Inventor · disambiguated record
Daniel Kavaldjiev
Also filed as: KAVALDJIEV DANIEL · KAVALDJIEV DANIEL I · KAVALDJIEV DANIEL IVANOV
33 granted patents·2 pending applications·415 citations·filing 1999–2024
97Inventor score
Top patents by PatentIndex Score
35 records- 0196US9891177B2TDI sensor in a darkfield systemKLA TENCOR CORP·Filed 2014·Granted Feb 13, 2018·56 cites·41 claims
- 0296US8629384B1Photomultiplier tube optimized for surface inspection in the ultravioletBIELLAK STEPHEN·Filed 2010·Granted Jan 14, 2014·42 cites·4 claims
- 0395US10942135B2Radial polarizer for particle detectionKLA CORP·Filed 2019·Granted Mar 9, 2021·9 cites·27 claims
- 0494US9279774B2Wafer inspectionROMANOVSKY ANATOLY·Filed 2012·Granted Mar 8, 2016·29 cites·19 claims
- 0593US10948423B2Sensitive particle detection with spatially-varying polarization rotator and polarizerKLA CORP·Filed 2019·Granted Mar 16, 2021·7 cites·31 claims
- 0693US7528944B2Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process toolKLA TENCOR TECH CORP·Filed 2007·Granted May 5, 2009·28 cites·16 claims
- 0792US8169613B1Segmented polarizer for optimizing performance of a surface inspection systemBIELLAK STEPHEN·Filed 2009·Granted May 1, 2012·23 cites·18 claims
- 0891US8294887B1Fast laser power control with improved reliability for surface inspectionBIELLAK STEPHEN·Filed 2010·Granted Oct 23, 2012·11 cites·19 claims
- 0991US7912658B2Systems and methods for determining two or more characteristics of a waferKLA TENCOR CORP·Filed 2008·Granted Mar 22, 2011·19 cites·25 claims
- 1090US10488348B2Wafer inspectionKLA TENCOR CORP·Filed 2018·Granted Nov 26, 2019·3 cites·57 claims
- 1189US8520208B1Segmented polarizer for optimizing performance of a surface inspection systemBIELLAK STEPHEN·Filed 2012·Granted Aug 27, 2013·9 cites·20 claims
- 1288US8269960B2Computer-implemented methods for inspecting and/or classifying a waferREICH JUERGEN·Filed 2008·Granted Sep 18, 2012·19 cites·38 claims
- 1388US7173715B2Reduced coherence symmetric grazing incidence differential interferometerKLA TENCOR CORP·Filed 2005·Granted Feb 6, 2007·11 cites·20 claims
- 1487US7057741B1Reduced coherence symmetric grazing incidence differential interferometerKLA TENCOR CORP·Filed 2000·Granted Jun 6, 2006·31 cites·23 claims
- 1586US10462391B2Dark-field inspection using a low-noise sensorKLA TENCOR CORP·Filed 2016·Granted Oct 29, 2019·5 cites·21 claims
- 1685US10739276B2Minimizing filed size to reduce unwanted stray lightKLA TENCOR CORP·Filed 2017·Granted Aug 11, 2020·4 cites·20 claims
- 1785US7436505B2Computer-implemented methods and systems for determining a configuration for a light scattering inspection systemKLA TENCOR TECH CORP·Filed 2006·Granted Oct 14, 2008·12 cites·22 claims
- 1884US7009696B2Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection toolKLA TENCOR CORP·Filed 2004·Granted Mar 7, 2006·19 cites·21 claims
- 1983US8068234B2Method and apparatus for measuring shape or thickness information of a substrateTANG SHOUHONG·Filed 2009·Granted Nov 29, 2011·15 cites·58 claims
- 2080US8494802B2Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a waferCHEN HAIGUANG·Filed 2009·Granted Jul 23, 2013·8 cites·19 claims
- 2180US6414752B1Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection toolKLA TENCOR TECH CORP·Filed 1999·Granted Jul 2, 2002·34 cites·16 claims
- 2277US8134698B1Dynamic range extension in surface inspection systemsWOLTERS CHRISTIAN·Filed 2008·Granted Mar 13, 2012·6 cites·26 claims
- 2371US8786842B2Grazing and normal incidence interferometer having common reference surfaceMULLER DIETER·Filed 2007·Granted Jul 22, 2014·5 cites·20 claims
- 2468US2025383294A1Speckle noise reduction using pupil masksKLA CORP·Filed 2024·Application pending·0 cites
- 2567US9273952B2Grazing and normal incidence interferometer having common reference surfaceKLA TENCOR CORP·Filed 2014·Granted Mar 1, 2016·1 cites·20 claims
- 2666US2025116598A1Enhanced modes for scanning acoustic microscope inspection in semiconductor inspectionKLA CORP·Filed 2024·Application pending·0 cites
- 2765US6686996B2Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection toolKLA TENCOR CORP·Filed 2002·Granted Feb 3, 2004·7 cites·40 claims
- 2862US11243175B2Sensitive particle detection with spatially-varying polarization rotator and polarizerKLA CORP·Filed 2021·Granted Feb 8, 2022·0 cites·45 claims
- 2962US9086389B2Sample inspection system detectorKLA TENCOR CORP·Filed 2013·Granted Jul 21, 2015·0 cites·20 claims
- 3060US9915622B2Wafer inspectionKLA TENCOR CORP·Filed 2015·Granted Mar 13, 2018·0 cites·20 claims
- 3156US7436506B2Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection toolKLA TENCOR CORP·Filed 2006·Granted Oct 14, 2008·1 cites·20 claims
- 3252US11733172B2Apparatus and method for rotating an optical objectiveKLA CORP·Filed 2021·Granted Aug 22, 2023·0 cites·38 claims
- 3352US7663746B2Method and apparatus for scanning, stitching and damping measurements of a double sided metrology inspection toolKLA TENCOR TECHOLOGIES CORP·Filed 2008·Granted Feb 16, 2010·1 cites·20 claims
- 3444US11441893B2Multi-spot analysis system with multiple optical probesKLA TENCOR CORP·Filed 2018·Granted Sep 13, 2022·0 cites·47 claims
- 3543US8934091B2Monitoring incident beam position in a wafer inspection systemKLA TENCOR CORP·Filed 2013·Granted Jan 13, 2015·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →