Inventor · disambiguated record
Silvia De Dea
Also filed as: DE DEA SILVIA
12 granted patents·43 citations·filing 2011–2017
88Inventor score
Top patents by PatentIndex Score
12 records- 0194US10232413B2Controlled fluid flow for cleaning an optical elementASML NETHERLANDS BV·Filed 2017·Granted Mar 19, 2019·8 cites·20 claims
- 0291US8633459B2Systems and methods for optics cleaning in an EUV light sourceBYKANOV ALEXANDER N·Filed 2011·Granted Jan 21, 2014·11 cites·20 claims
- 0389US9557650B2Transport system for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2015·Granted Jan 31, 2017·5 cites·29 claims
- 0483US9392678B2Target material supply apparatus for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2012·Granted Jul 12, 2016·5 cites·28 claims
- 0581US9632418B2Target material supply apparatus for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2016·Granted Apr 25, 2017·2 cites·17 claims
- 0680US9073098B2Light collector mirror cleaningDE DEA SILVIA·Filed 2012·Granted Jul 7, 2015·3 cites·29 claims
- 0773US9844804B2Light collector mirror carrierASML NETHERLANDS BV·Filed 2015·Granted Dec 19, 2017·1 cites·12 claims
- 0871US9776218B2Controlled fluid flow for cleaning an optical elementASML NETHERLANDS BV·Filed 2015·Granted Oct 3, 2017·1 cites·19 claims
- 0969US8816305B2Filter for material supply apparatusDE DEA SILVIA·Filed 2011·Granted Aug 26, 2014·4 cites·23 claims
- 1068US10185234B2Harsh environment optical element protectionCYMER INC·Filed 2012·Granted Jan 22, 2019·1 cites·7 claims
- 1165US9560730B2Transport system for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2013·Granted Jan 31, 2017·1 cites·44 claims
- 1261US9000404B2Systems and methods for optics cleaning in an EUV light sourceCymer LLC·Filed 2013·Granted Apr 7, 2015·1 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →