBEAM SYSTEMS INC·Filed 2003·Granted Jan 18, 2005·142 cites·17 claims
- 0297US5717204AInspecting optical masks with electron beam microscopyKLA INSTR CORP·Filed 1996·Granted Feb 10, 1998·148 cites·8 claims
- 0396US6617587B2Electron optics for multi-beam electron beam lithography toolMULTIBEAM SYSTEMS INC·Filed 2002·Granted Sep 9, 2003·104 cites·6 claims
- 0496US5665968AInspecting optical masks with electron beam microscopyKLA INSTR CORP·Filed 1996·Granted Sep 9, 1997·120 cites·2 claims
- 0595US7335894B2High current density particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Feb 26, 2008·40 cites·27 claims
- 0695US5578821AElectron beam inspection system and methodKLA INSTR CORP·Filed 1995·Granted Nov 26, 1996·421 cites·51 claims
- 0795US5502306AElectron beam inspection system and methodKLA INSTR CORP·Filed 1994·Granted Mar 26, 1996·400 cites·35 claims
- 0893US6977375B2Multi-beam multi-column electron beam inspection systemMULTIBEAM SYSTEMS INC·Filed 2001·Granted Dec 20, 2005·47 cites·29 claims
- 0991US10338013B1Position feedback for multi-beam particle detectorKLA TENCOR CORP·Filed 2018·Granted Jul 2, 2019·10 cites·31 claims
- 1091US10242839B2Reduced Coulomb interactions in a multi-beam columnKLA TENCOR CORP·Filed 2017·Granted Mar 26, 2019·6 cites·20 claims
- 1188US8253119B1Well-based dynamic pattern generatorBRODIE ALAN D·Filed 2009·Granted Aug 28, 2012·14 cites·15 claims
- 1288US7828622B1Sharpening metal carbide emittersKLA TENCOR TECH CORP·Filed 2007·Granted Nov 9, 2010·12 cites·13 claims
- 1386US11699607B2Segmented multi-channel, backside illuminated, solid state detector with a through-hole for detecting secondary and backscattered electronsKLA CORP·Filed 2021·Granted Jul 11, 2023·1 cites·20 claims
- 1486US9874597B2Light-emitting device test systemsKLA TENCOR CORP·Filed 2015·Granted Jan 23, 2018·4 cites·8 claims
- 1586US7091486B1Method and apparatus for beam current fluctuation correctionKLA TENCOR TECH CORP·Filed 2004·Granted Aug 15, 2006·23 cites·22 claims
- 1685US7615747B1Sampling feedback systemKLA TENCOR CORP·Filed 2007·Granted Nov 10, 2009·8 cites·20 claims
- 1782US11239048B2Arrayed column detectorKLA CORP·Filed 2020·Granted Feb 1, 2022·1 cites·31 claims
- 1881US8063365B1Non-shot-noise-limited source for electron beam lithography or inspectionSTANDIFORD KEITH·Filed 2008·Granted Nov 22, 2011·8 cites·11 claims
- 1980US7855362B1Contamination pinning for auger analysisKLA TENCOR TECH CORP·Filed 2007·Granted Dec 21, 2010·6 cites·24 claims
- 2078US10497536B2Apparatus and method for correcting arrayed astigmatism in a multi-column scanning electron microscopy systemKLA TENCOR CORP·Filed 2017·Granted Dec 3, 2019·2 cites·12 claims
- 2178US9824851B2Charge drain coating for electron-optical MEMSTONG WILLIAM M·Filed 2013·Granted Nov 21, 2017·1 cites·14 claims
- 2278US9214344B1Pillar-supported array of micro electron lensesKLA TENCOR CORP·Filed 2014·Granted Dec 15, 2015·4 cites·20 claims
- 2376US9040942B1Electron beam lithography with linear column array and rotary stageSTANDIFORD KEITH·Filed 2008·Granted May 26, 2015·5 cites·11 claims
- 2475US8642981B1Electron microscope assembly for viewing the wafer plane image of an electron beam lithography toolKLA TENCOR CORP·Filed 2013·Granted Feb 4, 2014·3 cites·39 claims
- 2572US10072334B2Digital pattern generator having charge drain coatingKLA TENCOR CORP·Filed 2017·Granted Sep 11, 2018·0 cites·20 claims
- 2667US12322568B2Auto-focus sensor implementation for multi-column microscopesKLA CORP·Filed 2022·Granted Jun 3, 2025·0 cites·20 claims
- 2767US6316164B1Proximity effect correction method through uniform removal of fraction of interior pixelsFiled 2000·Granted Nov 13, 2001·7 cites·5 claims
- 2864US2025316437A1Ultra-high sensitivity hybrid inspection with full wafer coverage capabilityKLA CORP·Filed 2024·Application pending·0 cites
- 2963US2025357067A1Aberration corrector for scanning electron microscope with multiple electron beamsKLA CORP·Filed 2024·Application pending·0 cites
- 3062US11495428B2Plasmonic photocathode emitters at ultraviolet and visible wavelengthsKLA CORP·Filed 2020·Granted Nov 8, 2022·0 cites·20 claims
- 3155US2024014000A1Miniature electron optical column with a large field of viewKLA CORP·Filed 2022·Application pending·0 cites
- 3254US2023326704A1Miniature hybrid electron beam columnKLA CORP·Filed 2022·Application pending·0 cites
- 3349US9715995B1Apparatus and methods for electron beam lithography using array cathodeKLA TENCOR CORP·Filed 2014·Granted Jul 25, 2017·0 cites·18 claims
- 3447US7405402B1Method and apparatus for aberration-insensitive electron beam imagingKLA TENCOR TECH CORP·Filed 2006·Granted Jul 29, 2008·0 cites·20 claims
- 3544US11373838B2Multi-beam electron characterization tool with telecentric illuminationKLA TENCOR CORP·Filed 2018·Granted Jun 28, 2022·0 cites·21 claims
- 3643US8957394B2Compact high-voltage electron gunKLA TENCOR CORP·Filed 2012·Granted Feb 17, 2015·0 cites·15 claims
- 3741US11410830B1Defect inspection and review using transmissive current image of charged particle beam systemKLA TENCOR CORP·Filed 2019·Granted Aug 9, 2022·0 cites·17 claims
- 3841US2004119021A1Electron optics for multi-beam electron beam lithography toolION DIAGNOSTICS·Filed 2003·Application pending·0 cites
- 3937US12264554B2Valve arrangementPETROLEUM TECHNOLOGY CO AS·Filed 2020·Granted Apr 1, 2025·0 cites·12 claims
- 4037US11302511B2Field curvature correction for multi-beam inspection systemsKLA TENCOR CORP·Filed 2016·Granted Apr 12, 2022·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →