Inventor · disambiguated record
Satoshi Wakabayashi
Also filed as: WAKABAYASHI SATOSHI
35 granted patents·15 pending applications·694 citations·filing 1988–2021
97Inventor score
Top patents by PatentIndex Score
50 records- 0194US6609962B1Dressing apparatus and polishing apparatusEBARA CORP·Filed 2000·Granted Aug 26, 2003·85 cites·23 claims
- 0293US6358128B1Polishing apparatusEBARA CORP·Filed 2000·Granted Mar 19, 2002·61 cites·70 claims
- 0392US7632378B2Polishing apparatusEBARA CORP·Filed 2005·Granted Dec 15, 2009·15 cites·12 claims
- 0492US6878044B2Polishing apparatusEBARA CORP·Filed 2004·Granted Apr 12, 2005·47 cites·18 claims
- 0589US6578891B1Substrate holder and substrate transfer apparatus using the sameEBARA CORP·Filed 2000·Granted Jun 17, 2003·49 cites·21 claims
- 0689US6354922B1Polishing apparatusEBARA CORP·Filed 2000·Granted Mar 12, 2002·50 cites·29 claims
- 0789US5179460AInput device having double-layer adhesive conductive connecting portionsSEIKO EPSON CORP·Filed 1990·Granted Jan 12, 1993·84 cites·20 claims
- 0885US6916231B2Polishing apparatusEBARA CORP·Filed 2003·Granted Jul 12, 2005·31 cites·5 claims
- 0983US6682408B2Polishing apparatusEBARA CORP·Filed 2001·Granted Jan 27, 2004·21 cites·24 claims
- 1082US8257790B2Ti-containing film formation method and storage mediumNARUSHIMA KENSAKU·Filed 2007·Granted Sep 4, 2012·6 cites·20 claims
- 1181US7063598B2Substrate delivery mechanismEBARA CORP·Filed 2003·Granted Jun 20, 2006·19 cites·22 claims
- 1280US7737005B2Method for forming Ti film and TiN film, contact structure, computer readable storing medium and computer programTOKYO ELECTRON LTD·Filed 2005·Granted Jun 15, 2010·6 cites·15 claims
- 1380US7645185B2Substrate delivery mechanismEBARA CORP·Filed 2007·Granted Jan 12, 2010·5 cites·4 claims
- 1478US6390901B1Polishing apparatusEBARA CORP·Filed 1999·Granted May 21, 2002·51 cites·7 claims
- 1578US4966442AElectro-optical device and method for manufacturing sameSEIKO EPSON CORP·Filed 1989·Granted Oct 30, 1990·43 cites·12 claims
- 1677US7981794B2Film forming method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Jul 19, 2011·6 cites·16 claims
- 1776US6358126B1Polishing apparatusEBARA CORP·Filed 2000·Granted Mar 19, 2002·17 cites·16 claims
- 1875US6358131B1Polishing apparatusEBARA CORP·Filed 2000·Granted Mar 19, 2002·17 cites·18 claims
- 1974US7160180B2Substrate delivery mechanismEBARA CORP·Filed 2006·Granted Jan 9, 2007·3 cites·20 claims
- 2072US11248296B2Source gas supply apparatus, film forming apparatus, and source gas supply methodTOKYO ELECTRON LTD·Filed 2019·Granted Feb 15, 2022·1 cites·9 claims
- 2172US7850817B2Polishing device and substrate processing deviceEBARA CORP·Filed 2003·Granted Dec 14, 2010·15 cites·9 claims
- 2268US4937450AInfrared detector comprising an evacuated and cooled Dewar having an elliptical spheroid end windowMITSUBISHI ELECTRIC CORP·Filed 1988·Granted Jun 26, 1990·35 cites·7 claims
- 2366US9349642B2Method of forming contact layerTOKYO ELECTRON LTD·Filed 2014·Granted May 24, 2016·1 cites·10 claims
- 2463US6602119B1Dressing apparatusEBARA CORP·Filed 2000·Granted Aug 5, 2003·9 cites·24 claims
- 2560US6379229B1Polishing apparatusEBARA CORP·Filed 2000·Granted Apr 30, 2002·7 cites·21 claims
- 2659US11549179B2Film forming methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 10, 2023·0 cites·13 claims
- 2753US2007093186A1Substrate delivery mechanismISOBE SOICHI·Filed 2006·Application pending·0 cites
- 2848US7514120B2Precoat film forming methodTOKYO ELECTRON LTD·Filed 2005·Granted Apr 7, 2009·0 cites·10 claims
- 2947US12416082B2Processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2020·Granted Sep 16, 2025·0 cites·9 claims
- 3047US2008226822A1Precoat film forming method, idling method of film forming device, loading table structure, film forming device and film forming methodWAKABAYASHI SATOSHI·Filed 2008·Application pending·0 cites
- 3145US8263181B2Ti-based film forming method and storage mediumNARUSHIMA KENSAKU·Filed 2009·Granted Sep 11, 2012·0 cites·20 claims
- 3245US2010216304A1Method for forming ti film and tin film, contact structure, computer readable storage medium and computer programTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 3344US9620370B2Method of forming Ti filmTOKYO ELECTRON LTD·Filed 2014·Granted Apr 11, 2017·0 cites·4 claims
- 3443US7906442B2Gas treatment method and computer readable storage mediumTOKYO ELECTRON LTD·Filed 2006·Granted Mar 15, 2011·0 cites·17 claims
- 3543US2003235652A1Precoat film forming methodFiled 2003·Application pending·0 cites
- 3643US2008107825A1Film-Forming Method and Recording MediumTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 3742US6069093AProcess of forming metal films and multi layer structureTOKYO ELECTRON LTD·Filed 1998·Granted May 30, 2000·9 cites·7 claims
- 3842US2005098109A1Precoat film forming method, idling method of film forming device, loading table structure, film forming device and film forming methodTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 3941US2019371572A1Film-forming method and film-forming apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 4041US2019385843A1Method of forming metal film and film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 4140US2003165620A1Precoat film forming method, idling method of film forming device, loading table structure, film forming device and film forming methodFiled 2003·Application pending·0 cites
- 4239US2005233093A1Film formation method and apparatus utilizing plasma CVDTADA KUNIHIRO·Filed 2005·Application pending·0 cites
- 4339US2007131168A1Gas Supplying unit and substrate processing apparatusGOMI HISASHI·Filed 2006·Application pending·0 cites
- 4438US2010240216A1Film formation method and apparatus utilizing plasma cvdTADA KUNIHIRO·Filed 2010·Application pending·0 cites
- 4537US2004053559A1Polishing apparatus and method of bonding and removing expendable replacement components thereofFiled 2003·Application pending·0 cites
- 4634US2005257747A1Worktable device, film formation apparatus, and film formation method for semiconductor processWAKABAYASHI SATOSHI·Filed 2005·Application pending·0 cites
- 4733US10242878B2Substrate processing method and recording mediumTOKYO ELECTRON LTD·Filed 2017·Granted Mar 26, 2019·0 cites·8 claims
- 4828US10783264B2Non-transitory computer-readable storage medium, and information processing device using unique file-specific information for decryption of a target fileFUJITSU LTD·Filed 2017·Granted Sep 22, 2020·0 cites·9 claims
- 4928USD660398SFish hookWAKABAYASHI SATOSHI·Filed 2011·Granted May 22, 2012·1 cites·1 claims
- 5024US2018068477A1Display method, display device, and non-transitory computer-readable recording mediumFUJITSU LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →