Inventor · disambiguated record
Mehran Nasser-Ghodsi
Also filed as: NASSER-GHODSI MEHRAN
44 granted patents·2 pending applications·553 citations·filing 1997–2017
98Inventor score
Top patents by PatentIndex Score
46 records- 0194US6271529B1Ion implantation with charge neutralizationEBARA CORP·Filed 1998·Granted Aug 7, 2001·116 cites·30 claims
- 0293US8513619B1Non-planar extractor structure for electron sourceNASSER-GHODSI MEHRAN·Filed 2012·Granted Aug 20, 2013·20 cites·17 claims
- 0392US7838833B1Apparatus and method for e-beam dark imaging with perspective controlKLA TENCOR TECH CORP·Filed 2007·Granted Nov 23, 2010·29 cites·20 claims
- 0492US7148073B1Methods and systems for preparing a copper containing substrate for analysisKLA TENCOR TECH CORP·Filed 2005·Granted Dec 12, 2006·24 cites·29 claims
- 0591US8953869B2Apparatus and methods for inspecting extreme ultra violet reticlesKLA TENCOR CORP·Filed 2013·Granted Feb 10, 2015·13 cites·22 claims
- 0691US7372016B1Calibration standard for a dual beam (FIB/SEM) machineKLA TENCOR TECH CORP·Filed 2005·Granted May 13, 2008·14 cites·27 claims
- 0790US7598492B1Charged particle microscopy using super resolutionKLA TENCOR TECH CORP·Filed 2007·Granted Oct 6, 2009·26 cites·25 claims
- 0889US8455838B2Multiple-column electron beam apparatus and methodsSHADMAN KHASHAYAR·Filed 2012·Granted Jun 4, 2013·13 cites·21 claims
- 0988US7828622B1Sharpening metal carbide emittersKLA TENCOR TECH CORP·Filed 2007·Granted Nov 9, 2010·12 cites·13 claims
- 1087US8698094B1Permanent magnet lens arraySEARS CHRISTOPHER·Filed 2011·Granted Apr 15, 2014·19 cites·23 claims
- 1187US6810105B2Methods and apparatus for dishing and erosion characterizationKLA TENCOR TECH CORP·Filed 2002·Granted Oct 26, 2004·53 cites·29 claims
- 1285US6943350B2Methods and apparatus for electron beam inspection of samplesKLA TENCOR TECH CORP·Filed 2002·Granted Sep 13, 2005·29 cites·18 claims
- 1382US9591770B2Multi-layer ceramic vacuum to atmosphere electric feed throughKLA TENCOR CORP·Filed 2014·Granted Mar 7, 2017·5 cites·21 claims
- 1482US8188451B1Electron generation and delivery system for contamination sensitive emittersNASSER-GHODSI MEHRAN·Filed 2009·Granted May 29, 2012·5 cites·16 claims
- 1581US6677586B1Methods and apparatus for electron beam inspection of samplesKLA TENCOR TECH CORP·Filed 2002·Granted Jan 13, 2004·20 cites·23 claims
- 1680US7855362B1Contamination pinning for auger analysisKLA TENCOR TECH CORP·Filed 2007·Granted Dec 21, 2010·6 cites·24 claims
- 1780US7635842B2Method and instrument for chemical defect characterization in high vacuumKLA TENCOR CORP·Filed 2008·Granted Dec 22, 2009·6 cites·24 claims
- 1880US7576317B1Calibration standard for a dual beam (FIB/SEM) machineKLA TENCOR TECH CORP·Filed 2008·Granted Aug 18, 2009·4 cites·22 claims
- 1979US10354832B2Multi-column scanning electron microscopy systemKLA TENCOR CORP·Filed 2017·Granted Jul 16, 2019·3 cites·37 claims
- 2078US6184532B1Ion sourceEBARA CORP·Filed 1998·Granted Feb 6, 2001·35 cites·22 claims
- 2177US8633457B2Background reduction system including louverNASSER-GHODSI MEHRAN·Filed 2011·Granted Jan 21, 2014·4 cites·16 claims
- 2277US8283631B2In-situ differential spectroscopyVAEZ-IRAVANI MEHDI·Filed 2009·Granted Oct 9, 2012·4 cites·7 claims
- 2377US7365321B2Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysisKLA TENCOR TECH CORP·Filed 2005·Granted Apr 29, 2008·4 cites·39 claims
- 2476US8765496B2Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysisNASSER-GHODSI MEHRAN·Filed 2008·Granted Jul 1, 2014·4 cites·21 claims
- 2575US5907158ABroad range ion implanterEBARA CORP·Filed 1997·Granted May 25, 1999·30 cites·8 claims
- 2674US8618513B2Apparatus and methods for forming an electrical conduction path through an insulating layerPLETTNER TOMAS·Filed 2012·Granted Dec 31, 2013·4 cites·19 claims
- 2773US8530867B1Electron generation and delivery system for contamination sensitive emittersNASSER-GHODSI MEHRAN·Filed 2012·Granted Sep 10, 2013·2 cites·16 claims
- 2871US9513230B2Apparatus and method for optical inspection, magnetic field and height mappingKLA TENCOR CORP·Filed 2013·Granted Dec 6, 2016·3 cites·22 claims
- 2971US9418819B2Asymmetrical detector design and methodologyKLA TENCOR CORP·Filed 2014·Granted Aug 16, 2016·2 cites·20 claims
- 3071US8237120B1Transverse focusing action in hyperbolic field detectorsTOTH GABOR·Filed 2009·Granted Aug 7, 2012·3 cites·13 claims
- 3169US8658973B2Auger elemental identification algorithmNEIL MARK·Filed 2013·Granted Feb 25, 2014·3 cites·20 claims
- 3269US8008207B2Use of ion implantation in chemical etchingKLA TENCOR TECH CORP·Filed 2007·Granted Aug 30, 2011·3 cites·15 claims
- 3367US9793089B2Electron emitter device with integrated multi-pole electrode structureKLA TENCOR CORP·Filed 2014·Granted Oct 17, 2017·2 cites·24 claims
- 3467US7755042B1Auger electron spectrometer with applied magnetic field at target surfaceKLA TENCOR CORP·Filed 2008·Granted Jul 13, 2010·2 cites·11 claims
- 3567US7440086B2Methods and systems for creating a recipe for a defect review processKLA TENCOR TECH CORP·Filed 2006·Granted Oct 21, 2008·5 cites·18 claims
- 3667US6801596B2Methods and apparatus for void characterizationKLA TENCOR TECH CORP·Filed 2001·Granted Oct 5, 2004·10 cites·41 claims
- 3766US7945086B2Tungsten plug deposition quality evaluation method by EBACE technologyKLA TENCOR TECH CORP·Filed 2007·Granted May 17, 2011·2 cites·19 claims
- 3861US8890066B1Sharp scattering angle trap for electron beam apparatusGOTKIS YEHIEL·Filed 2005·Granted Nov 18, 2014·1 cites·17 claims
- 3961US8202440B1Methods and apparatus for electron beam assisted etching at low temperaturesNASSER-GHODSI MEHRAN·Filed 2007·Granted Jun 19, 2012·2 cites·20 claims
- 4061US7078689B1Integrated electron beam and contaminant removal systemKLA TENCOR TECH CORP·Filed 2004·Granted Jul 18, 2006·7 cites·23 claims
- 4160US2014291516A1Methods and Systems for Measuring a Characteristic of a Substrate or Preparing a Substrate for AnalysisKLA TENCOR TECH CORP·Filed 2014·Application pending·0 cites
- 4254US7612348B1Transverse magnetic field voltage isolatorKLA TECHNOLOGIES CORP·Filed 2008·Granted Nov 3, 2009·0 cites·13 claims
- 4352US6664541B2Methods and apparatus for defect localizationKLA TENCOR TECH CORP·Filed 2001·Granted Dec 16, 2003·3 cites·39 claims
- 4449US9679372B2Apparatus and methods for inspecting extreme ultra violet reticlesKLA TENCOR CORP·Filed 2015·Granted Jun 13, 2017·0 cites·20 claims
- 4548US7394339B1Transverse magnetic field voltage isolatorKLA TENCOR TECH CORP·Filed 2004·Granted Jul 1, 2008·1 cites·21 claims
- 4644US2015076697A1Dummy barrier layer features for patterning of sparsely distributed metal features on the barrier with cmpKLA TENCOR CORP·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →