Inventor · disambiguated record
Jonathan M. Madsen
Also filed as: MADSEN JONATHAN · MADSEN JONATHAN M · MADSEN JONATHAN MICHAEL
17 granted patents·5 pending applications·574 citations·filing 1999–2024
93Inventor score
Top patents by PatentIndex Score
22 records- 0197US7301623B1Transferring, buffering and measuring a substrate in a metrology systemNANOMETRICS INC·Filed 2003·Granted Nov 27, 2007·410 cites·30 claims
- 0296US8860937B1Metrology systems and methods for high aspect ratio and large lateral dimension structuresKLA TENCOR CORP·Filed 2013·Granted Oct 14, 2014·35 cites·19 claims
- 0395US10101670B2Statistical model-based metrologyKLA TENCOR CORP·Filed 2014·Granted Oct 16, 2018·34 cites·19 claims
- 0495US8879073B2Optical metrology using targets with field enhancement elementsKLA TENCOR CORP·Filed 2013·Granted Nov 4, 2014·23 cites·20 claims
- 0593US11899375B2Massive overlay metrology sampling with multiple measurement columnsKLA CORP·Filed 2021·Granted Feb 13, 2024·2 cites·56 claims
- 0693US11604420B2Self-calibrating overlay metrologyKLA CORP·Filed 2021·Granted Mar 14, 2023·2 cites·44 claims
- 0793US10352876B2Signal response metrology for scatterometry based overlay measurementsKLA—TENCOR CORP·Filed 2015·Granted Jul 16, 2019·7 cites·20 claims
- 0892US9693439B1High brightness liquid droplet X-ray source for semiconductor metrologyKLA TENCOR CORP·Filed 2014·Granted Jun 27, 2017·20 cites·19 claims
- 0986US10139352B2Measurement of small box size targetsKLA TENCOR CORP·Filed 2015·Granted Nov 27, 2018·3 cites·20 claims
- 1086US9875946B2On-device metrologyKLA TENCOR CORP·Filed 2014·Granted Jan 23, 2018·8 cites·16 claims
- 1181US11604063B2Self-calibrated overlay metrology using a skew training sampleKLA CORP·Filed 2021·Granted Mar 14, 2023·1 cites·26 claims
- 1280US12379669B2Massive overlay metrology sampling with multiple measurement columnsKLA CORP·Filed 2023·Granted Aug 5, 2025·0 cites·33 claims
- 1376US11880142B2Self-calibrating overlay metrologyKLA CORP·Filed 2023·Granted Jan 23, 2024·0 cites·34 claims
- 1476US8825444B1Automated system check for metrology unitROVIRA PABLO I·Filed 2009·Granted Sep 2, 2014·12 cites·7 claims
- 1566US2024337606A1Parallel scanning overlay metrology with optical meta-surfacesKLA CORP·Filed 2024·Application pending·0 cites
- 1662US2025138435A1Massive measurement sampling using multiple chucks and optical columnsKLA CORP·Filed 2023·Application pending·0 cites
- 1755US11562289B2Loosely-coupled inspection and metrology system for high-volume production process monitoringKLA TENCOR CORP·Filed 2019·Granted Jan 24, 2023·0 cites·37 claims
- 1854US2008146302A1Massive Multiplayer Event Using Physical SkillsOLSEN ARLEN LYNN·Filed 2007·Application pending·0 cites
- 1953US2008146339A1Massive Multiplayer Online Sports Teams and EventsOLSEN ARLEN LYNN·Filed 2006·Application pending·0 cites
- 2047US6511921B1Methods for reducing the reactivity of a semiconductor substrate surface and for evaluating electrical properties of a semiconductor substrateSUMCO PHOENIX CORP·Filed 1999·Granted Jan 28, 2003·17 cites·24 claims
- 2141US10804167B2Methods and systems for co-located metrologyKLA TENCOR CORP·Filed 2019·Granted Oct 13, 2020·0 cites·63 claims
- 2237US2011276319A1Determination of material optical properties for optical metrology of structuresMADSEN JONATHAN MICHAEL·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →