Inventor · disambiguated record
Khurshed Sorabji
Also filed as: SORABJI KHURSHED
34 granted patents·8 pending applications·762 citations·filing 2004–2018
97Inventor score
Top patents by PatentIndex Score
42 records- 0199US7378618B1Rapid conductive cooling using a secondary process planeAPPLIED MATERIALS INC·Filed 2006·Granted May 27, 2008·400 cites·28 claims
- 0297US8057602B2Apparatus and method for supporting, positioning and rotating a substrate in a processing chamberKOELMEL BLAKE·Filed 2008·Granted Nov 15, 2011·63 cites·30 claims
- 0396US8222574B2Temperature measurement and control of wafer support in thermal processing chamberSORABJI KHURSHED·Filed 2008·Granted Jul 17, 2012·62 cites·19 claims
- 0495US9390950B2Rapid thermal processing chamber with micro-positioning systemAPPLIED MATERIALS INC·Filed 2014·Granted Jul 12, 2016·15 cites·20 claims
- 0594US8314371B2Rapid thermal processing chamber with micro-positioning systemSORABJI KHURSHED·Filed 2009·Granted Nov 20, 2012·18 cites·12 claims
- 0694US7812286B2Rapid conductive cooling using a secondary process planeAPPLIED MATERIALS INC·Filed 2007·Granted Oct 12, 2010·18 cites·20 claims
- 0793US8900889B2Rapid thermal processing chamber with micro-positioning systemAPPLIED MATERIALS INC·Filed 2012·Granted Dec 2, 2014·10 cites·10 claims
- 0893US8227729B2Rapid conductive cooling using a secondary process planeSORABJI KHURSHED·Filed 2010·Granted Jul 24, 2012·12 cites·11 claims
- 0992US9175393B1Tiled showerhead for a semiconductor chemical vapor deposition reactorHIGASHI GREGG·Filed 2011·Granted Nov 3, 2015·16 cites·21 claims
- 1092US8294068B2Rapid thermal processing lamphead with improved coolingRANISH JOSEPH M·Filed 2008·Granted Oct 23, 2012·17 cites·21 claims
- 1192US8111978B2Rapid thermal processing chamber with shower headSORABJI KHURSHED·Filed 2008·Granted Feb 7, 2012·21 cites·24 claims
- 1291US8658947B2Rapid conductive cooling using a secondary process planeSORABJI KHURSHED·Filed 2012·Granted Feb 25, 2014·8 cites·20 claims
- 1389USRE44712ELamp for rapid thermal processing chamberRANISH JOSEPH M·Filed 2011·Granted Jan 21, 2014·8 cites·30 claims
- 1488US10066297B2Tiled showerhead for a semiconductor chemical vapor deposition reactorALTA DEVICES INC·Filed 2015·Granted Sep 4, 2018·5 cites·20 claims
- 1588US8057601B2Apparatus and method for supporting, positioning and rotating a substrate in a processing chamberKOELMEL BLAKE·Filed 2007·Granted Nov 15, 2011·11 cites·49 claims
- 1688US6888104B1Thermally matched support ring for substrate processing chamberAPPLIED MATERIALS INC·Filed 2004·Granted May 3, 2005·41 cites·25 claims
- 1787US8698049B2Rapid thermal processing lamphead with improved coolingAPPLIED MATERIALS INC·Filed 2012·Granted Apr 15, 2014·6 cites·20 claims
- 1885US9212422B2CVD reactor with gas flow virtual wallsHIGASHI GREGG·Filed 2011·Granted Dec 15, 2015·3 cites·8 claims
- 1985US7612491B2Lamp for rapid thermal processing chamberAPPLIED MATERIALS INC·Filed 2007·Granted Nov 3, 2009·8 cites·20 claims
- 2084US9564349B2Rapid thermal processing chamber with micro-positioning systemAPPLIED MATERIALS INC·Filed 2012·Granted Feb 7, 2017·4 cites·20 claims
- 2183US9209049B2Rapid conductive cooling using a secondary process planeAPPLIED MATERIALS INC·Filed 2014·Granted Dec 8, 2015·3 cites·16 claims
- 2280US8985911B2Wafer carrier trackHE GANG·Filed 2010·Granted Mar 24, 2015·2 cites·13 claims
- 2379US8602707B2Methods and apparatus for a chemical vapor deposition reactorHE GANG·Filed 2009·Granted Dec 10, 2013·5 cites·1 claims
- 2478US8490660B2Apparatus and method for supporting, positioning and rotating a substrate in a processing chamberKOELMEL BLAKE·Filed 2011·Granted Jul 23, 2013·3 cites·14 claims
- 2569US10718051B2Methods for chemical vapor deposition (CVD) in a movable liner assemblyALTA DEVICES INC·Filed 2018·Granted Jul 21, 2020·0 cites·14 claims
- 2668US10076896B2Pressurized heated rolling press for manufacture and method of useALTA DEVICES INC·Filed 2016·Granted Sep 18, 2018·1 cites·44 claims
- 2762US9536728B2Lamp for rapid thermal processing chamberRANISH JOSEPH M·Filed 2007·Granted Jan 3, 2017·1 cites·19 claims
- 2861US9982346B2Movable liner assembly for a deposition zone in a CVD reactorHIGASHI GREGG·Filed 2011·Granted May 29, 2018·0 cites·12 claims
- 2961US8859042B2Methods for heating with lampsHE GANG·Filed 2010·Granted Oct 14, 2014·1 cites·19 claims
- 3049US2009298300A1Apparatus and Methods for Hyperbaric Rapid Thermal ProcessingAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 3148US2013098289A1Methods and apparatus for a chemical vapor deposition reactorHE GANG·Filed 2012·Application pending·0 cites
- 3247US2016130724A1Heating lamp systemALTA DEVICES INC·Filed 2016·Application pending·0 cites
- 3345US2010209082A1Heating lamp systemALTA DEVICES INC·Filed 2010·Application pending·0 cites
- 3444US2020101584A1Automated linear vacuum distribution valveALTA DEVICES INC·Filed 2018·Application pending·0 cites
- 3539US9644268B2Thermal bridge for chemical vapor deposition reactorsHIGASHI GREGG·Filed 2011·Granted May 9, 2017·0 cites·17 claims
- 3637US9859162B2Perforation of films for separationALTA DEVICES INC·Filed 2015·Granted Jan 2, 2018·0 cites·17 claims
- 3737US9169554B2Wafer carrier trackHE GANG·Filed 2010·Granted Oct 27, 2015·0 cites·18 claims
- 3837US8852696B2Method for vapor depositionHE GANG·Filed 2010·Granted Oct 7, 2014·0 cites·20 claims
- 3936US2010206229A1Vapor deposition reactor systemALTA DEVICES INC·Filed 2010·Application pending·0 cites
- 4036US2010212591A1Reactor lid assembly for vapor depositionALTA DEVICES INC·Filed 2010·Application pending·0 cites
- 4135US11211517B2Pressurized heated rolling press for manufacture and method of useUTICA LEASECO LLC·Filed 2018·Granted Dec 28, 2021·0 cites·34 claims
- 4229US2016380146A1Pressurized heated rolling press for manufacture and method of useALTA DEVICES INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →