Inventor · disambiguated record
Hideaki Fukuda
Also filed as: ARAI MASAHIRO · FUKUDA HIDEAKI
64 granted patents·29 pending applications·11,457 citations·filing 1992–2024
99Inventor score
Top patents by PatentIndex Score
93 records- 0199US9812319B1Method for forming film filled in trench without seam or voidASM IP HOLDING BV·Filed 2016·Granted Nov 7, 2017·486 cites·16 claims
- 0299US9627221B1Continuous process incorporating atomic layer etchingASM IP HOLDING BV·Filed 2015·Granted Apr 18, 2017·507 cites·17 claims
- 0399US9455138B1Method for forming dielectric film in trenches by PEALD using H-containing gasASM IP HOLDING BV·Filed 2015·Granted Sep 27, 2016·587 cites·20 claims
- 0499US9368352B2Methods for forming doped silicon oxide thin filmsASM INT·Filed 2014·Granted Jun 14, 2016·469 cites·19 claims
- 0599US9343297B1Method for forming multi-element thin film constituted by at least five elements by PEALDASM IP HOLDING BV·Filed 2015·Granted May 17, 2016·471 cites·20 claims
- 0699US9171716B2Method of forming metal oxide hardmaskASM JAPAN·Filed 2014·Granted Oct 27, 2015·531 cites·20 claims
- 0799US9153441B2Methods for forming doped silicon oxide thin filmsASM INT·Filed 2014·Granted Oct 6, 2015·473 cites·17 claims
- 0899US8679958B2Methods for forming doped silicon oxide thin filmsASM INT·Filed 2012·Granted Mar 25, 2014·484 cites·26 claims
- 0998US10395917B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2018·Granted Aug 27, 2019·405 cites·19 claims
- 1098US10147600B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2018·Granted Dec 4, 2018·417 cites·20 claims
- 1198US9905416B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2017·Granted Feb 27, 2018·19 cites·19 claims
- 1298US9875893B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2017·Granted Jan 23, 2018·419 cites·20 claims
- 1398US9564314B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2015·Granted Feb 7, 2017·465 cites·28 claims
- 1498US8784950B2Method for forming aluminum oxide film using Al compound containing alkyl group and alkoxy or alkylamine groupFUKAZAWA ATSUKI·Filed 2012·Granted Jul 22, 2014·519 cites·7 claims
- 1598US7789965B2Method of cleaning UV irradiation chamberASM JAPAN·Filed 2007·Granted Sep 7, 2010·527 cites·7 claims
- 1698US7234476B2Method of cleaning CVD equipment processing chamberASM JAPAN·Filed 2003·Granted Jun 26, 2007·523 cites·9 claims
- 1797US10435790B2Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gapASM IP HOLDING BV·Filed 2016·Granted Oct 8, 2019·397 cites·19 claims
- 1897US9812320B1Method and apparatus for filling a gapASM IP HOLDING BV·Filed 2016·Granted Nov 7, 2017·475 cites·38 claims
- 1997US9564309B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2014·Granted Feb 7, 2017·29 cites·16 claims
- 2097US7833353B2Liquid material vaporization apparatus for semiconductor processing apparatusASM JAPAN·Filed 2007·Granted Nov 16, 2010·562 cites·19 claims
- 2197US6921556B2Method of film deposition using single-wafer-processing type CVDASM JAPAN·Filed 2003·Granted Jul 26, 2005·256 cites·11 claims
- 2297US6187691B1Method of forming film on semiconductor substrate in film-forming apparatusASM JAPAN·Filed 2000·Granted Feb 13, 2001·538 cites·11 claims
- 2396US7498242B2Plasma pre-treating surfaces for atomic layer depositionASM INC·Filed 2006·Granted Mar 3, 2009·554 cites·46 claims
- 2495US8901016B2Method of forming metal oxide hardmaskHA JEONGSEOK·Filed 2011·Granted Dec 2, 2014·539 cites·15 claims
- 2595US8669185B2Method of tailoring conformality of Si-containing filmONIZAWA SHIGEYUKI·Filed 2010·Granted Mar 11, 2014·585 cites·14 claims
- 2694US10655221B2Method for depositing oxide film by thermal ALD and PEALDASM IP HOLDING BV·Filed 2018·Granted May 19, 2020·4 cites·15 claims
- 2792US10510530B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2018·Granted Dec 17, 2019·3 cites·18 claims
- 2891US9576790B2Deposition of boron and carbon containing materialsASM IP HOLDING BV·Filed 2015·Granted Feb 21, 2017·7 cites·26 claims
- 2991US7697311B2Storage apparatus, controller and control methodHITACHI LTD·Filed 2008·Granted Apr 13, 2010·25 cites·5 claims
- 3090US11069522B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2019·Granted Jul 20, 2021·3 cites·18 claims
- 3189US10784105B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2019·Granted Sep 22, 2020·2 cites·20 claims
- 3287US11453943B2Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursorASM IP HOLDING BV·Filed 2017·Granted Sep 27, 2022·2 cites·13 claims
- 3387US11302527B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2020·Granted Apr 12, 2022·1 cites·20 claims
- 3486US7276123B2Semiconductor-processing apparatus provided with susceptor and placing blockASM JAPAN·Filed 2004·Granted Oct 2, 2007·30 cites·33 claims
- 3581US2023031720A1Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2022·Application pending·0 cites
- 3680US8924606B2Storage system and data transfer control methodAKIYAMA KOJI·Filed 2012·Granted Dec 30, 2014·8 cites·15 claims
- 3780US6524955B2Method of forming thin film onto semiconductor substrateASM JAPAN·Filed 2001·Granted Feb 25, 2003·19 cites·14 claims
- 3878US7817626B2Storage subsystemHITACHI LTD·Filed 2008·Granted Oct 19, 2010·7 cites·14 claims
- 3978US7460383B2Storage apparatus, controller and control methodHITACHI LTD·Filed 2006·Granted Dec 2, 2008·8 cites·18 claims
- 4075US11587783B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2020·Granted Feb 21, 2023·0 cites·20 claims
- 4175US6413887B1Method for producing silicon nitride series filmASM JAPAN·Filed 2000·Granted Jul 2, 2002·17 cites·6 claims
- 4275US2025011927A1Methods and apparatuses for flowable gap-fillASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4375US2024297039A1Silicon precursors for silicon nitride depositionASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4473US8572342B2Data transfer device with confirmation of write completion and method of controlling the sameARAI MASAHIRO·Filed 2010·Granted Oct 29, 2013·3 cites·25 claims
- 4571US10854498B2Wafer-supporting device and method for producing sameSHOJI FUMITAKA·Filed 2011·Granted Dec 1, 2020·4 cites·6 claims
- 4670US11996286B2Silicon precursors for silicon nitride depositionASM IP HOLDING BV·Filed 2021·Granted May 28, 2024·0 cites·17 claims
- 4767US12129546B2Methods and apparatuses for flowable gap-fillASM IP HOLDING BV·Filed 2021·Granted Oct 29, 2024·0 cites·20 claims
- 4865US8103939B2Storage system and data storage methodTORIGOE OSAMU·Filed 2008·Granted Jan 24, 2012·4 cites·10 claims
- 4965US7462245B2Single-wafer-processing type CVD apparatusASM JAPAN·Filed 2003·Granted Dec 9, 2008·8 cites·14 claims
- 5065US2007227554A1Semiconductor processing with a remote plasma source for self-cleaningASM JAPAN·Filed 2007·Application pending·0 cites
Showing the top 50 of 93 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →