Inventor · disambiguated record
Prashanth Kothnur
Also filed as: KOTHNUR PRASHANTH
28 granted patents·13 pending applications·31 citations·filing 2008–2024
93Inventor score
Top patents by PatentIndex Score
41 records- 0191US11393703B2Apparatus and method for controlling a flow process material to a deposition chamberAPPLIED MATERIALS INC·Filed 2019·Granted Jul 19, 2022·6 cites·14 claims
- 0289US9591738B2Plasma generator systems and methods of forming plasmaQIU HUATAN·Filed 2008·Granted Mar 7, 2017·15 cites·18 claims
- 0386US9831074B2Bipolar collimator utilized in a physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2013·Granted Nov 28, 2017·3 cites·17 claims
- 0484US11970775B2Showerhead for providing multiple materials to a process chamberAPPLIED MATERIALS INC·Filed 2019·Granted Apr 30, 2024·2 cites·17 claims
- 0583US12043895B2Methods of using a segmented showerhead for uniform delivery of multiple pre-cursorsAPPLIED MATERIALS INC·Filed 2022·Granted Jul 23, 2024·0 cites·20 claims
- 0681US9991101B2Magnetron assembly for physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2015·Granted Jun 5, 2018·3 cites·20 claims
- 0779US12443175B2Eco-efficiency (sustainability) dashboard for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2024·Granted Oct 14, 2025·0 cites·18 claims
- 0878US9620339B2Sputter source for semiconductor process chambersAPPLIED MATERIALS INC·Filed 2013·Granted Apr 11, 2017·1 cites·8 claims
- 0977US12473639B2Methods for forming films on substratesAPPLIED MATERIALS INC·Filed 2022·Granted Nov 18, 2025·0 cites·14 claims
- 1076US11600476B2Deposition system with multi-cathode and method of manufacture thereofAPPLIED MATERIALS INC·Filed 2021·Granted Mar 7, 2023·0 cites·18 claims
- 1174US2025053715A1Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1272US12325909B2EM source for enhanced plasma controlAPPLIED MATERIALS INC·Filed 2022·Granted Jun 10, 2025·0 cites·14 claims
- 1372US11655534B2Apparatus for reducing tungsten resistivityAPPLIED MATERIALS INC·Filed 2022·Granted May 23, 2023·0 cites·10 claims
- 1472US11447857B2Methods and apparatus for reducing tungsten resistivityAPPLIED MATERIALS INC·Filed 2020·Granted Sep 20, 2022·0 cites·14 claims
- 1571US12438011B2Apparatus and method for controlling a flow process material to a deposition chamberAPPLIED MATERIALS INC·Filed 2022·Granted Oct 7, 2025·0 cites·20 claims
- 1668US11495440B2Plasma density control on substrate edgeAPPLIED MATERIALS INC·Filed 2020·Granted Nov 8, 2022·0 cites·20 claims
- 1767US11505863B2Methods for forming films on substratesAPPLIED MATERIALS INC·Filed 2020·Granted Nov 22, 2022·0 cites·14 claims
- 1866US12001197B2Eco-efficiency (sustainability) dashboard for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2021·Granted Jun 4, 2024·0 cites·14 claims
- 1966US11692262B2EM source for enhanced plasma controlAPPLIED MATERIALS INC·Filed 2020·Granted Jul 4, 2023·0 cites·18 claims
- 2066US2025210319A1Electrode configurations and magnet configurations for processing chambers, and related methods and apparatus, for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2166US2025210304A1Electrode and Coil Configurations For Processing Chambers and Related Chamber Kits, Apparatus, and Methods For Semiconductor ManufacturingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2266US2025226186A1Heaters and plasma generators for gas activation, and related chamber and for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2366US2025155883A1Process modeling platform for substrate manufacturing systemsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2465US12131105B2Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensingAPPLIED MATERIALS INC·Filed 2021·Granted Oct 29, 2024·0 cites·17 claims
- 2565US9928997B2Apparatus for PVD dielectric depositionAPPLIED MATERIALS INC·Filed 2015·Granted Mar 27, 2018·1 cites·18 claims
- 2663US2017211175A1Sputter source for semiconductor process chambersAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 2762US11834743B2Segmented showerhead for uniform delivery of multiple precursorsAPPLIED MATERIALS INC·Filed 2019·Granted Dec 5, 2023·0 cites·16 claims
- 2860US2025210314A1Plasma injection configurations for processing chambers, and related apparatus, chamber kits, and methodsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2960US2025146119A1Dual collimator physical vapor depositions processing chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3059US10790121B2Plasma density control on substrate edgeAPPLIED MATERIALS INC·Filed 2018·Granted Sep 29, 2020·0 cites·20 claims
- 3158US2025201594A1Modular processing chambers and related heating configurations, methods, apparatus, and modules for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3255US12203163B2Methods for shaping magnetic fields during semiconductor processingAPPLIED MATERIALS INC·Filed 2021·Granted Jan 21, 2025·0 cites·18 claims
- 3355US2021069745A1Vapor delivery methods and apparatusAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3450US11183375B2Deposition system with multi-cathode and method of manufacture thereofAPPLIED MATERIALS INC·Filed 2015·Granted Nov 23, 2021·0 cites·10 claims
- 3546US11170982B2Methods and apparatus for producing low angle depositionsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 9, 2021·0 cites·20 claims
- 3646US9520267B2Bias voltage frequency controlled angular ion distribution in plasma processingGODET LUDOVIC·Filed 2014·Granted Dec 13, 2016·0 cites·17 claims
- 3744US2022245307A1Hybrid physics/machine learning modeling of processesAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 3843US2019353919A1Multi-zone collimator for selective pvdAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3940US2013000848A1Pedestal with edge gas deflector for edge profile controlNOVELLUS SYSTEMS INC·Filed 2012·Application pending·0 cites
- 4034USD967351SShowerhead reflectorAPPLIED MATERIALS INC·Filed 2020·Granted Oct 18, 2022·0 cites·1 claims
- 4131USD969980SDeposition chamber showerheadAPPLIED MATERIALS INC·Filed 2020·Granted Nov 15, 2022·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →