Inventor · disambiguated record
Katsuhide Watanabe
Also filed as: WATANABE KATSUHIDE
49 granted patents·19 pending applications·1,163 citations·filing 1988–2024
98Inventor score
Top patents by PatentIndex Score
68 records- 0199USD633452SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 1, 2011·342 cites·1 claims
- 0298US11450544B2Substrate processing apparatus, substrate processing system, and substrate processing methodEBARA CORP·Filed 2020·Granted Sep 20, 2022·8 cites·10 claims
- 0396US10665487B2Substrate processing apparatus, substrate processing system, and substrate processing methodEBARA CORP·Filed 2015·Granted May 26, 2020·8 cites·34 claims
- 0495US9108292B2Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatusEBARA CORP·Filed 2014·Granted Aug 18, 2015·19 cites·26 claims
- 0595US8932106B2Polishing apparatus having thermal energy measuring meansFUKUSHIMA MAKOTO·Filed 2011·Granted Jan 13, 2015·14 cites·9 claims
- 0695US5765800AVibration damping apparatusEBARA CORP·Filed 1996·Granted Jun 16, 1998·98 cites·3 claims
- 0794US8859070B2Elastic membraneEBARA CORP·Filed 2012·Granted Oct 14, 2014·16 cites·25 claims
- 0893US9156130B2Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatusEBARA CORP·Filed 2014·Granted Oct 13, 2015·11 cites·20 claims
- 0993US8382558B2Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and methodEBARA CORP·Filed 2010·Granted Feb 26, 2013·14 cites·10 claims
- 1087US5876012AVibration cancellation apparatusEBARA CORP·Filed 1997·Granted Mar 2, 1999·59 cites·8 claims
- 1185US6515388B1Magnetic levitation control apparatusEBARA CORP·Filed 2000·Granted Feb 4, 2003·24 cites·20 claims
- 1284US5951368APolishing apparatusEBARA CORP·Filed 1997·Granted Sep 14, 1999·34 cites·49 claims
- 1383US5397212ARobot with dust-free and maintenance-free actuatorsEBARA CORP·Filed 1993·Granted Mar 14, 1995·88 cites·6 claims
- 1482US8951813B2Method of polishing a substrate having a film on a surface of the substrate for semiconductor manufacturingEBARA CORP·Filed 2013·Granted Feb 10, 2015·5 cites·20 claims
- 1582US5142175AMagnetic bearing systemEBARA CORP·Filed 1991·Granted Aug 25, 1992·40 cites·28 claims
- 1682US4885491AUnstable vibration prevention apparatus for magnetic bearing systemNAT AEROSPACE LAB·Filed 1988·Granted Dec 5, 1989·37 cites·9 claims
- 1781US2025118604A1Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2024·Application pending·0 cites
- 1879US9687955B2Polishing apparatusWATANABE KATSUHIDE·Filed 2011·Granted Jun 27, 2017·8 cites·28 claims
- 1979US9073170B2Polishing apparatus having thermal energy measuring meansEBARA CORP·Filed 2014·Granted Jul 7, 2015·2 cites·11 claims
- 2079US5904608APolishing apparatus having interlock functionEBARA CORP·Filed 1997·Granted May 18, 1999·56 cites·34 claims
- 2178US12062563B2Substrate processing apparatus, substrate processing system, and substrate processing methodEBARA CORP·Filed 2022·Granted Aug 13, 2024·0 cites·22 claims
- 2277US10056277B2Polishing methodEBARA CORP·Filed 2016·Granted Aug 21, 2018·2 cites·10 claims
- 2377US9999955B2Polishing apparatus and polished-state monitoring methodEBARA CORP·Filed 2014·Granted Jun 19, 2018·4 cites·13 claims
- 2477US2024087963A1Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2023·Application pending·0 cites
- 2575US2024316720A1Substrate processing control system, substrate processing control method, and programEBARA CORP·Filed 2024·Application pending·0 cites
- 2674US5385217AVibration eliminating apparatus for elminating vibration of an installation floorEBARA CORP·Filed 1992·Granted Jan 31, 1995·35 cites·10 claims
- 2772US12036634B2Substrate processing control system, substrate processing control method, and programEBARA CORP·Filed 2017·Granted Jul 16, 2024·1 cites·13 claims
- 2872US6437864B1Stage positioning deviceEBARA CORP·Filed 1998·Granted Aug 20, 2002·36 cites·16 claims
- 2971US11465254B2Polishing machine and a polishing method for a substrateEBARA CORP·Filed 2020·Granted Oct 11, 2022·0 cites·7 claims
- 3070US11673222B2Polishing head system and polishing apparatusEBARA CORP·Filed 2021·Granted Jun 13, 2023·0 cites·21 claims
- 3169US7372027B2Electron beam apparatus and method for manufacturing semiconductor deviceTOKYO ELECTRON LTD·Filed 2005·Granted May 13, 2008·2 cites·16 claims
- 3268US5793598AMagnetically levitated vibration damping apparatusEBARA CORP·Filed 1996·Granted Aug 11, 1998·27 cites·16 claims
- 3365US6042454ASystem for detecting the endpoint of the polishing of a semiconductor wafer by a semiconductor wafer polisherEBARA CORP·Filed 1998·Granted Mar 28, 2000·28 cites·7 claims
- 3463US9149903B2Polishing apparatus having substrate holding apparatusEBARA CORP·Filed 2014·Granted Oct 6, 2015·0 cites·13 claims
- 3563US2017259395A1Polishing machine and a polishing method for a substrateEBARA CORP·Filed 2017·Application pending·0 cites
- 3662US10500691B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2017·Granted Dec 10, 2019·0 cites·18 claims
- 3761US12017323B2Polishing head system and polishing apparatusEBARA CORP·Filed 2021·Granted Jun 25, 2024·0 cites·29 claims
- 3860US5720010AControl system for a linear actuator including magnetic bearings for levitating a robot armEBARA CORP·Filed 1996·Granted Feb 17, 1998·30 cites·6 claims
- 3960US5449985AZero-power control type vibration eliminating apparatusEBARA CORP·Filed 1993·Granted Sep 12, 1995·21 cites·2 claims
- 4058US5471802AElectromagnetically suspended floating floor apparatusEBARA CORP·Filed 1993·Granted Dec 5, 1995·20 cites·11 claims
- 4157US11759912B2Magnetic element and eddy current sensor using the sameEBARA CORP·Filed 2018·Granted Sep 19, 2023·0 cites·18 claims
- 4257USD729753SElastic membrane for semiconductor wafer polishingEBARA CORP·Filed 2014·Granted May 19, 2015·7 cites·1 claims
- 4357US4910449ASystem for preventing unbalance vibrations and synchronous disturbance vibrationsEBARA CORP·Filed 1988·Granted Mar 20, 1990·17 cites·7 claims
- 4457US2025332681A1Polishing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 4556US12179310B2Output signal processing apparatus for eddy current sensorEBARA CORP·Filed 2021·Granted Dec 31, 2024·0 cites·21 claims
- 4656US2017252889A1Polishing apparatusEBARA CORP·Filed 2017·Application pending·0 cites
- 4756US2021166967A1Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2018·Application pending·0 cites
- 4853USD711330SElastic membrane for semiconductor wafer polishingFUKUSHIMA MAKOTO·Filed 2011·Granted Aug 19, 2014·7 cites·1 claims
- 4953US2022266418A1Substrate processing apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 5052US11833636B2Substrate polishing apparatus, method of creating thickness map, and method of polishing a substrateEBARA CORP·Filed 2020·Granted Dec 5, 2023·0 cites·19 claims
Showing the top 50 of 68 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →