Inventor · disambiguated record
Matthew G. Goodman
Also filed as: GOODMAN MATTHEW · GOODMAN MATTHEW G · GOODMAN MATTHEW GABRIEL
26 granted patents·7 pending applications·2,786 citations·filing 1997–2025
98Inventor score
Top patents by PatentIndex Score
33 records- 0198US9514927B2Plasma pre-clean module and processASM IP HOLDING BV·Filed 2016·Granted Dec 6, 2016·467 cites·22 claims
- 0298US9474163B2Germanium oxide pre-clean module and processASM IP HOLDING BV·Filed 2014·Granted Oct 18, 2016·411 cites·34 claims
- 0398US9299557B2Plasma pre-clean module and processASM IP HOLDING BV·Filed 2014·Granted Mar 29, 2016·472 cites·39 claims
- 0498US9099423B2Doped semiconductor films and processingASM IP HOLDING BV·Filed 2013·Granted Aug 4, 2015·414 cites·28 claims
- 0597US6776849B2Wafer holder with peripheral lift ringASM INC·Filed 2002·Granted Aug 17, 2004·324 cites·36 claims
- 0696US6343183B1Wafer support systemASM INC·Filed 2000·Granted Jan 29, 2002·87 cites·6 claims
- 0794US6893507B2Self-centering wafer support systemASM INC·Filed 2002·Granted May 17, 2005·75 cites·29 claims
- 0894US6634882B2Susceptor pocket profile to improve process performanceASM INC·Filed 2000·Granted Oct 21, 2003·76 cites·46 claims
- 0994US6454865B1Low mass wafer support systemASM INC·Filed 2001·Granted Sep 24, 2002·82 cites·14 claims
- 1092US6491757B2Wafer support systemASM INC·Filed 2001·Granted Dec 10, 2002·42 cites·24 claims
- 1192US6113702AWafer support systemASM INC·Filed 1997·Granted Sep 5, 2000·93 cites·29 claims
- 1291US6454866B1Wafer support systemASM INC·Filed 2000·Granted Sep 24, 2002·38 cites·9 claims
- 1390US7070660B2Wafer holder with stiffening ribASM INC·Filed 2002·Granted Jul 4, 2006·51 cites·24 claims
- 1490US6709267B1Substrate holder with deep annular groove to prevent edge heat lossASM INC·Filed 2002·Granted Mar 23, 2004·51 cites·52 claims
- 1586US8047706B2Calibration of temperature control system for semiconductor processing chamberASM INC·Filed 2008·Granted Nov 1, 2011·18 cites·28 claims
- 1685US10446393B2Methods for forming silicon-containing epitaxial layers and related semiconductor device structuresASM IP HOLDING BV·Filed 2018·Granted Oct 15, 2019·4 cites·20 claims
- 1781US6840767B2Susceptor pocket profile to improve process performanceASM INC·Filed 2003·Granted Jan 11, 2005·20 cites·14 claims
- 1880US7655093B2Wafer support systemASM INC·Filed 2007·Granted Feb 2, 2010·4 cites·17 claims
- 1980US7449071B2Wafer holder with peripheral lift ringASM INC·Filed 2004·Granted Nov 11, 2008·20 cites·16 claims
- 2079US6729875B2Susceptor pocket profile to improve process performanceASM INC·Filed 2003·Granted May 4, 2004·17 cites·9 claims
- 2175US11085112B2Susceptor with ring to limit backside depositionHAWKINS MARK·Filed 2011·Granted Aug 10, 2021·4 cites·15 claims
- 2273US6879777B2Localized heating of substrates using opticsASM INC·Filed 2002·Granted Apr 12, 2005·16 cites·21 claims
- 2373US2025336712A1Susceptors with film deposition control featuresASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 2468US11885019B2Susceptor with ring to limit backside depositionASM IP HOLDING BV·Filed 2021·Granted Jan 30, 2024·0 cites·20 claims
- 2565US12394659B2Susceptors with film deposition control featuresASM IP HOLDING BV·Filed 2022·Granted Aug 19, 2025·0 cites·23 claims
- 2660US12512362B2Susceptor improvementAPPLIED MATERIALS INC·Filed 2023·Granted Dec 30, 2025·0 cites·20 claims
- 2755US2015267295A1Removable substrate tray and assembly and reactor including sameASM IP HOLDING BV·Filed 2014·Application pending·0 cites
- 2849US2010116207A1Reaction chamberASM INC·Filed 2009·Application pending·0 cites
- 2949US2022298672A1Wafer temperature gradient control to suppress slip formation in high-temperature epitaxial film growthASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 3048US2005183829A1Low-mass susceptor improvementsFiled 2005·Application pending·0 cites
- 3148US2010107974A1Substrate holder with varying densityASM INC·Filed 2008·Application pending·0 cites
- 3247US11594444B2Susceptor with sidewall humps for uniform depositionASM IP HOLDING BV·Filed 2021·Granted Feb 28, 2023·0 cites·14 claims
- 3347US2009280248A1Porous substrate holder with thinned portionsASM INC·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →