Inventor · disambiguated record
Jalal Ashjaee
Also filed as: ASHJAEE JALAL
24 granted patents·9 pending applications·375 citations·filing 1983–2022
96Inventor score
Files withASM NUTOOL INC7NUTOOL INC7ASHJAEE JALAL5ACTIVE LAYER PARAMETRICS INC3NOVELLUS SYSTEMS INC3
Top patents by PatentIndex Score
33 records- 0196US6482307B2Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishingNUTOOL INC·Filed 2000·Granted Nov 19, 2002·126 cites·28 claims
- 0287US11699622B2Methods and apparatus for test pattern forming and film property measurementACTIVE LAYER PARAMETRICS INC·Filed 2022·Granted Jul 11, 2023·1 cites·8 claims
- 0385US6939206B2Method and apparatus of sealing wafer backside for full-face electrochemical platingASM NUTOOL INC·Filed 2002·Granted Sep 6, 2005·33 cites·48 claims
- 0485US6468139B1Polishing apparatus and method with a refreshing polishing belt and loadable housingNUTOOL INC·Filed 2000·Granted Oct 22, 2002·26 cites·63 claims
- 0583US6464571B2Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided thereinNUTOOL INC·Filed 2001·Granted Oct 15, 2002·19 cites·51 claims
- 0681US8016007B2Method and apparatus for stringing thin film solar cellsSOLOPOWER INC·Filed 2010·Granted Sep 13, 2011·4 cites·13 claims
- 0781US4507078AWafer handling apparatus and methodSILICON VALLEY GROUP·Filed 1983·Granted Mar 26, 1985·57 cites·26 claims
- 0880US7923281B2Roll-to-roll processing method and tools for electroless deposition of thin layersSOLOPOWER INC·Filed 2009·Granted Apr 12, 2011·7 cites·9 claims
- 0980US6852208B2Method and apparatus for full surface electrotreating of a waferNUTOOL INC·Filed 2002·Granted Feb 8, 2005·20 cites·16 claims
- 1079US11289386B2Methods and apparatus for test pattern forming and film property measurementACTIVE LAYER PARAMETRICS INC·Filed 2020·Granted Mar 29, 2022·1 cites·13 claims
- 1178US6988932B2Apparatus of sealing wafer backside for full-face processingASM NUTOOL INC·Filed 2004·Granted Jan 24, 2006·18 cites·27 claims
- 1275US6855037B2Method of sealing wafer backside for full-face electrochemical platingASM NUTOOL INC·Filed 2001·Granted Feb 15, 2005·15 cites·38 claims
- 1371US7316602B2Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishingNOVELLUS SYSTEMS INC·Filed 2003·Granted Jan 8, 2008·6 cites·25 claims
- 1466US6604988B2Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided thereinNUTOOL INC·Filed 2002·Granted Aug 12, 2003·8 cites·27 claims
- 1563US6777338B2Edge and bevel cleaning process and systemNUTOOL INC·Filed 2002·Granted Aug 17, 2004·7 cites·31 claims
- 1663US6736929B2Distributed control system for semiconductor manufacturing equipmentNUTOOL INC·Filed 2002·Granted May 18, 2004·13 cites·8 claims
- 1756US6953392B2Integrated system for processing semiconductor wafersASM NUTOOL INC·Filed 2001·Granted Oct 11, 2005·4 cites·40 claims
- 1854US7059944B2Integrated system for processing semiconductor wafersASM NUTOOL INC·Filed 2003·Granted Jun 13, 2006·3 cites·16 claims
- 1953US6932679B2Apparatus and method for loading a wafer in polishing systemASM NUTOOL INC·Filed 2002·Granted Aug 23, 2005·3 cites·24 claims
- 2051US7476304B2Apparatus for processing surface of workpiece with small electrodes and surface contactsNOVELLUS SYSTEMS INC·Filed 2004·Granted Jan 13, 2009·2 cites·20 claims
- 2151US2011239450A1Roll-to-roll manufacturing of flexible thin film photovoltaic modulesBASOL BULENT M·Filed 2010·Application pending·0 cites
- 2249US7427337B2System for electropolishing and electrochemical mechanical polishingNOVELLUS SYSTEMS INC·Filed 2004·Granted Sep 23, 2008·2 cites·22 claims
- 2345US2009183675A1Reactor to form solar cell absorbersPINARBASI MUSTAFA·Filed 2008·Application pending·0 cites
- 2444US7122473B2Edge and bevel cleaning process and systemASM NUTOOL INC·Filed 2004·Granted Oct 17, 2006·0 cites·15 claims
- 2543US2008175993A1Reel-to-reel reaction of a precursor film to form solar cell absorberASHJAEE JALAL·Filed 2008·Application pending·0 cites
- 2642US8497152B2Roll-to-roll processing method and tools for electroless deposition of thin layersASHJAEE JALAL·Filed 2009·Granted Jul 30, 2013·0 cites·10 claims
- 2742US2007004316A1Integrated system for processing semiconductor wafersASHJAEE JALAL·Filed 2006·Application pending·0 cites
- 2841US2006035569A1Integrated system for processing semiconductor wafersASHJAEE JALAL·Filed 2005·Application pending·0 cites
- 2939US2005118932A1Adjustable gap chemical mechanical polishing method and apparatusFiled 2004·Application pending·0 cites
- 3038US10790203B2Methods and systems for material property profiling of thin filmsACTIVE LAYER PARAMETRICS INC·Filed 2017·Granted Sep 29, 2020·0 cites·18 claims
- 3138US2005159084A1Chemical mechanical polishing method and apparatus for controlling material removal profileFiled 2004·Application pending·0 cites
- 3234US2007051389A1Method and apparatus for substrate rinsingASHJAEE JALAL·Filed 2005·Application pending·0 cites
- 3330US2004089421A1Distributed control system for semiconductor manufacturing equipmentFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →