Inventor · disambiguated record
Kevin L. Siefering
Also filed as: SIEFERING KEVIN · SIEFERING KEVIN L
20 granted patents·7 pending applications·694 citations·filing 1991–2024
95Inventor score
Files withFSI INT INC9TEL FSI INC5TEL MFG AND ENGINEERING OF AMERICA INC5BOC GROUP INC2TOKYO ELECTRON LTD2
Top patents by PatentIndex Score
27 records- 0189US5224265AFabrication of discrete thin film wiring structuresIBM·Filed 1991·Granted Jul 6, 1993·220 cites·21 claims
- 0285US6015503AMethod and apparatus for surface conditioningFSI INT INC·Filed 1995·Granted Jan 18, 2000·89 cites·23 claims
- 0380US9831107B2Processing system and method for providing a heated etching solutionTEL FSI INC·Filed 2014·Granted Nov 28, 2017·4 cites·13 claims
- 0480US7312161B2Advanced process control for low variation treatment in immersion processingFSI INT INC·Filed 2006·Granted Dec 25, 2007·7 cites·20 claims
- 0579US11241720B2Pressure control strategies to provide uniform treatment streams in the manufacture of microelectronic devicesTEL FSI INC·Filed 2019·Granted Feb 8, 2022·2 cites·9 claims
- 0679US5810942AAerodynamic aerosol chamberFSI INT INC·Filed 1996·Granted Sep 22, 1998·63 cites·30 claims
- 0778US7025831B1Apparatus for surface conditioningFSI INT INC·Filed 1999·Granted Apr 11, 2006·57 cites·14 claims
- 0878US6221781B1Combined process chamber with multi-positionable pedestalFSI INT INC·Filed 1999·Granted Apr 24, 2001·73 cites·20 claims
- 0972US11309178B2Treatment systems with repositionable nozzle useful in the manufacture of microelectronic devicesTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2019·Granted Apr 19, 2022·1 cites·23 claims
- 1072US2024290619A1Substrate scanning apparatus with pendulum and rotatable substrate holderTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2024·Application pending·0 cites
- 1171US9490138B2Method of substrate temperature control during high temperature wet processingTEL FSI INC·Filed 2014·Granted Nov 8, 2016·2 cites·19 claims
- 1271US9412639B2Method of using separate wafer contacts during wafer processingTEL FSI INC·Filed 2014·Granted Aug 9, 2016·2 cites·7 claims
- 1370US6251195B1Method for transferring a microelectronic device to and from a processing chamberFSI INT INC·Filed 1999·Granted Jun 26, 2001·43 cites·22 claims
- 1469US11707770B2Pressure control strategies to provide uniform treatment streams in the manufacture of microelectronic devicesTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2022·Granted Jul 25, 2023·0 cites·22 claims
- 1569US5942037ARotatable and translatable spray nozzleFSI INT INC·Filed 1996·Granted Aug 24, 1999·45 cites·37 claims
- 1665US6284006B1Processing apparatus for microelectronic devices in which polymeric bellows are used to help accomplish substrate transport inside of the apparatusFSI INT INC·Filed 1999·Granted Sep 4, 2001·38 cites·22 claims
- 1764US5373701ACryogenic stationBOC GROUP INC·Filed 1993·Granted Dec 20, 1994·31 cites·4 claims
- 1862US12334348B2Substrate scanning apparatus with pendulum and rotatable substrate holderTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2021·Granted Jun 17, 2025·0 cites·20 claims
- 1959US6845779B2Edge gripping device for handling a set of semiconductor wafers in an immersion processing systemFSI INT INC·Filed 2002·Granted Jan 25, 2005·7 cites·26 claims
- 2054US2020043764A1Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and method for using sameTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 2154US2020006100A1Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and method for using sameTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 2253US2023420274A1Radiatively-Cooled Substrate HolderTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2022·Application pending·0 cites
- 2351US9911631B2Processing system and method for providing a heated etching solutionTEL FSI INC·Filed 2014·Granted Mar 6, 2018·0 cites·20 claims
- 2445US2015128993A1Chamber cleaning when using acid chemistries to fabricate microelectronic devices and precursors thereofTEF FSI INC·Filed 2014·Application pending·0 cites
- 2543US5304796AAtmospheric pressure ionization mass spectroscopy method including a silica gel drying stepBOC GROUP INC·Filed 1992·Granted Apr 19, 1994·10 cites·3 claims
- 2636US2002160606A1Method for material removal from an in-process microelectronic substrateFiled 2002·Application pending·0 cites
- 2729US2003094196A1Advanced process control for immersion processingFiled 2002·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Kevin L. Siefering files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →