Inventor · disambiguated record
Matthew C. Gwinn
Also filed as: GWINN MATTHEW · GWINN MATTHEW C · GWINN MATTHEW CHARLES
25 granted patents·6 pending applications·380 citations·filing 1997–2024
95Inventor score
Files withTEL EPION INC10TEL MFG AND ENGINEERING OF AMERICA INC8EPION CORP4TABAT MARTIN D3EATON CORP2
Top patents by PatentIndex Score
31 records- 0198US7060989B2Method and apparatus for improved processing with a gas-cluster ion beamEPION CORP·Filed 2005·Granted Jun 13, 2006·90 cites·23 claims
- 0293US6486478B1Gas cluster ion beam smoother apparatusEPION CORP·Filed 2000·Granted Nov 26, 2002·126 cites·21 claims
- 0391US7060988B2Method and apparatus for improved beam stability in high current gas-cluster ion beam processing systemEPION CORP·Filed 2005·Granted Jun 13, 2006·17 cites·23 claims
- 0490US8097860B2Multiple nozzle gas cluster ion beam processing system and method of operatingTABAT MARTIN D·Filed 2010·Granted Jan 17, 2012·13 cites·20 claims
- 0589US7825389B2Method and apparatus for controlling a gas cluster ion beam formed from a gas mixtureTEL EPION INC·Filed 2007·Granted Nov 2, 2010·15 cites·19 claims
- 0688US6737643B2Detector and method for cluster ion beam diagnosticsEPION CORP·Filed 2001·Granted May 18, 2004·29 cites·51 claims
- 0787US11694872B2Pattern enhancement using a gas cluster ion beamTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2022·Granted Jul 4, 2023·1 cites·22 claims
- 0884US7642531B2Apparatus and method for reducing particulate contamination in gas cluster ion beam processing equipmentTEL EPION INC·Filed 2007·Granted Jan 5, 2010·7 cites·23 claims
- 0983US7608843B2Method and apparatus for scanning a workpiece through an ion beamTEL EPION INC·Filed 2006·Granted Oct 27, 2009·10 cites·25 claims
- 1081US8791430B2Scanner for GCIB systemGWINN MATTHEW C·Filed 2012·Granted Jul 29, 2014·7 cites·21 claims
- 1179US6294862B1Multi-cusp ion sourceEATON CORP·Filed 1998·Granted Sep 25, 2001·35 cites·22 claims
- 1277US11915906B2Wafer scanning apparatus and method for focused beam processingTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2023·Granted Feb 27, 2024·0 cites·20 claims
- 1375US8304033B2Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzlesTABAT MARTIN D·Filed 2009·Granted Nov 6, 2012·3 cites·45 claims
- 1474US9236221B2Molecular beam enhanced GCIB treatmentTEL EPION INC·Filed 2014·Granted Jan 12, 2016·2 cites·20 claims
- 1572US2024290619A1Substrate scanning apparatus with pendulum and rotatable substrate holderTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2024·Application pending·0 cites
- 1671US9029808B2Low contamination scanner for GCIB systemTEL EPION INC·Filed 2014·Granted May 12, 2015·3 cites·18 claims
- 1771US8981322B2Multiple nozzle gas cluster ion beam systemTABAT MARTIN D·Filed 2009·Granted Mar 17, 2015·2 cites·58 claims
- 1869US11587760B2Wafer scanning apparatus and method for focused beam processingTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2020·Granted Feb 21, 2023·0 cites·15 claims
- 1968US11450506B2Pattern enhancement using a gas cluster ion beamTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2020·Granted Sep 20, 2022·0 cites·22 claims
- 2066US9735019B2Process gas enhancement for beam treatment of a substrateTEL EPION INC·Filed 2015·Granted Aug 15, 2017·1 cites·20 claims
- 2162US12334348B2Substrate scanning apparatus with pendulum and rotatable substrate holderTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2021·Granted Jun 17, 2025·0 cites·20 claims
- 2262US10861674B2Compensated location specific processing apparatus and methodTEL EPION INC·Filed 2019·Granted Dec 8, 2020·0 cites·19 claims
- 2360US2025266285A1Multi-wafer handling systemTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2024·Application pending·0 cites
- 2458US2025022739A1Process system, method, and substrate chuckTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 2557US11715620B2Tuning gas cluster ion beam systemsTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2021·Granted Aug 1, 2023·0 cites·20 claims
- 2657US2025308860A1Controlling etch edge effectsTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 2756US10497540B2Compensated location specific processing apparatus and methodTEL EPION INC·Filed 2018·Granted Dec 3, 2019·0 cites·19 claims
- 2854US5962858AMethod of implanting low doses of ions into a substrateEATON CORP·Filed 1997·Granted Oct 5, 1999·19 cites·19 claims
- 2939US9343259B2GCIB nozzle assemblyTEL EPION INC·Filed 2015·Granted May 17, 2016·0 cites·20 claims
- 3039US2013082189A1Pre-aligned multi-beam nozzle/skimmer moduleBECKER ROBERT K·Filed 2011·Application pending·0 cites
- 3136US2011240602A1High-voltage gas cluster ion beam (gcib) processing systemTEL EPION INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →