Inventor · disambiguated record
Frank Johannes Jacobus Van Boxtel
Also filed as: VAN BOXTEL FRANK JOHANNES JACOBUS
31 granted patents·2 pending applications·33 citations·filing 2011–2019
94Inventor score
Files withASML NETHERLANDS BV19VAN BOXTEL FRANK JOHANNES JACOBUS5ASML HOLDING NV4GOSEN JEROEN GERARD1KUNNEN JOHAN GERTRUDIS CORNELIS1
Top patents by PatentIndex Score
33 records- 0188US9632434B2Reticle cooling system in a lithographic apparatusASML HOLDING NV·Filed 2015·Granted Apr 25, 2017·3 cites·20 claims
- 0287US10222707B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Mar 5, 2019·3 cites·20 claims
- 0383US9081311B2Lithographic apparatus and device manufacturing methodVOGEL HERMAN·Filed 2012·Granted Jul 14, 2015·5 cites·20 claims
- 0481US9632433B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2013·Granted Apr 25, 2017·2 cites·9 claims
- 0580US10394139B2Patterning device cooling apparatusASML NETHERLANDS BV·Filed 2017·Granted Aug 27, 2019·2 cites·21 claims
- 0680US8675169B2Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2011·Granted Mar 18, 2014·4 cites·20 claims
- 0778US9766557B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2017·Granted Sep 19, 2017·1 cites·13 claims
- 0877US9513568B2Lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Dec 6, 2016·2 cites·20 claims
- 0976US9939740B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Apr 10, 2018·2 cites·21 claims
- 1074US10495986B2Patterning device cooling system and method of thermally conditioning a patterning deviceASML NETHERLANDS BV·Filed 2017·Granted Dec 3, 2019·1 cites·22 claims
- 1174US10495985B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Dec 3, 2019·1 cites·23 claims
- 1274US9280063B2Substrate table assembly, an immersion lithographic apparatus and a device manufacturing methodKUNNEN JOHAN GERTRUDIS CORNELIS·Filed 2012·Granted Mar 8, 2016·3 cites·20 claims
- 1370US9811007B2Lithographic apparatus and method of cooling a component in a lithographic apparatusVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2012·Granted Nov 7, 2017·2 cites·16 claims
- 1468US9977348B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2015·Granted May 22, 2018·1 cites·20 claims
- 1564US11036148B2Patterning device cooling system and method of thermally conditioning a patterning deviceASML NETHERLANDS BV·Filed 2019·Granted Jun 15, 2021·0 cites·21 claims
- 1661US10642166B2Patterning device cooling apparatusASML NETHERLANDS BV·Filed 2019·Granted May 5, 2020·0 cites·20 claims
- 1761US9977351B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2017·Granted May 22, 2018·0 cites·14 claims
- 1857US10345717B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2018·Granted Jul 9, 2019·0 cites·23 claims
- 1954US10788763B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 29, 2020·0 cites·20 claims
- 2049US10114295B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Oct 30, 2018·0 cites·21 claims
- 2149US9274436B2Lithographic apparatus and a device manufacturing methodPOLET THEODORUS WILHELMUS·Filed 2012·Granted Mar 1, 2016·0 cites·21 claims
- 2246US9575406B2Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing methodVAN DER GAAG MARC LÉON·Filed 2012·Granted Feb 21, 2017·1 cites·20 claims
- 2343US11048178B2Lithographic apparatus with improved patterning performanceASML NETHERLANDS BV·Filed 2018·Granted Jun 29, 2021·0 cites·20 claims
- 2443US10031428B2Gas flow optimization in reticle stage environmentASML NETHERLANDS BV·Filed 2014·Granted Jul 24, 2018·0 cites·38 claims
- 2542US8810769B2Lithographic apparatus, an illumination system, a projection system and a method of manufacturing a device using a lithographic apparatusGOSEN JEROEN GERARD·Filed 2011·Granted Aug 19, 2014·0 cites·20 claims
- 2640US8675170B2Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2012·Granted Mar 18, 2014·0 cites·20 claims
- 2739US10114299B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 30, 2018·0 cites·19 claims
- 2838US11009800B2Measurement system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted May 18, 2021·0 cites·20 claims
- 2938US8988657B2Lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2012·Granted Mar 24, 2015·0 cites·19 claims
- 3037US10133197B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Nov 20, 2018·0 cites·20 claims
- 3136US11762304B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 19, 2023·0 cites·22 claims
- 3236US2018101099A1Lithographic ApparatusASML NETHERLANDS BV·Filed 2016·Application pending·0 cites
- 3332US2012236275A1Projection system, lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →