Inventor · disambiguated record
Shawming Ma
Also filed as: MA SHAWMING
47 granted patents·22 pending applications·1,070 citations·filing 1998–2024
98Inventor score
Files withMATTSON TECH INC37APPLIED MATERIALS INC11AGILENT TECHNOLOGIES INC5BEIJING E TOWN SEMICONDUCTOR TECH CO LTD4HEWLETT PACKARD CO3
Top patents by PatentIndex Score
69 records- 0199US11062912B2Atomic layer etch process using plasma in conjunction with a rapid thermal activation processMATTSON TECH INC·Filed 2020·Granted Jul 13, 2021·11 cites·20 claims
- 0298US12002652B2Variable mode plasma chamber utilizing tunable plasma potentialMATTSON TECH INC·Filed 2021·Granted Jun 4, 2024·4 cites·13 claims
- 0396US6485988B2Hydrogen-free contact etch for ferroelectric capacitor formationTEXAS INSTRUMENTS INC·Filed 2000·Granted Nov 26, 2002·191 cites·8 claims
- 0495US11348767B2Plasma processing apparatus having a focus ring adjustment assemblyMATTSON TECH INC·Filed 2020·Granted May 31, 2022·4 cites·15 claims
- 0595US6548343B1Method of fabricating a ferroelectric memory cellAGILENT TECHNOLOGIES INC·Filed 2000·Granted Apr 15, 2003·152 cites·21 claims
- 0693US6554954B2Conductive collar surrounding semiconductor workpiece in plasma chamberAPPLIED MATERIALS INC·Filed 2001·Granted Apr 29, 2003·76 cites·30 claims
- 0792US11189464B2Variable mode plasma chamber utilizing tunable plasma potentialMATTSON TECH INC·Filed 2019·Granted Nov 30, 2021·5 cites·20 claims
- 0892US10580661B2Atomic layer etch process using plasma in conjunction with a rapid thermal activation processMATTSON TECH INC·Filed 2017·Granted Mar 3, 2020·5 cites·18 claims
- 0991US11348784B2Enhanced ignition in inductively coupled plasmas for workpiece processingMATTSON TECH INC·Filed 2019·Granted May 31, 2022·4 cites·18 claims
- 1089US12159789B2Atomic layer etch process using plasma in conjunction with a rapid thermal activation processMATTSON TECH INC·Filed 2021·Granted Dec 3, 2024·1 cites·16 claims
- 1189US11508560B2Focus ring adjustment assembly of a system for processing workpieces under vacuumMATTSON TECH INC·Filed 2020·Granted Nov 22, 2022·2 cites·13 claims
- 1289US11289323B2Processing of semiconductors using vaporized solventsMATTSON TECH INC·Filed 2018·Granted Mar 29, 2022·4 cites·8 claims
- 1389US10790119B2Plasma processing apparatus with post plasma gas injectionMATTSON TECH INC·Filed 2017·Granted Sep 29, 2020·5 cites·3 claims
- 1489US6576922B1Ferroelectric capacitor plasma charging monitorTEXAS INSTRUMENTS INC·Filed 2001·Granted Jun 10, 2003·40 cites·4 claims
- 1588US10950428B1Method for processing a workpieceMATTSON TECH INC·Filed 2019·Granted Mar 16, 2021·4 cites·18 claims
- 1688US6614051B1Device for monitoring substrate charging and method of fabricating sameAPPLIED MATERIALS INC·Filed 2002·Granted Sep 2, 2003·40 cites·16 claims
- 1787US10901321B2Strip process for high aspect ratio structureMATTSON TECH INC·Filed 2020·Granted Jan 26, 2021·2 cites·6 claims
- 1887US6018187AElevated pin diode active pixel sensor including a unique interconnection structureHEWLETT PACKARD CMPANY·Filed 1998·Granted Jan 25, 2000·94 cites·15 claims
- 1987US5936261AElevated image sensor array which includes isolation between the image sensors and a unique interconnectionHEWLETT PACKARD CO·Filed 1998·Granted Aug 10, 1999·90 cites·17 claims
- 2086US6281535B1Three-dimensional ferroelectric capacitor structure for nonvolatile random access memory cellAGILENT TECHNOLOGIES INC·Filed 1999·Granted Aug 28, 2001·88 cites·18 claims
- 2185US11264249B2Carbon containing hardmask removal process using sulfur containing process gasMATTSON TECH INC·Filed 2019·Granted Mar 1, 2022·4 cites·18 claims
- 2285US8133819B2Plasma etching carbonaceous layers with sulfur-based etchantsWANG JUDY·Filed 2008·Granted Mar 13, 2012·16 cites·18 claims
- 2385US6613666B2Method of reducing plasma charging damage during dielectric etch process for dual damascene interconnect structuresAPPLIED MATERIALS INC·Filed 2001·Granted Sep 2, 2003·36 cites·12 claims
- 2485US2025062133A1Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid Thermal Activation ProcessMATTSON TECH INC·Filed 2024·Application pending·0 cites
- 2584US11049692B2Methods for tuning plasma potential using variable mode plasma chamberMATTSON TECH INC·Filed 2019·Granted Jun 29, 2021·3 cites·18 claims
- 2683US12347677B2Enhanced ignition in inductively coupled plasmas for workpiece processingBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Jul 1, 2025·0 cites·15 claims
- 2783US7432210B2Process to open carbon based hardmaskAPPLIED MATERIALS INC·Filed 2005·Granted Oct 7, 2008·9 cites·9 claims
- 2881US10573532B2Method for processing a workpiece using a multi-cycle thermal treatment processMATTSON TECH INC·Filed 2018·Granted Feb 25, 2020·2 cites·14 claims
- 2979US6396118B1Conductive mesh bias connection for an array of elevated active pixel sensorsAGILENT TECHNOLOGIES INC·Filed 2000·Granted May 28, 2002·25 cites·16 claims
- 3078US11848204B2Enhanced ignition in inductively coupled plasmas for workpiece processingBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Granted Dec 19, 2023·0 cites·7 claims
- 3178US6812145B2Method of reducing plasma charging damage during dielectric etch process for dual damascene interconnect structuresFiled 2003·Granted Nov 2, 2004·24 cites·15 claims
- 3278US6215164B1Elevated image sensor array which includes isolation between uniquely shaped image sensorsAGILENT TECHNOLOGIES INC·Filed 1999·Granted Apr 10, 2001·53 cites·16 claims
- 3377US7510976B2Dielectric plasma etch process with in-situ amorphous carbon mask with improved critical dimension and etch selectivityAPPLIED MATERIALS INC·Filed 2006·Granted Mar 31, 2009·6 cites·20 claims
- 3476US11039527B2Air leak detection in plasma processing apparatus with separation gridMATTSON TECH INC·Filed 2019·Granted Jun 15, 2021·1 cites·17 claims
- 3576US8048806B2Methods to avoid unstable plasma states during a process transitionAPPLIED MATERIALS INC·Filed 2006·Granted Nov 1, 2011·5 cites·13 claims
- 3675US12119216B2Arc lamp with forming gas for thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Oct 15, 2024·0 cites·24 claims
- 3775US11201036B2Plasma strip tool with uniformity controlMATTSON TECH INC·Filed 2018·Granted Dec 14, 2021·2 cites·13 claims
- 3871US7838432B2Etch process with controlled critical dimension shrinkAPPLIED MATERIALS INC·Filed 2007·Granted Nov 23, 2010·5 cites·18 claims
- 3969US6270192B1Monolithic ink jet nozzle formed from an oxide and nitride compositionHEWLETT PACKARD CO·Filed 2000·Granted Aug 7, 2001·10 cites·16 claims
- 4068US11721539B2Arc lamp with forming gas for thermal processing systemsMATTSON TECH INC·Filed 2021·Granted Aug 8, 2023·0 cites·14 claims
- 4168US2021398775A1Plasma Strip Tool with Multiple Gas InjectionMATTSON TECH INC·Filed 2021·Application pending·0 cites
- 4268US2021307151A1Air Leak Detection In Plasma Processing Apparatus With Separation GridMATTSON TECH INC·Filed 2021·Application pending·0 cites
- 4367US6114739AElevated pin diode active pixel sensor which includes a patterned doped semiconductor electrodeAGILENT TECHNOLOGIES INC·Filed 1998·Granted Sep 5, 2000·33 cites·11 claims
- 4466US2022223405A1Processing of Semiconductors Using Vaporized SolventsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Application pending·0 cites
- 4562US6673636B2Method of real-time plasma charging voltage measurement on powered electrode with electrostatic chuck in plasma process chambersAPPLIED MATERAILS INC·Filed 2001·Granted Jan 6, 2004·10 cites·26 claims
- 4662US2021257196A1Plasma Processing Apparatus and MethodsMATTSON TECH INC·Filed 2021·Application pending·0 cites
- 4761US11764072B2Method for processing a workpiece using a multi-cycle thermal treatment processMATTSON TECH INC·Filed 2020·Granted Sep 19, 2023·0 cites·12 claims
- 4859US2021005431A1Plasma Processing Apparatus With Post Plasma Gas InjectionMATTSON TECH INC·Filed 2020·Application pending·0 cites
- 4955US2018358204A1Plasma Strip Tool With Multiple Gas Injection ZonesMATTSON TECH INC·Filed 2018·Application pending·0 cites
- 5055US2006283553A1Plasma chamber insert ringAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
Showing the top 50 of 69 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →