Inventor · disambiguated record
Paul Z. Wirth
Also filed as: WIRTH PAUL · WIRTH PAUL Z · WIRTH PAUL ZACHARY
45 granted patents·17 pending applications·217 citations·filing 2001–2025
97Inventor score
Top patents by PatentIndex Score
62 records- 0199US11117265B2Robot for simultaneous substrate transferAPPLIED MATERIALS INC·Filed 2020·Granted Sep 14, 2021·9 cites·19 claims
- 0296US11415230B2Slit valve pneumatic controlAPPLIED MATERIALS INC·Filed 2020·Granted Aug 16, 2022·6 cites·20 claims
- 0395US11837478B2Temperature-controllable process chambers, electronic device processing systems, and manufacturing methodsAPPLIED MATERIALS INC·Filed 2021·Granted Dec 5, 2023·2 cites·20 claims
- 0495US11590662B2Robot for simultaneous substrate transferAPPLIED MATERIALS INC·Filed 2021·Granted Feb 28, 2023·2 cites·16 claims
- 0594US11830760B2Servo-control systemAPPLIED MATERIALS INC·Filed 2022·Granted Nov 28, 2023·4 cites·20 claims
- 0694US11823937B2Calibration of an aligner station of a processing systemAPPLIED MATERIALS INC·Filed 2020·Granted Nov 21, 2023·3 cites·20 claims
- 0793US10498948B1Methods and apparatus for absolute and relative depth measurements using camera focus distanceAPPLIED MATERIALS INC·Filed 2018·Granted Dec 3, 2019·10 cites·20 claims
- 0891US11107709B2Temperature-controllable process chambers, electronic device processing systems, and manufacturing methodsAPPLIED MATERIALS INC·Filed 2019·Granted Aug 31, 2021·5 cites·19 claims
- 0990US12215966B2Methods and systems of optical inspection of electronic device manufacturing machinesAPPLIED MATERIALS INC·Filed 2020·Granted Feb 4, 2025·2 cites·14 claims
- 1090US11582378B2Methods and apparatus for absolute and relative depth measurements using camera focus distanceAPPLIED MATERIALS INC·Filed 2021·Granted Feb 14, 2023·2 cites·20 claims
- 1186US11798833B2Methods of use of a servo control systemAPPLIED MATERIALS INC·Filed 2020·Granted Oct 24, 2023·2 cites·14 claims
- 1286US6548411B2Apparatus and methods for processing a workpieceSEMITOOL INC·Filed 2001·Granted Apr 15, 2003·37 cites·18 claims
- 1384US6680253B2Apparatus for processing a workpieceSEMITOOL INC·Filed 2001·Granted Jan 20, 2004·31 cites·35 claims
- 1483US12283500B2Methods and systems for temperature control for a substrateAPPLIED MATERIALS INC·Filed 2024·Granted Apr 22, 2025·0 cites·20 claims
- 1582US9799544B2Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturingAPPLIED MATERIALS INC·Filed 2015·Granted Oct 24, 2017·3 cites·20 claims
- 1681US11813757B2Centerfinding for a process kit or process kit carrier at a manufacturing systemAPPLIED MATERIALS INC·Filed 2020·Granted Nov 14, 2023·1 cites·20 claims
- 1780US2025246462A1Methods and systems for temperature control for a substrateAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1878US12278134B2Servo-control systemAPPLIED MATERIALS INC·Filed 2023·Granted Apr 15, 2025·0 cites·20 claims
- 1978US11984333B2Methods and systems for temperature control for a substrateAPPLIED MATERIALS INC·Filed 2023·Granted May 14, 2024·0 cites·20 claims
- 2076US6930046B2Single workpiece processing systemSEMITOOL INC·Filed 2003·Granted Aug 16, 2005·20 cites·82 claims
- 2176US6492284B2Reactor for processing a workpiece using sonic energySEMITOOL INC·Filed 2001·Granted Dec 10, 2002·19 cites·29 claims
- 2275US12476120B2Modular mainframe layout for supporting multiple semiconductor process modules or chambersAPPLIED MATERIALS INC·Filed 2024·Granted Nov 18, 2025·0 cites·20 claims
- 2375US9245767B2Anneal module for semiconductor wafersAPPLIED MATERIALS INC·Filed 2013·Granted Jan 26, 2016·3 cites·20 claims
- 2474US7144813B2Method and apparatus for thermally processing microelectronic workpiecesSEMITOOL INC·Filed 2004·Granted Dec 5, 2006·12 cites·66 claims
- 2573US7934898B2High throughput semiconductor wafer processingSEMITOOL INC·Filed 2007·Granted May 3, 2011·4 cites·8 claims
- 2673US7337663B2Sonic energy process chamberSEMITOOL INC·Filed 2005·Granted Mar 4, 2008·4 cites·24 claims
- 2771US2024021458A1Calibration of an aligner station of a processing systemAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2871US2025004438A1Disturbance compensation for substrate processing recipesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2970US6511914B2Reactor for processing a workpiece using sonic energySEMITOOL INC·Filed 2001·Granted Jan 28, 2003·13 cites·29 claims
- 3069US11413767B2Sensor-based position and orientation feedback of robot end effector with respect to destination chamberAPPLIED MATERIALS INC·Filed 2019·Granted Aug 16, 2022·1 cites·21 claims
- 3169US2024051144A1Centerfinding for a process kit or process kit carrier at a manufacturing systemAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3268US11551951B2Methods and systems for temperature control for a substrateAPPLIED MATERIALS INC·Filed 2020·Granted Jan 10, 2023·0 cites·20 claims
- 3368US6969682B2Single workpiece processing systemSEMITOOL INC·Filed 2003·Granted Nov 29, 2005·13 cites·37 claims
- 3466US9399827B2Microelectronic substrate electro processing systemAPPLIED MATERIALS INC·Filed 2014·Granted Jul 26, 2016·1 cites·16 claims
- 3565US11935771B2Modular mainframe layout for supporting multiple semiconductor process modules or chambersAPPLIED MATERIALS INC·Filed 2021·Granted Mar 19, 2024·0 cites·20 claims
- 3665US2025155234A1Methods and systems of optical inspection of electronic device manufacturing machinesAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3763US12130606B2Disturbance compensation for substrate processing recipesAPPLIED MATERIALS INC·Filed 2021·Granted Oct 29, 2024·0 cites·20 claims
- 3862US11772958B2Mass flow control based on micro-electromechanical devicesAPPLIED MATERIALS INC·Filed 2021·Granted Oct 3, 2023·0 cites·18 claims
- 3962US2025236020A1Automatic robot calibration for multi-joint robotsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4061US11032464B2Methods and apparatus for absolute and relative depth measurements using camera focus distanceAPPLIED MATERIALS INC·Filed 2019·Granted Jun 8, 2021·0 cites·20 claims
- 4161US7531060B2Integrated tool assemblies with intermediate processing modules for processing of microfeature workpiecesSEMITOOL INC·Filed 2005·Granted May 12, 2009·1 cites·21 claims
- 4261US6806194B2Apparatus and methods for processing a workpieceSEMITOOL INC·Filed 2003·Granted Oct 19, 2004·7 cites·14 claims
- 4360US10837119B2Microelectronic substrate electro processing systemAPPLIED MATERIALS INC·Filed 2018·Granted Nov 17, 2020·0 cites·13 claims
- 4459US12494388B2Methods and apparatus for measuring temperature using centerfind systemsAPPLIED MATERIALS INC·Filed 2022·Granted Dec 9, 2025·0 cites·20 claims
- 4558US2024071802A1Operations of robot apparatuses within rectangular mainframesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4657US2024429089A1Adjustable edge ring tilt for edge of wafer skew compensationAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4756US10087544B2Microelectronic substrate electro processing systemAPPLIED MATERIALS INC·Filed 2016·Granted Oct 2, 2018·0 cites·20 claims
- 4855US10923374B1Walking beam chamberAPPLIED MATERIALS INC·Filed 2019·Granted Feb 16, 2021·0 cites·18 claims
- 4954US7541299B2Method and apparatus for thermally processing microelectronic workpiecesSEMITOOL INC·Filed 2006·Granted Jun 2, 2009·0 cites·20 claims
- 5053US2007057352A1Method and apparatus for thermally processing microelectronic workpiecesWIRTH PAUL Z·Filed 2006·Application pending·0 cites
Showing the top 50 of 62 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →