Inventor · disambiguated record
George Kren
Also filed as: KREN GEORGE · KREN GEORGE J · URBANEK KAREL
34 granted patents·1 pending application·1,287 citations·filing 1976–2014
98Inventor score
Top patents by PatentIndex Score
35 records- 0197US5416594ASurface scanner with thin film gaugeTENCOR INSTRUMENTS·Filed 1993·Granted May 16, 1995·210 cites·24 claims
- 0296US6781688B2Process for identifying defects in a substrate having non-uniform surface propertiesKLA TENCOR TECH CORP·Filed 2002·Granted Aug 24, 2004·90 cites·25 claims
- 0396US6271916B1Process and assembly for non-destructive surface inspectionsKLA TENCOR CORP·Filed 1996·Granted Aug 7, 2001·278 cites·34 claims
- 0495US7199874B2Darkfield inspection system having a programmable light selection arrayKLA TENCOR TECH CORP·Filed 2005·Granted Apr 3, 2007·26 cites·14 claims
- 0593US4766324AParticle detection method including comparison between sequential scansTENCOR INSTRUMENTS·Filed 1987·Granted Aug 23, 1988·138 cites·19 claims
- 0692US7227628B1Wafer inspection systems and methods for analyzing inspection dataKLA TENCOR TECH CORP·Filed 2004·Granted Jun 5, 2007·58 cites·30 claims
- 0791US8294887B1Fast laser power control with improved reliability for surface inspectionBIELLAK STEPHEN·Filed 2010·Granted Oct 23, 2012·11 cites·19 claims
- 0891US4302721ANon-contacting resistivity instrument with structurally related conductance and distance measuring transducersTENCOR INSTRUMENTS·Filed 1979·Granted Nov 24, 1981·56 cites·29 claims
- 0991US4101874AFluid flow indicator and flow switchPERKIN ELMER CORP·Filed 1976·Granted Jul 18, 1978·49 cites·5 claims
- 1090US7417724B1Wafer inspection systems and methods for analyzing inspection dataKLA TENCOR TECH CORP·Filed 2007·Granted Aug 26, 2008·14 cites·32 claims
- 1189US7002677B2Darkfield inspection system having a programmable light selection arrayKLA TENCOR TECH CORP·Filed 2003·Granted Feb 21, 2006·31 cites·42 claims
- 1289US6606153B2Process and assembly for non-destructive surface inspectionsKLA TENCOR CORP·Filed 2001·Granted Aug 12, 2003·31 cites·26 claims
- 1384US8432944B2Extending the lifetime of a deep UV laser in a wafer inspection toolROMANOVSKY ANATOLY·Filed 2011·Granted Apr 30, 2013·8 cites·8 claims
- 1484US7009696B2Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection toolKLA TENCOR CORP·Filed 2004·Granted Mar 7, 2006·19 cites·21 claims
- 1583US8068234B2Method and apparatus for measuring shape or thickness information of a substrateTANG SHOUHONG·Filed 2009·Granted Nov 29, 2011·15 cites·58 claims
- 1683US7477371B2Process and assembly for non-destructive surface inspectionsKLA TENCOR CORP·Filed 2006·Granted Jan 13, 2009·6 cites·48 claims
- 1782US4103542AMetrology instrument for measuring vertical profiles of integrated circuitsTENCOR INSTRUMENTS·Filed 1977·Granted Aug 1, 1978·29 cites·24 claims
- 1880US8494802B2Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a waferCHEN HAIGUANG·Filed 2009·Granted Jul 23, 2013·8 cites·19 claims
- 1980US6414752B1Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection toolKLA TENCOR TECH CORP·Filed 1999·Granted Jul 2, 2002·34 cites·16 claims
- 2079US7102744B2Process and assembly for non-destructive surface inspectionsKLA TENCOR CORP·Filed 2003·Granted Sep 5, 2006·12 cites·34 claims
- 2174US6806966B1Copper CMP flatness monitor using grazing incidence interferometryKLA TENCOR TECHOLOGIES CORP·Filed 2000·Granted Oct 19, 2004·14 cites·41 claims
- 2273US4597708AWafer handling apparatusTENCOR INSTRUMENTS·Filed 1984·Granted Jul 1, 1986·36 cites·15 claims
- 2369US7505144B2Copper CMP flatness monitor using grazing incidence interferometryKLA TENCOR TECH CORP·Filed 2004·Granted Mar 17, 2009·5 cites·20 claims
- 2467US4175441AGauge for measuring distance to planar surfaces and thicknesses of planar membersTENCOR INSTRUMENTS·Filed 1978·Granted Nov 27, 1979·18 cites·23 claims
- 2565US6686996B2Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection toolKLA TENCOR CORP·Filed 2002·Granted Feb 3, 2004·7 cites·40 claims
- 2662US9194812B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2014·Granted Nov 24, 2015·0 cites·26 claims
- 2762US5083035APosition location in surface scanning using interval timing between scan marks on test wafersTENCOR INSTRUMENTS·Filed 1990·Granted Jan 21, 1992·25 cites·10 claims
- 2862US4280354AAcoustic method and apparatus for measuring surfaces of wafers and similar articlesTENCOR INSTRUMENTS·Filed 1980·Granted Jul 28, 1981·18 cites·16 claims
- 2960US4376482AWafer orientation systemTENCOR INSTRUMENTS·Filed 1981·Granted Mar 15, 1983·22 cites·9 claims
- 3059US4285053AAcoustic method and apparatus for measuring micron and submicron distancesTENCOR INSTRUMENTS·Filed 1979·Granted Aug 18, 1981·13 cites·8 claims
- 3156US8786850B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2012·Granted Jul 22, 2014·0 cites·28 claims
- 3256US7436506B2Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection toolKLA TENCOR CORP·Filed 2006·Granted Oct 14, 2008·1 cites·20 claims
- 3347US9052190B2Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sectionsKLA TENCOR CORP·Filed 2013·Granted Jun 9, 2015·0 cites·26 claims
- 3443US4282483AProbe for determining p or n-type conductivity of semiconductor materialTENCOR INSTRUMENTS·Filed 1979·Granted Aug 4, 1981·5 cites·26 claims
- 3540US2013038866A1Air flow management in a system with high speed spinning chuckKLA TENCOR CORP·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →