Inventor · disambiguated record
Larry D. Elizaga
Also filed as: ELIZAGA LARRY D
10 granted patents·2 pending applications·553 citations·filing 2004–2024
89Inventor score
Top patents by PatentIndex Score
12 records- 0198US9653267B2Temperature controlled chamber linerCARDUCCI JAMES D·Filed 2012·Granted May 16, 2017·319 cites·20 claims
- 0297US11670489B2Modular microwave source with embedded ground surfaceAPPLIED MATERIALS INC·Filed 2021·Granted Jun 6, 2023·4 cites·10 claims
- 0397US6983892B2Gas distribution showerhead for semiconductor processingAPPLIED MATERIALS INC·Filed 2004·Granted Jan 10, 2006·190 cites·19 claims
- 0495US11049694B2Modular microwave source with embedded ground surfaceAPPLIED MATERIALS INC·Filed 2019·Granted Jun 29, 2021·12 cites·20 claims
- 0594US8608852B2Temperature controlled plasma processing chamber component with zone dependent thermal efficienciesMAHADESWARASWAMY CHETAN·Filed 2011·Granted Dec 17, 2013·25 cites·13 claims
- 0682US12191118B2Monolithic modular microwave source with integrated process gas distributionAPPLIED MATERIALS INC·Filed 2024·Granted Jan 7, 2025·0 cites·20 claims
- 0782US11881384B2Monolithic modular microwave source with integrated process gas distributionAPPLIED MATERIALS INC·Filed 2019·Granted Jan 23, 2024·2 cites·19 claims
- 0878US12144090B2Monolithic modular microwave source with integrated temperature controlAPPLIED MATERIALS INC·Filed 2022·Granted Nov 12, 2024·0 cites·15 claims
- 0973US11564292B2Monolithic modular microwave source with integrated temperature controlAPPLIED MATERIALS INC·Filed 2019·Granted Jan 24, 2023·1 cites·15 claims
- 1051US2014083978A1Temperature controlled plasma processing chamber component with zone dependent thermal efficiencesMAHADESWARASWAMY CHETAN·Filed 2013·Application pending·0 cites
- 1140US11915850B2Two channel cosine-theta coil assemblyAPPLIED MATERIALS INC·Filed 2017·Granted Feb 27, 2024·0 cites·20 claims
- 1237US2011180233A1Apparatus for controlling temperature uniformity of a showerheadAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →