Inventor · disambiguated record
Antti Rahtu
Also filed as: RAHTU ANTTI · RAHTU ANTTI H
21 granted patents·2 pending applications·421 citations·filing 2000–2021
95Inventor score
Top patents by PatentIndex Score
23 records- 0197US6632279B1Method for growing thin oxide filmsASM MICROCHEMISTRY OY·Filed 2000·Granted Oct 14, 2003·314 cites·7 claims
- 0296US9831094B2Enhanced thin film depositionASM INT NV·Filed 2015·Granted Nov 28, 2017·13 cites·14 claims
- 0394US8993055B2Enhanced thin film depositionRAHTU ANTTI·Filed 2006·Granted Mar 31, 2015·28 cites·33 claims
- 0491US7704896B2Atomic layer deposition of thin films on germaniumASM INT·Filed 2006·Granted Apr 27, 2010·18 cites·23 claims
- 0590US10964534B2Enhanced thin film depositionASM INT NV·Filed 2019·Granted Mar 30, 2021·3 cites·20 claims
- 0690US9670582B2ALD of metal-containing films using cyclopentadienyl compoundsASM IP HOLDING BV·Filed 2016·Granted Jun 6, 2017·2 cites·17 claims
- 0788US11155919B2ALD of metal-containing films using cyclopentadienyl compoundsASM IP HOLDING BV·Filed 2019·Granted Oct 26, 2021·1 cites·19 claims
- 0888US8025922B2Enhanced deposition of noble metalsASM INT·Filed 2006·Granted Sep 27, 2011·10 cites·43 claims
- 0986US9587307B2Enhanced deposition of noble metalsASM INT NV·Filed 2013·Granted Mar 7, 2017·5 cites·18 claims
- 1085US10297444B2Enhanced thin film depositionASM INT NV·Filed 2017·Granted May 21, 2019·2 cites·20 claims
- 1179US2022178027A1Ald of metal-containing films using cyclopentadienyl compoundsASM IP HOLDING BV·Filed 2021·Application pending·0 cites
- 1277US8795771B2ALD of metal-containing films using cyclopentadienyl compoundsBARRY SEAN T·Filed 2006·Granted Aug 5, 2014·3 cites·23 claims
- 1374US9850575B1ALD of metal-containing films using cyclopentadienly compoundsASM IP HOLDING BV·Filed 2017·Granted Dec 26, 2017·0 cites·23 claims
- 1474US9273391B2ALD of zirconium-containing films using cyclopentadienyl compoundsASM IP HOLDING BV·Filed 2014·Granted Mar 1, 2016·0 cites·22 claims
- 1573US10294563B2ALD of hafnium-containing films using cyclopentadienyl compoundsASM IP HOLDING BV·Filed 2017·Granted May 21, 2019·0 cites·19 claims
- 1673US8048484B2Method for the deposition of a film by CVD or ALDASM INT·Filed 2006·Granted Nov 1, 2011·5 cites·23 claims
- 1772US7377976B2Method for growing thin oxide filmsRITALA MIKKO·Filed 2005·Granted May 27, 2008·4 cites·25 claims
- 1872US6932867B2Method for growing thin oxide filmsASM INT·Filed 2003·Granted Aug 23, 2005·11 cites·18 claims
- 1971US9127351B2Enhanced thin film depositionASM INT·Filed 2013·Granted Sep 8, 2015·1 cites·22 claims
- 2069US9677175B2ALD of metal-containing films using cyclopentadienyl compoundsASM IP HOLDING BV·Filed 2016·Granted Jun 13, 2017·0 cites·22 claims
- 2169US8685165B2Metal oxide filmsRAHTU ANTTI·Filed 2007·Granted Apr 1, 2014·1 cites·22 claims
- 2255US2006219157A1Oxide films containing titaniumRAHTU ANTTI·Filed 2005·Application pending·0 cites
- 2352US8501275B2Enhanced deposition of noble metalsHAUKKA SUVI P·Filed 2011·Granted Aug 6, 2013·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →