Inventor · disambiguated record
Daniel Ray Trojan
Also filed as: TROJAN DANIEL · TROJAN DANIEL R · TROJAN DANIEL RAY
17 granted patents·6 pending applications·194 citations·filing 1997–2024
92Inventor score
Files withAXUS TECH LLC15SPEEDFAM IPEC CORP3TROJAN DANIEL R2APPLIED MATERIALS INC1AXUS TECHNOLOGY LLC1
Top patents by PatentIndex Score
23 records- 0186US6368183B1Wafer cleaning apparatus and associated wafer processing methodsSPEEDFAM IPEC CORP·Filed 2000·Granted Apr 9, 2002·39 cites·21 claims
- 0286US5899798ALow profile, low hysteresis force feedback gimbal system for chemical mechanical polishingOBSIDIAN INC·Filed 1997·Granted May 4, 1999·72 cites·22 claims
- 0383US7540799B1System for adjusting an end effector relative to a workpieceTROJAN DANIEL R·Filed 2007·Granted Jun 2, 2009·12 cites·17 claims
- 0480US11904431B2Method and apparatus for insitu adjustment of wafer slip detection during work piece polishingAXUS TECH LLC·Filed 2020·Granted Feb 20, 2024·1 cites·13 claims
- 0580US6923711B2Multizone carrier with process monitoring system for chemical-mechanical planarization toolSPEEDFAM IPEC CORP·Filed 2001·Granted Aug 2, 2005·25 cites·22 claims
- 0675US2025329556A1Temperature controlled substrate carrier and polishing componentsAXUS TECH LLC·Filed 2024·Application pending·0 cites
- 0774US6116990AAdjustable low profile gimbal system for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1999·Granted Sep 12, 2000·36 cites·32 claims
- 0874US2025065473A1Containment and exhaust system for substrate polishing componentsAXUS TECH LLC·Filed 2024·Application pending·0 cites
- 0973US2022088744A1Cmp machine with improved throughput and process flexibilityAXUS TECH LLC·Filed 2021·Application pending·0 cites
- 1072US12377520B2Method and apparatus for insitu adjustment of wafer slip detection during work piece polishingAXUS TECH LLC·Filed 2024·Granted Aug 5, 2025·0 cites·16 claims
- 1169US12145236B2Containment and exhaust system for substrate polishing componentsAXUS TECH LLC·Filed 2022·Granted Nov 19, 2024·0 cites·20 claims
- 1264US11376705B2Chemical mechanical planarization carrier systemAXUS TECH LLC·Filed 2019·Granted Jul 5, 2022·0 cites·8 claims
- 1362US12217979B2Temperature controlled substrate carrier and polishing componentsAXUS TECH LLC·Filed 2020·Granted Feb 4, 2025·0 cites·24 claims
- 1462US2025187141A1Apparatus and method for in-situ chemical separation and recirculation in a chemical mechanical processing systemAXUS TECH LLC·Filed 2024·Application pending·0 cites
- 1561US2018311784A1Cmp machine with improved throughput and process flexibilityAXUS TECH LLC·Filed 2018·Application pending·0 cites
- 1657US11685012B2Planarized membrane and methods for substrate processing systemsAXUS TECH LLC·Filed 2018·Granted Jun 27, 2023·0 cites·26 claims
- 1757US10315286B2Chemical mechanical planarization carrier systemAXUS TECH LLC·Filed 2017·Granted Jun 11, 2019·0 cites·18 claims
- 1853US12023778B2Substrate carrier head and processing systemAXUS TECH LLC·Filed 2020·Granted Jul 2, 2024·0 cites·20 claims
- 1950US2022395956A1Method and apparatus for in-situ monitoring of chemical mechanical planarization (cmp) processesAXUS TECH LLC·Filed 2022·Application pending·0 cites
- 2045US12198935B2Atmospheric plasma in wafer processing system optimizationAXUS TECH LLC·Filed 2018·Granted Jan 14, 2025·0 cites·16 claims
- 2143US6125861APost-CMP wet-HF cleaning stationSPEEDFAM IPEC CORP·Filed 1998·Granted Oct 3, 2000·9 cites·13 claims
- 2236US8944887B2Apparatus and method for surface grinding and edge trimming workpiecesTROJAN DANIEL R·Filed 2011·Granted Feb 3, 2015·0 cites·20 claims
- 2332US9390903B2Method and apparatus for wafer backgrinding and edge trimming on one machineAXUS TECHNOLOGY LLC·Filed 2013·Granted Jul 12, 2016·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →