Inventor · disambiguated record
Jeffrey Tobin
Also filed as: TOBIN JEFFREY · TOBIN JEFFREY A · TOBIN JEFFREY ANDREW
31 granted patents·9 pending applications·482 citations·filing 1991–2024
97Inventor score
Files withAPPLIED MATERIALS INC27NOVELLUS SYSTEMS INC6WISCONSIN ALUMNI RES FOUND3LAI CANFENG1LAM RES CORP1
Top patents by PatentIndex Score
40 records- 0196US9683308B2Method and apparatus for precleaning a substrate surface prior to epitaxial growthAPPLIED MATERIALS INC·Filed 2014·Granted Jun 20, 2017·8 cites·7 claims
- 0294US5619103AInductively coupled plasma generating devicesWISCONSIN ALUMNI RES FOUND·Filed 1995·Granted Apr 8, 1997·97 cites·6 claims
- 0392US10626500B2Showerhead designAPPLIED MATERIALS INC·Filed 2019·Granted Apr 21, 2020·7 cites·20 claims
- 0492US9659809B2Support cylinder for thermal processing chamberAPPLIED MATERIALS INC·Filed 2016·Granted May 23, 2017·6 cites·20 claims
- 0591US9558982B2Minimal contact edge ring for rapid thermal processingAPPLIED MATERIALS INC·Filed 2013·Granted Jan 31, 2017·12 cites·15 claims
- 0691US6200412B1Chemical vapor deposition system including dedicated cleaning gas injectionNOVELLUS SYSTEMS INC·Filed 1996·Granted Mar 13, 2001·181 cites·16 claims
- 0790US6613199B1Apparatus and method for physical vapor deposition using an open top hollow cathode magnetronNOVELLUS SYSTEMS INC·Filed 2001·Granted Sep 2, 2003·35 cites·16 claims
- 0890US2024301584A1Method and apparatus for precleaning a substrate surface prior to epitaxial growthAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0988US9929029B2Substrate carrier systemAPPLIED MATERIALS INC·Filed 2016·Granted Mar 27, 2018·5 cites·18 claims
- 1087US10529541B2Inductive plasma source with metallic shower head using B-field concentratorAPPLIED MATERIALS INC·Filed 2017·Granted Jan 7, 2020·3 cites·19 claims
- 1187US9905454B2Substrate transfer mechanismsAPPLIED MATERIALS INC·Filed 2015·Granted Feb 27, 2018·4 cites·13 claims
- 1286US11581408B2Method and apparatus for selective nitridation processAPPLIED MATERIALS INC·Filed 2021·Granted Feb 14, 2023·1 cites·17 claims
- 1382US10221483B2Showerhead designAPPLIED MATERIALS INC·Filed 2015·Granted Mar 5, 2019·3 cites·11 claims
- 1482US10128144B2Support cylinder for thermal processing chamberAPPLIED MATERIALS INC·Filed 2017·Granted Nov 13, 2018·2 cites·20 claims
- 1581US10837122B2Method and apparatus for precleaning a substrate surface prior to epitaxial growthAPPLIED MATERIALS INC·Filed 2019·Granted Nov 17, 2020·0 cites·19 claims
- 1680US10049881B2Method and apparatus for selective nitridation processROGERS MATTHEW S·Filed 2012·Granted Aug 14, 2018·4 cites·7 claims
- 1777US6589398B1Pasting method for eliminating flaking during nitride sputteringNOVELLUS SYSTEMS INC·Filed 2002·Granted Jul 8, 2003·26 cites·16 claims
- 1876US6471831B2Apparatus and method for improving film uniformity in a physical vapor deposition systemNOVELLUS SYSTEMS INC·Filed 2001·Granted Oct 29, 2002·14 cites·20 claims
- 1975US9403251B2Minimal contact edge ring for rapid thermal processingAPPLIED MATERIALS INC·Filed 2013·Granted Aug 2, 2016·3 cites·19 claims
- 2075US6225744B1Plasma process apparatus for integrated circuit fabrication having dome-shaped induction coilNOVELLUS SYSTEMS INC·Filed 1997·Granted May 1, 2001·27 cites·11 claims
- 2174US11450509B2Inductive plasma source with metallic shower head using b-field concentratorAPPLIED MATERIALS INC·Filed 2020·Granted Sep 20, 2022·0 cites·20 claims
- 2274US6468404B2Apparatus and method for reducing redeposition in a physical vapor deposition systemNOVELLUS SYSTEMS INC·Filed 2001·Granted Oct 22, 2002·12 cites·20 claims
- 2373US10428441B2Method and apparatus for precleaning a substrate surface prior to epitaxial growthAPPLIED MATERIALS INC·Filed 2017·Granted Oct 1, 2019·0 cites·14 claims
- 2473US9048190B2Methods and apparatus for processing substrates using an ion shieldAPPLIED MATERIALS INC·Filed 2013·Granted Jun 2, 2015·2 cites·14 claims
- 2573US2021010160A1Method and apparatus for precleaning a substrate surface prior to epitaxial growthAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2668US9385004B2Support cylinder for thermal processing chamberAPPLIED MATERIALS INC·Filed 2014·Granted Jul 5, 2016·1 cites·3 claims
- 2764US10519547B2Susceptor design to eliminate deposition valleys in the waferAPPLIED MATERIALS INC·Filed 2016·Granted Dec 31, 2019·1 cites·15 claims
- 2863US5217749AMethod of making polymer thin films for optical usesWISCONSIN ALUMNI RES FOUND·Filed 1991·Granted Jun 8, 1993·18 cites·6 claims
- 2962US2025003065A1Method and apparatus for gas and vapor deposition precursor delivery heaterLAM RES CORP·Filed 2022·Application pending·0 cites
- 3060US10950698B2Method and apparatus for selective nitridation processAPPLIED MATERIALS INC·Filed 2018·Granted Mar 16, 2021·0 cites·20 claims
- 3158US10535513B2Apparatus and methods for backside passivationAPPLIED MATERIALS INC·Filed 2018·Granted Jan 14, 2020·0 cites·19 claims
- 3258US10453733B2Substrate transfer mechanismsAPPLIED MATERIALS INC·Filed 2018·Granted Oct 22, 2019·0 cites·20 claims
- 3355US2009084317A1Atomic layer deposition chamber and componentsAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 3449US2013017315A1Methods and apparatus for controlling power distribution in substrate processing systemsAPPLIED MATERIALS INC·Filed 2011·Application pending·0 cites
- 3548US2013014894A1Methods and apparatus for controlling power distribution in substrate processing systemsAPPLIED MATERIALS INC·Filed 2011·Application pending·0 cites
- 3646US2015332941A1Methods and apparatus for processing substrates using an ion shieldAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 3745US2011278260A1Inductive plasma source with metallic shower head using b-field concentratorLAI CANFENG·Filed 2010·Application pending·0 cites
- 3843US2010305884A1Methods for determining the quantity of precursor in an ampouleAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 3940US5304255APhotovoltaic cell with photoluminescent plasma polymerized filmWISCONSIN ALUMNI RES FOUND·Filed 1993·Granted Apr 19, 1994·8 cites·3 claims
- 4027US5511143AMaking polymer thin films for optical usesFiled 1994·Granted Apr 23, 1996·2 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →