Inventor · disambiguated record
John Kevin Shugrue
Also filed as: SHUGRUE JOHN · SHUGRUE JOHN K · SHUGRUE JOHN KEVIN · STOYA ROBERT J
24 granted patents·7 pending applications·1,639 citations·filing 1995–2024
96Inventor score
Top patents by PatentIndex Score
31 records- 0198US9657845B2Variable conductance gas distribution apparatus and methodASM IP HOLDING BV·Filed 2014·Granted May 23, 2017·469 cites·19 claims
- 0296US9117866B2Apparatus and method for calculating a wafer position in a processing chamber under process conditionsMARQUARDT DAVID·Filed 2012·Granted Aug 25, 2015·504 cites·28 claims
- 0395US10900122B2Apparatus for semiconductor wafer processingASM IP HOLDING BV·Filed 2016·Granted Jan 26, 2021·7 cites·20 claims
- 0495US7189140B1Methods using eddy current for calibrating a CMP toolNOVELLUS SYSTEMS INC·Filed 2005·Granted Mar 13, 2007·33 cites·20 claims
- 0594US9404587B2Lockout tagout for semiconductor vacuum valveASM IP HOLDING BV·Filed 2014·Granted Aug 2, 2016·494 cites·19 claims
- 0692US10872804B2Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contaminationASM IP HOLDING BV·Filed 2018·Granted Dec 22, 2020·7 cites·28 claims
- 0791US10872803B2Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contaminationASM IP HOLDING BV·Filed 2017·Granted Dec 22, 2020·6 cites·28 claims
- 0890US10941490B2Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the sameASM IP HOLDING BV·Filed 2014·Granted Mar 9, 2021·4 cites·19 claims
- 0990US10767789B2Diaphragm valves, valve components, and methods for forming valve componentsASM IP HOLDING BV·Filed 2018·Granted Sep 8, 2020·4 cites·24 claims
- 1085US11629406B2Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrateASM IP HOLDING BV·Filed 2018·Granted Apr 18, 2023·3 cites·15 claims
- 1185US5770469AMethod for forming semiconductor structure using modulation doped silicate glassesLAM RES CORP·Filed 1995·Granted Jun 23, 1998·78 cites·38 claims
- 1275US2025329556A1Temperature controlled substrate carrier and polishing componentsAXUS TECH LLC·Filed 2024·Application pending·0 cites
- 1374US2025065473A1Containment and exhaust system for substrate polishing componentsAXUS TECH LLC·Filed 2024·Application pending·0 cites
- 1473US10975470B2Apparatus for detecting or monitoring for a chemical precursor in a high temperature environmentASM IP HOLDING BV·Filed 2019·Granted Apr 13, 2021·1 cites·10 claims
- 1572US11795545B2Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the sameASM IP HOLDING BV·Filed 2021·Granted Oct 24, 2023·0 cites·19 claims
- 1671US12234552B2Semiconductor processing apparatus and methods for monitoring and controlling a semiconductor processing apparatusASM IP HOLDING BV·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 1769US12145236B2Containment and exhaust system for substrate polishing componentsAXUS TECH LLC·Filed 2022·Granted Nov 19, 2024·0 cites·20 claims
- 1869US6095158AAnhydrous HF in-situ cleaning process of semiconductor processing chambersLAM RES CORP·Filed 1997·Granted Aug 1, 2000·22 cites·9 claims
- 1968US10774422B2Systems and methods for controlling vapor phase processingASM IP HOLDING BV·Filed 2018·Granted Sep 15, 2020·1 cites·16 claims
- 2067US11626313B2Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contaminationASM IP HOLDING BV·Filed 2020·Granted Apr 11, 2023·0 cites·29 claims
- 2164US11939673B2Apparatus for detecting or monitoring for a chemical precursor in a high temperature environmentASM IP HOLDING BV·Filed 2021·Granted Mar 26, 2024·0 cites·11 claims
- 2264US2017256401A1Emissivity, surface finish and porosity control of semiconductor reactor componentsASM IP HOLDING BV·Filed 2017·Application pending·0 cites
- 2363US2020355296A1Diaphragm valves, valve components, and methods for forming valve componentsASM IP HOLDING BV·Filed 2020·Application pending·0 cites
- 2462US12217979B2Temperature controlled substrate carrier and polishing componentsAXUS TECH LLC·Filed 2020·Granted Feb 4, 2025·0 cites·24 claims
- 2562US2025187141A1Apparatus and method for in-situ chemical separation and recirculation in a chemical mechanical processing systemAXUS TECH LLC·Filed 2024·Application pending·0 cites
- 2660US2021104427A1Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contaminationASM IP HOLDING BV·Filed 2020·Application pending·0 cites
- 2756US10561975B2Variable conductance gas distribution apparatus and methodASM IP HOLDING BV·Filed 2017·Granted Feb 18, 2020·0 cites·16 claims
- 2855US11891693B2Systems and methods for controlling vapor phase processingASM IP HOLDING BV·Filed 2020·Granted Feb 6, 2024·0 cites·6 claims
- 2953US12276023B2Showerhead assembly for distributing a gas within a reaction chamberASM IP HOLDING BV·Filed 2018·Granted Apr 15, 2025·0 cites·21 claims
- 3051US6989752B2Methods and apparatus for a security systemSHUGRUE JOHN K·Filed 2002·Granted Jan 24, 2006·6 cites·18 claims
- 3145US2017011909A1Emissivity, surface finish and porosity control of semiconductor reactor componentsASM IP HOLDING BV·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →