Inventor · disambiguated record
Norbert Bowering
Also filed as: BOWERING NORBERT · BOWERING NORBERT R
34 granted patents·3 pending applications·983 citations·filing 2002–2016
98Inventor score
Top patents by PatentIndex Score
37 records- 0198US7671349B2Laser produced plasma EUV light sourceCYMER INC·Filed 2007·Granted Mar 2, 2010·54 cites·32 claims
- 0297US7872245B2Systems and methods for target material delivery in a laser produced plasma EUV light sourceCYMER INC·Filed 2008·Granted Jan 18, 2011·90 cites·25 claims
- 0397US6972421B2Extreme ultraviolet light sourceCYMER INC·Filed 2003·Granted Dec 6, 2005·141 cites·78 claims
- 0496US7368741B2Extreme ultraviolet light sourceCYMER INC·Filed 2005·Granted May 6, 2008·65 cites·78 claims
- 0596US7164144B2EUV light sourceCYMER INC·Filed 2004·Granted Jan 16, 2007·113 cites·49 claims
- 0695US6815700B2Plasma focus light source with improved pulse power systemCYMER INC·Filed 2002·Granted Nov 9, 2004·113 cites·40 claims
- 0794US7843632B2EUV opticsCYMER INC·Filed 2006·Granted Nov 30, 2010·31 cites·11 claims
- 0894US7598509B2Laser produced plasma EUV light sourceCYMER INC·Filed 2006·Granted Oct 6, 2009·41 cites·50 claims
- 0994US7217940B2Collector for EUV light sourceCYMER INC·Filed 2004·Granted May 15, 2007·60 cites·137 claims
- 1094US7109503B1Systems for protecting internal components of an EUV light source from plasma-generated debrisCYMER INC·Filed 2005·Granted Sep 19, 2006·25 cites·20 claims
- 1192US8035092B2Laser produced plasma EUV light sourceCYMER INC·Filed 2010·Granted Oct 11, 2011·7 cites·19 claims
- 1292US7465946B2Alternative fuels for EUV light sourceCYMER INC·Filed 2006·Granted Dec 16, 2008·40 cites·32 claims
- 1389US7589337B2LPP EUV plasma source material target delivery systemCYMER INC·Filed 2008·Granted Sep 15, 2009·23 cites·11 claims
- 1489US7365351B2Systems for protecting internal components of a EUV light source from plasma-generated debrisCYMER INC·Filed 2006·Granted Apr 29, 2008·14 cites·15 claims
- 1587US7394083B2Systems and methods for EUV light source metrologyCYMER INC·Filed 2005·Granted Jul 1, 2008·24 cites·24 claims
- 1687US7193228B2EUV light source optical elementsCYMER INC·Filed 2004·Granted Mar 20, 2007·38 cites·74 claims
- 1785US7453077B2EUV light sourceCYMER INC·Filed 2005·Granted Nov 18, 2008·20 cites·26 claims
- 1884US7525111B2High repetition rate laser produced plasma EUV light sourceCYMER INC·Filed 2006·Granted Apr 28, 2009·13 cites·11 claims
- 1983US9392678B2Target material supply apparatus for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2012·Granted Jul 12, 2016·5 cites·28 claims
- 2083US7323703B2EUV light sourceCYMER INC·Filed 2006·Granted Jan 29, 2008·10 cites·31 claims
- 2182US7732793B2Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light sourceCYMER INC·Filed 2007·Granted Jun 8, 2010·14 cites·7 claims
- 2281US9632418B2Target material supply apparatus for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2016·Granted Apr 25, 2017·2 cites·17 claims
- 2380US8598549B2EUV opticsBOWERING NORBERT R·Filed 2010·Granted Dec 3, 2013·4 cites·17 claims
- 2480US7309871B2Collector for EUV light sourceCYMER INC·Filed 2006·Granted Dec 18, 2007·10 cites·51 claims
- 2580US7288778B2Collector for EUV light sourceCYMER INC·Filed 2006·Granted Oct 30, 2007·10 cites·48 claims
- 2677US8686370B2EUV light source components and methods for producing, using and refurbishing sameCYMER INC·Filed 2012·Granted Apr 1, 2014·3 cites·20 claims
- 2776US7960701B2EUV light source components and methods for producing, using and refurbishing sameCYMER INC·Filed 2007·Granted Jun 14, 2011·8 cites·16 claims
- 2868US10185234B2Harsh environment optical element protectionCYMER INC·Filed 2012·Granted Jan 22, 2019·1 cites·7 claims
- 2968US8314398B2EUV light source components and methods for producing, using and refurbishing sameBOWERING NORBERT R·Filed 2011·Granted Nov 20, 2012·2 cites·23 claims
- 3063US8514486B2Drive laser for EUV light sourceERSHOV ALEXANDER I·Filed 2010·Granted Aug 20, 2013·1 cites·7 claims
- 3162US9735535B2Drive laser for EUV light sourceCymer LLC·Filed 2013·Granted Aug 15, 2017·1 cites·16 claims
- 3258US8907310B2EUV opticsCymer LLC·Filed 2013·Granted Dec 9, 2014·0 cites·31 claims
- 3351US2007170378A1EUV light source optical elementsCYMER INC·Filed 2007·Application pending·0 cites
- 3444US11215736B2EUV optical element having blister-resistant multilayer capASML NETHERLANDS BV·Filed 2015·Granted Jan 4, 2022·0 cites·5 claims
- 3543US2010176313A1Extreme ultraviolet light sourceCYMER INC·Filed 2009·Application pending·0 cites
- 3642US2010024980A1Laser produced plasma euv light sourceCYMER INC·Filed 2009·Application pending·0 cites
- 3736US8198612B2Systems and methods for heating an EUV collector mirrorCHAVEZ JUAN ARMANDO·Filed 2008·Granted Jun 12, 2012·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →