Inventor · disambiguated record
Sangbong Park
Also filed as: PARK SANGBONG
32 granted patents·8 pending applications·285 citations·filing 1989–2025
96Inventor score
Top patents by PatentIndex Score
40 records- 0191US11921052B2Inspection with previous step subtractionKLA CORP·Filed 2023·Granted Mar 5, 2024·1 cites·38 claims
- 0291US11120546B2Unsupervised learning-based reference selection for enhanced defect inspection sensitivityKLA CORP·Filed 2020·Granted Sep 14, 2021·3 cites·27 claims
- 0390US9412673B2Multi-model metrologyKLA TENCOR CORP·Filed 2014·Granted Aug 9, 2016·10 cites·25 claims
- 0490US7981576B2Method and apparatus for performing dark field double dipole lithography (DDL)ASML MASKTOOLS BV·Filed 2010·Granted Jul 19, 2011·5 cites·7 claims
- 0590US7824826B2Method and apparatus for performing dark field double dipole lithography (DDL)ASML MASKTOOLS BV·Filed 2007·Granted Nov 2, 2010·9 cites·15 claims
- 0690US7652758B2Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systemsASML MASKTOOLS BV·Filed 2006·Granted Jan 26, 2010·11 cites·18 claims
- 0789US7494753B2Method, program product and apparatus for improving calibration of resist models used in critical dimension calculationASML MASKTOOLS BV·Filed 2006·Granted Feb 24, 2009·14 cites·15 claims
- 0889US4989813ASupporting base for controlling height, swivel and inclination of display meansSAMSUNG ELECTRONIC DEVICES·Filed 1989·Granted Feb 5, 1991·160 cites·3 claims
- 0988US11776108B2Deep learning based defect detectionKLA CORP·Filed 2021·Granted Oct 3, 2023·2 cites·22 claims
- 1088US11416982B2Controlling a process for inspection of a specimenKLA CORP·Filed 2020·Granted Aug 16, 2022·2 cites·20 claims
- 1187US7116411B2Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systemsASML MASKTOOLS BV·Filed 2004·Granted Oct 3, 2006·27 cites·6 claims
- 1282US11010885B2Optical-mode selection for multi-mode semiconductor inspectionKLA TENCOR CORP·Filed 2019·Granted May 18, 2021·5 cites·14 claims
- 1379US11308606B2Design-assisted inspection for DRAM and 3D NAND devicesKLA CORP·Filed 2019·Granted Apr 19, 2022·2 cites·8 claims
- 1479US10474133B2Inspection device for inspecting wafer and method of inspecting wafer using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Nov 12, 2019·3 cites·20 claims
- 1579US8632930B2Method and apparatus for performing dark field double dipole lithography (DDL)HSU DUAN-FU STEPHEN·Filed 2011·Granted Jan 21, 2014·2 cites·14 claims
- 1677US8120753B2Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation processBERGER GABRIEL·Filed 2007·Granted Feb 21, 2012·6 cites·21 claims
- 1775US7818151B2Method, program product and apparatus for obtaining short-range flare model parameters for lithography simulation toolASML MASKTOOLS BV·Filed 2006·Granted Oct 19, 2010·4 cites·16 claims
- 1874US7614034B2Method and apparatus for generating OPC rules for placement of scattering bar features utilizing interface mapping technologyASML MASKTOOLS BV·Filed 2006·Granted Nov 3, 2009·3 cites·20 claims
- 1973US10489902B2Inspection apparatus, semiconductor device manufacturing system including the same, and method of manufacturing a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Nov 26, 2019·2 cites·18 claims
- 2073US6506818B1Polyester resin compositions for filmKOLON INC·Filed 2000·Granted Jan 14, 2003·10 cites·8 claims
- 2171US11783470B2Design-assisted inspection for DRAM and 3D NAND devicesKLA CORP·Filed 2022·Granted Oct 10, 2023·0 cites·18 claims
- 2269US7433791B2Method of performing multiple stage model calibration for optical imaging simulation modelsASML MASKTOOLS BV·Filed 2007·Granted Oct 7, 2008·2 cites·12 claims
- 2365US2025191171A1System and method of finding pixel-to-design target for dram inspectionKLA CORP·Filed 2023·Application pending·0 cites
- 2461US11748872B2Setting up inspection of a specimenKLA CORP·Filed 2021·Granted Sep 5, 2023·0 cites·25 claims
- 2561US2025173880A1System and method for in-situ swath positioningKLA CORP·Filed 2024·Application pending·0 cites
- 2659US12190500B2Detecting defects on specimensKLA CORP·Filed 2023·Granted Jan 7, 2025·0 cites·20 claims
- 2758US12482091B2Detecting defects on specimensKLA CORP·Filed 2022·Granted Nov 25, 2025·0 cites·23 claims
- 2857US8937601B2Method and apparatus of recognizing gesture with untouched wayIN HOH PETER·Filed 2011·Granted Jan 20, 2015·2 cites·16 claims
- 2957US2024161272A1Multimode defect detectionKLA CORP·Filed 2023·Application pending·0 cites
- 3056US11803960B2Optical image contrast metric for optical target searchKLA CORP·Filed 2021·Granted Oct 31, 2023·0 cites·18 claims
- 3156US2025342683A1Vision foundation model for multimode imagingKLA CORP·Filed 2025·Application pending·0 cites
- 3255US2024095935A1Deep learning model-based alignment for semiconductor applicationsKLA CORP·Filed 2023·Application pending·0 cites
- 3353US11615993B2Clustering sub-care areas based on noise characteristicsKLA CORP·Filed 2020·Granted Mar 28, 2023·0 cites·19 claims
- 3451US12056867B2Image contrast metrics for deriving and improving imaging conditionsKLA CORP·Filed 2021·Granted Aug 6, 2024·0 cites·15 claims
- 3551US2011307631A1System and method for providing asynchronous data communication in a networked environmentPARK SANGBONG·Filed 2011·Application pending·0 cites
- 3648US2009138500A1Method of compact display combined with property-table-view for a complex relational data structureYUAN ZHIQIANG·Filed 2008·Application pending·0 cites
- 3747US11619592B2Selecting defect detection methods for inspection of a specimenKLA CORP·Filed 2020·Granted Apr 4, 2023·0 cites·23 claims
- 3847US2016322267A1Multi-model metrologyKLA TENCOR CORP·Filed 2016·Application pending·0 cites
- 3946US11049745B2Defect-location determination using correction loop for pixel alignmentKLA TENCOR CORP·Filed 2019·Granted Jun 29, 2021·0 cites·16 claims
- 4045US10199282B2Inspection apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Feb 5, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →