Inventor · disambiguated record
Suvi Haukka
Also filed as: HAUKKA SUVI · HAUKKA SUVI P · HAUKKA SUVI PAEIVIKKI
175 granted patents·24 pending applications·19,587 citations·filing 1997–2025
99Inventor score
Top patents by PatentIndex Score
199 records- 0199US11387107B2Deposition of organic filmsASM IP HOLDING BV·Filed 2020·Granted Jul 12, 2022·10 cites·20 claims
- 0299US10443123B2Dual selective depositionASM IP HOLDING BV·Filed 2018·Granted Oct 15, 2019·46 cites·21 claims
- 0399US10373820B2Deposition of organic filmsASM IP HOLDING BV·Filed 2016·Granted Aug 6, 2019·61 cites·25 claims
- 0499US10343920B2Aligned carbon nanotubesASM IP HOLDING BV·Filed 2016·Granted Jul 9, 2019·412 cites·16 claims
- 0599US10047435B2Dual selective depositionASM IP HOLDING BV·Filed 2015·Granted Aug 14, 2018·463 cites·52 claims
- 0699US9895715B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2015·Granted Feb 20, 2018·525 cites·27 claims
- 0799US9368352B2Methods for forming doped silicon oxide thin filmsASM INT·Filed 2014·Granted Jun 14, 2016·469 cites·19 claims
- 0899US9257303B2Selective formation of metallic films on metallic surfacesASM INT·Filed 2015·Granted Feb 9, 2016·82 cites·19 claims
- 0999US9153441B2Methods for forming doped silicon oxide thin filmsASM INT·Filed 2014·Granted Oct 6, 2015·473 cites·17 claims
- 1099US8679958B2Methods for forming doped silicon oxide thin filmsASM INT·Filed 2012·Granted Mar 25, 2014·484 cites·26 claims
- 1199US7923382B2Method for forming roughened surfaceASM INT·Filed 2009·Granted Apr 12, 2011·347 cites·19 claims
- 1299US7563715B2Method of producing thin filmsASM INT·Filed 2005·Granted Jul 21, 2009·513 cites·20 claims
- 1399US6933225B2Graded thin filmsASM INT·Filed 2002·Granted Aug 23, 2005·147 cites·33 claims
- 1499US6780704B1Conformal thin films over textured capacitor electrodesASM INTERNAT NV·Filed 1999·Granted Aug 24, 2004·609 cites·38 claims
- 1599US6534395B2Method of forming graded thin films using alternating pulses of vapor phase reactantsASM MICROCHEMISTRY OY·Filed 2001·Granted Mar 18, 2003·1.3k cites·33 claims
- 1699US6482733B2Protective layers prior to alternating layer depositionASM MICROCHEMISTRY OY·Filed 2001·Granted Nov 19, 2002·406 cites·28 claims
- 1799US6482740B2Method of growing electrical conductors by reducing metal oxide film with organic compound containing -OH, -CHO, or -COOHASM MICROCHEMISTRY OY·Filed 2001·Granted Nov 19, 2002·562 cites·26 claims
- 1899US6482262B1Deposition of transition metal carbidesASM MICROCHEMISTRY OY·Filed 2000·Granted Nov 19, 2002·328 cites·29 claims
- 1998US11213853B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2019·Granted Jan 4, 2022·9 cites·20 claims
- 2098US10854460B2Deposition of organic filmsASM IP HOLDING BV·Filed 2019·Granted Dec 1, 2020·19 cites·21 claims
- 2198US10456808B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2018·Granted Oct 29, 2019·12 cites·20 claims
- 2298US10453701B2Deposition of organic filmsASM IP HOLDING BV·Filed 2017·Granted Oct 22, 2019·55 cites·20 claims
- 2398US10428421B2Selective deposition on metal or metallic surfaces relative to dielectric surfacesASM IP HOLDING BV·Filed 2016·Granted Oct 1, 2019·63 cites·12 claims
- 2498US10395917B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2018·Granted Aug 27, 2019·405 cites·19 claims
- 2598US10283319B2Atomic layer etching processesASM IP HOLDING BV·Filed 2017·Granted May 7, 2019·18 cites·19 claims
- 2698US10273584B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2017·Granted Apr 30, 2019·17 cites·28 claims
- 2798US10190213B2Deposition of metal boridesASM IP HOLDING BV·Filed 2016·Granted Jan 29, 2019·413 cites·20 claims
- 2898US10157786B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2016·Granted Dec 18, 2018·55 cites·21 claims
- 2998US10147600B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2018·Granted Dec 4, 2018·417 cites·20 claims
- 3098US10087522B2Deposition of metal boridesASM IP HOLDING BV·Filed 2016·Granted Oct 2, 2018·464 cites·21 claims
- 3198US10049924B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2017·Granted Aug 14, 2018·53 cites·20 claims
- 3298US9905416B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2017·Granted Feb 27, 2018·19 cites·19 claims
- 3398US9875893B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2017·Granted Jan 23, 2018·419 cites·20 claims
- 3498US9816180B2Selective depositionASM IP HOLDING BV·Filed 2016·Granted Nov 14, 2017·57 cites·25 claims
- 3598US9679808B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2016·Granted Jun 13, 2017·57 cites·20 claims
- 3698US9564314B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2015·Granted Feb 7, 2017·465 cites·28 claims
- 3798US9502289B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2015·Granted Nov 22, 2016·86 cites·31 claims
- 3898US9245742B2Sulfur-containing thin filmsASM IP HOLDING BV·Filed 2013·Granted Jan 26, 2016·476 cites·12 claims
- 3998US9129897B2Metal silicide, metal germanide, methods for making the samePORE VILJAMI J·Filed 2012·Granted Sep 8, 2015·558 cites·29 claims
- 4098US9112003B2Selective formation of metallic films on metallic surfacesASM INT·Filed 2012·Granted Aug 18, 2015·93 cites·30 claims
- 4198US8956971B2Selective formation of metallic films on metallic surfacesHAUKKA SUVI P·Filed 2011·Granted Feb 17, 2015·565 cites·28 claims
- 4298US8912101B2Method for forming Si-containing film using two precursors by ALDASM IP HOLDING BV·Filed 2013·Granted Dec 16, 2014·522 cites·17 claims
- 4398US8846502B2Methods for depositing thin films comprising gallium nitride by atomic layer depositionHAUKKA SUVI·Filed 2012·Granted Sep 30, 2014·470 cites·35 claims
- 4498US8841182B1Silane and borane treatments for titanium carbide filmsASM IP HOLDING BV·Filed 2013·Granted Sep 23, 2014·529 cites·22 claims
- 4598US7955979B2Method of growing electrical conductorsASM INT·Filed 2008·Granted Jun 7, 2011·88 cites·15 claims
- 4698US7824492B2Method of growing oxide thin filmsASM INT·Filed 2003·Granted Nov 2, 2010·540 cites·39 claims
- 4798US7419903B2Thin filmsASM INT·Filed 2005·Granted Sep 2, 2008·88 cites·17 claims
- 4898US6887795B2Method of growing electrical conductorsASM INT·Filed 2002·Granted May 3, 2005·158 cites·32 claims
- 4998US6858524B2Method of depositing barrier layer for metal gatesASM INTERNATIONAL NV·Filed 2003·Granted Feb 22, 2005·627 cites·19 claims
- 5098US6727169B1Method of making conformal lining layers for damascene metallizationASM INT·Filed 2000·Granted Apr 27, 2004·225 cites·42 claims
Showing the top 50 of 199 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →