Inventor · disambiguated record
Guoheng Zhao
Also filed as: ZHAO GUOHENG
93 granted patents·20 pending applications·2,466 citations·filing 1997–2024
99Inventor score
Top patents by PatentIndex Score
113 records- 0199US6201601B1Sample inspection systemKLA TENCOR CORP·Filed 1997·Granted Mar 13, 2001·359 cites·51 claims
- 0298US7525649B1Surface inspection system using laser line illumination with two dimensional imagingKLA TENCOR TECH CORP·Filed 2007·Granted Apr 28, 2009·164 cites·19 claims
- 0398US6707540B1In-situ metalization monitoring using eddy current and optical measurementsKLA TENCOR CORP·Filed 2000·Granted Mar 16, 2004·162 cites·38 claims
- 0497US9874526B2Methods and apparatus for polarized wafer inspectionKLA TENCOR CORP·Filed 2017·Granted Jan 23, 2018·17 cites·22 claims
- 0597US8891079B2Wafer inspectionZHAO GUOHENG·Filed 2011·Granted Nov 18, 2014·57 cites·43 claims
- 0697US7607647B2Stabilizing a substrate using a vacuum preload air bearing chuckKLA TENCOR TECH CORP·Filed 2007·Granted Oct 27, 2009·96 cites·41 claims
- 0797US6639662B2Sample inspection systemKLA TENCOR CORP·Filed 2000·Granted Oct 28, 2003·85 cites·29 claims
- 0897US6608676B1System for detecting anomalies and/or features of a surfaceKLA TENCOR CORP·Filed 1997·Granted Aug 19, 2003·159 cites·62 claims
- 0996US9891177B2TDI sensor in a darkfield systemKLA TENCOR CORP·Filed 2014·Granted Feb 13, 2018·56 cites·41 claims
- 1096US6710876B1Metrology system using optical phaseKLA TENCOR TECH CORP·Filed 2000·Granted Mar 23, 2004·100 cites·52 claims
- 1196US6384910B2Sample inspection systemKLA TENCOR CORP·Filed 2000·Granted May 7, 2002·57 cites·17 claims
- 1295US11856833B2In-line monitoring of OLED layer thickness and dopant concentrationAPPLIED MATERIALS INC·Filed 2021·Granted Dec 26, 2023·3 cites·20 claims
- 1395US11442000B2In-situ, real-time detection of particulate defects in a fluidAPPLIED MATERIALS INC·Filed 2019·Granted Sep 13, 2022·15 cites·20 claims
- 1495US10942135B2Radial polarizer for particle detectionKLA CORP·Filed 2019·Granted Mar 9, 2021·9 cites·27 claims
- 1595US9194811B1Apparatus and methods for improving defect detection sensitivityKLA TENCOR CORP·Filed 2014·Granted Nov 24, 2015·23 cites·21 claims
- 1695US7989729B1Detecting and repairing defects of photovoltaic devicesKLA TENCOR CORP·Filed 2008·Granted Aug 2, 2011·48 cites·7 claims
- 1795US7345754B1Fourier filters and wafer inspection systemsKLA TENCOR TECH CORP·Filed 2005·Granted Mar 18, 2008·40 cites·24 claims
- 1894US10634487B2Method and system for optical three dimensional topography measurementKLA TENCOR CORP·Filed 2016·Granted Apr 28, 2020·11 cites·10 claims
- 1994US10228331B2Methods and apparatus for polarized wafer inspectionKLA TENCOR CORP·Filed 2017·Granted Mar 12, 2019·6 cites·17 claims
- 2094US9291575B2Wafer inspectionKLA TENCOR CORP·Filed 2014·Granted Mar 22, 2016·16 cites·37 claims
- 2194US9279774B2Wafer inspectionROMANOVSKY ANATOLY·Filed 2012·Granted Mar 8, 2016·29 cites·19 claims
- 2294US7369233B2Optical system for measuring samples using short wavelength radiationKLA TENCOR TECH CORP·Filed 2003·Granted May 6, 2008·62 cites·227 claims
- 2394US7301649B2System for scatterometric measurements and applicationsKLA TENCOR TECH CORP·Filed 2005·Granted Nov 27, 2007·21 cites·25 claims
- 2494US7099005B1System for scatterometric measurements and applicationsKLA TENCOR TECH CORP·Filed 2000·Granted Aug 29, 2006·49 cites·125 claims
- 2594US6724473B2Method and system using exposure control to inspect a surfaceKLA TENCOR TECH CORP·Filed 2002·Granted Apr 20, 2004·76 cites·53 claims
- 2693US7295303B1Methods and apparatus for inspecting a sampleKLA TENCOR TECH CORP·Filed 2004·Granted Nov 13, 2007·58 cites·42 claims
- 2793US6721052B2Systems for measuring periodic structuresKLA TECHNOLOGIES CORP·Filed 2000·Granted Apr 13, 2004·56 cites·101 claims
- 2892US11156566B2High sensitivity image-based reflectometryAPPLIED MATERIALS INC·Filed 2020·Granted Oct 26, 2021·3 cites·20 claims
- 2992US11150078B1High sensitivity image-based reflectometryAPPLIED MATERIALS INC·Filed 2020·Granted Oct 19, 2021·3 cites·17 claims
- 3092US7515253B2System for measuring a sample with a layer containing a periodic diffracting structureKLA TENCOR TECH CORP·Filed 2006·Granted Apr 7, 2009·18 cites·35 claims
- 3192US7088443B2System for detecting anomalies and/or features of a surfaceKLA TENCOR TECH CORP·Filed 2003·Granted Aug 8, 2006·43 cites·51 claims
- 3292US7009704B1Overlay error detectionKLA TENCOR TECH CORP·Filed 2000·Granted Mar 7, 2006·46 cites·90 claims
- 3391US9645097B2In-line wafer edge inspection, wafer pre-alignment, and wafer cleaningKLA TENCOR CORP·Filed 2015·Granted May 9, 2017·10 cites·21 claims
- 3491US8194301B2Multi-spot scanning system and methodZHAO GUOHENG·Filed 2008·Granted Jun 5, 2012·20 cites·8 claims
- 3591US7709794B2Defect detection using time delay lock-in thermography (LIT) and dark field LITKLA TENCOR CORP·Filed 2008·Granted May 4, 2010·23 cites·19 claims
- 3691US7221444B1Method and system for improved defect sensitivity for inspecting surfaces3I SYSTEMS INC·Filed 2005·Granted May 22, 2007·28 cites·30 claims
- 3791US6671051B1Apparatus and methods for detecting killer particles during chemical mechanical polishingKLA TENCOR·Filed 2000·Granted Dec 30, 2003·49 cites·37 claims
- 3891US6657715B2Sample inspection systemKLA TENCOR CORP·Filed 2000·Granted Dec 2, 2003·26 cites·39 claims
- 3991US6618134B2Sample inspection systemKLA TENCOR CORP·Filed 2001·Granted Sep 9, 2003·27 cites·11 claims
- 4090US10488348B2Wafer inspectionKLA TENCOR CORP·Filed 2018·Granted Nov 26, 2019·3 cites·57 claims
- 4190US9553034B1Combined semiconductor metrology systemYOUNG SCOTT A·Filed 2012·Granted Jan 24, 2017·15 cites·28 claims
- 4290US9176072B2Dark field inspection system with ring illuminationZHAO GUOHENG·Filed 2010·Granted Nov 3, 2015·10 cites·30 claims
- 4390US7375810B2Overlay error detectionKLA TENCOR CORP·Filed 2005·Granted May 20, 2008·21 cites·35 claims
- 4489US8415961B1Measuring sheet resistance and other properties of a semiconductorZHAO GUOHENG·Filed 2010·Granted Apr 9, 2013·8 cites·24 claims
- 4589US8194240B1Enhanced focusing capability on a sample using a spot matrixVAEZ-IRAVANI MEHDI·Filed 2008·Granted Jun 5, 2012·11 cites·8 claims
- 4686US11187654B2Imaging reflectometerAPPLIED MATERIALS INC·Filed 2020·Granted Nov 30, 2021·1 cites·20 claims
- 4786US10462391B2Dark-field inspection using a low-noise sensorKLA TENCOR CORP·Filed 2016·Granted Oct 29, 2019·5 cites·21 claims
- 4886US10234402B2Systems and methods for defect material classificationKLA TENCOR CORP·Filed 2017·Granted Mar 19, 2019·5 cites·29 claims
- 4986US8436554B2LED solar illuminatorZHAO GUOHENG·Filed 2011·Granted May 7, 2013·9 cites·20 claims
- 5086US6628397B1Apparatus and methods for performing self-clearing optical measurementsKLA TENCOR·Filed 1999·Granted Sep 30, 2003·68 cites·27 claims
Showing the top 50 of 113 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →