Inventor · disambiguated record
Richard Wallingford
Also filed as: WALLINGFORD RICHARD · WALLINGFORD RICHARD M
36 granted patents·3 pending applications·355 citations·filing 2004–2023
97Inventor score
Top patents by PatentIndex Score
39 records- 0195US9726617B2Apparatus and methods for finding a best aperture and mode to enhance defect detectionKLA TENCOR CORP·Filed 2013·Granted Aug 8, 2017·20 cites·23 claims
- 0295US8775101B2Detecting defects on a waferHUANG JUNQING·Filed 2011·Granted Jul 8, 2014·70 cites·18 claims
- 0394US8204296B2Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a waferBHASKAR KRIS·Filed 2010·Granted Jun 19, 2012·15 cites·16 claims
- 0493US8611639B2Semiconductor device property extraction, generation, visualization, and monitoring methodsKULKARNI ASHOK·Filed 2007·Granted Dec 17, 2013·33 cites·38 claims
- 0593US8223327B2Systems and methods for detecting defects on a waferCHEN LU·Filed 2009·Granted Jul 17, 2012·24 cites·24 claims
- 0693US7796804B2Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a waferKLA TENCOR CORP·Filed 2008·Granted Sep 14, 2010·25 cites·28 claims
- 0792US11592653B2Automated focusing system for tracking specimen surface with a configurable focus offsetKLA CORP·Filed 2020·Granted Feb 28, 2023·4 cites·9 claims
- 0891US7555409B1Daisy chained topologyKLA TENCOR CORP·Filed 2004·Granted Jun 30, 2009·48 cites·17 claims
- 0990US10416087B2Systems and methods for defect detection using image reconstructionKLA TENCOR CORP·Filed 2016·Granted Sep 17, 2019·11 cites·35 claims
- 1088US11776108B2Deep learning based defect detectionKLA CORP·Filed 2021·Granted Oct 3, 2023·2 cites·22 claims
- 1187US10713769B2Active learning for defect classifier trainingKLA TENCOR CORP·Filed 2019·Granted Jul 14, 2020·9 cites·36 claims
- 1287US10605744B2Systems and methods for detecting defects on a waferKLA TENCOR CORP·Filed 2018·Granted Mar 31, 2020·3 cites·3 claims
- 1386US9880107B2Systems and methods for detecting defects on a waferKLA TENCOR CORP·Filed 2013·Granted Jan 30, 2018·5 cites·44 claims
- 1485US12229935B2Semantic image segmentation for semiconductor-based applicationsKLA CORP·Filed 2022·Granted Feb 18, 2025·1 cites·18 claims
- 1585US8467047B2Systems and methods for detecting defects on a waferCHEN LU·Filed 2012·Granted Jun 18, 2013·5 cites·17 claims
- 1684US10402688B2Data augmentation for convolutional neural network-based defect inspectionKLA TENCOR CORP·Filed 2017·Granted Sep 3, 2019·5 cites·18 claims
- 1782US11010885B2Optical-mode selection for multi-mode semiconductor inspectionKLA TENCOR CORP·Filed 2019·Granted May 18, 2021·5 cites·14 claims
- 1881US8000905B1Computer-implemented methods, carrier media, and systems for determining sizes of defects detected on a waferKLA TENCOR TECH CORP·Filed 2007·Granted Aug 16, 2011·8 cites·22 claims
- 1980US10132760B2Apparatus and methods for finding a best aperture and mode to enhance defect detectionKLA TENCOR CORP·Filed 2017·Granted Nov 20, 2018·1 cites·18 claims
- 2078US7925072B2Methods for identifying array areas in dies formed on a wafer and methods for setting up such methodsKLA TENCOR TECH CORP·Filed 2007·Granted Apr 12, 2011·11 cites·9 claims
- 2174US7251586B2Full swath analysisKLA TENCOR TECH CORP·Filed 2005·Granted Jul 31, 2007·6 cites·5 claims
- 2272US12474557B2Automated focusing system for tracking specimen surface with a configurable focus offsetKLA CORP·Filed 2023·Granted Nov 18, 2025·0 cites·11 claims
- 2370US7865037B1Memory load balancingKLA TENCOR CORP·Filed 2006·Granted Jan 4, 2011·2 cites·12 claims
- 2470US2022230293A1Method and system for mixed mode wafer inspectionKLA CORP·Filed 2022·Application pending·0 cites
- 2569US7149642B1Programmable image computerKLA TENCOR TECH CORP·Filed 2004·Granted Dec 12, 2006·7 cites·17 claims
- 2668US7024339B1Full swath analysisKLA TENCOR TECH CORP·Filed 2004·Granted Apr 4, 2006·12 cites·16 claims
- 2766US7076390B1Memory load balancingKLA TENCOR TECH CORP·Filed 2004·Granted Jul 11, 2006·5 cites·19 claims
- 2865US8049877B2Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection systemKLA TENCOR CORP·Filed 2008·Granted Nov 1, 2011·1 cites·21 claims
- 2964US7181368B1Status pollingKLA TENCOR TECH CORP·Filed 2004·Granted Feb 20, 2007·9 cites·16 claims
- 3060US7379838B2Programmable image computerKLA TENCOR CORP·Filed 2006·Granted May 27, 2008·2 cites·1 claims
- 3159US11295438B2Method and system for mixed mode wafer inspectionKLA TENCOR CORP·Filed 2018·Granted Apr 5, 2022·0 cites·9 claims
- 3258US11983865B2Deep generative model-based alignment for semiconductor applicationsKLA CORP·Filed 2021·Granted May 14, 2024·0 cites·22 claims
- 3357US2024161272A1Multimode defect detectionKLA CORP·Filed 2023·Application pending·0 cites
- 3455US8645100B2Status pollingBHASKAR KRISHNAMURTHY·Filed 2007·Granted Feb 4, 2014·1 cites·8 claims
- 3555US2024095935A1Deep learning model-based alignment for semiconductor applicationsKLA CORP·Filed 2023·Application pending·0 cites
- 3653US10192303B2Method and system for mixed mode wafer inspectionKLA TENCOR CORP·Filed 2013·Granted Jan 29, 2019·0 cites·34 claims
- 3749US7602958B1Mirror node process verificationKLA TENCOR CORP·Filed 2004·Granted Oct 13, 2009·5 cites·18 claims
- 3845US11431976B2System and method for inspection using tensor decomposition and singular value decompositionKLA CORP·Filed 2020·Granted Aug 30, 2022·0 cites·29 claims
- 3945US11330164B2Determining focus settings for specimen scansKLA CORP·Filed 2021·Granted May 10, 2022·0 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →