Inventor · disambiguated record
Tadakazu Sone
Also filed as: SONE TADAKAZU
28 granted patents·15 pending applications·170 citations·filing 2000–2024
95Inventor score
Top patents by PatentIndex Score
43 records- 0194US8845391B2Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatusSONE TADAKAZU·Filed 2010·Granted Sep 30, 2014·26 cites·21 claims
- 0293US9475167B2Polishing apparatus having temperature regulator for polishing padMARUYAMA TORU·Filed 2012·Granted Oct 25, 2016·20 cites·11 claims
- 0393US6435949B1Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereofEBARA CORP·Filed 2000·Granted Aug 20, 2002·71 cites·8 claims
- 0490US11007621B2Polishing apparatus and polishing methodEBARA CORP·Filed 2018·Granted May 18, 2021·3 cites·8 claims
- 0582US9522453B2Polishing apparatusEBARA CORP·Filed 2015·Granted Dec 20, 2016·2 cites·6 claims
- 0682US9174324B2Polishing apparatus with polishing head coverEBARA CORP·Filed 2014·Granted Nov 3, 2015·4 cites·17 claims
- 0779US2021229235A1Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatusEBARA CORP·Filed 2021·Application pending·0 cites
- 0878US9409277B2Polishing apparatus and polishing methodEBARA CORP·Filed 2013·Granted Aug 9, 2016·4 cites·6 claims
- 0977US9216442B2Gas-liquid separator and polishing apparatusEBARA CORP·Filed 2013·Granted Dec 22, 2015·4 cites·4 claims
- 1076US11612983B2Polishing apparatus and polishing methodEBARA CORP·Filed 2021·Granted Mar 28, 2023·0 cites·9 claims
- 1175US6969305B2Polishing apparatusEBARA CORP·Filed 2003·Granted Nov 29, 2005·16 cites·12 claims
- 1274US8118640B2Wafer transferring apparatus, polishing apparatus, and wafer receiving methodTAKAHASHI NOBUYUKI·Filed 2006·Granted Feb 21, 2012·5 cites·13 claims
- 1374US2025058431A1Apparatus for polishing, processing system, and method of polishingEBARA CORP·Filed 2024·Application pending·0 cites
- 1471US2019168354A1Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatusEBARA CORP·Filed 2019·Application pending·0 cites
- 1566US9144878B2Polishing apparatus and wear detection methodEBARA CORP·Filed 2014·Granted Sep 29, 2015·1 cites·14 claims
- 1663US11472002B2Substrate polishing apparatusEBARA CORP·Filed 2020·Granted Oct 18, 2022·0 cites·11 claims
- 1763US6783427B2Polishing system with air exhaust systemEBARA CORP·Filed 2002·Granted Aug 31, 2004·9 cites·20 claims
- 1861US11839948B2Polishing apparatusEBARA CORP·Filed 2019·Granted Dec 12, 2023·0 cites·10 claims
- 1961US2014364040A1Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatusEBARA CORP·Filed 2014·Application pending·0 cites
- 2060US12179312B2Apparatus for polishing, processing system, and method of polishingEBARA CORP·Filed 2021·Granted Dec 31, 2024·0 cites·19 claims
- 2160US11980998B2Polishing device, polishing method, and recording medium for recording program for determining supply position of polishing liquidEBARA CORP·Filed 2020·Granted May 14, 2024·0 cites·12 claims
- 2258US10576604B2Substrate polishing apparatusEBARA CORP·Filed 2015·Granted Mar 3, 2020·0 cites·5 claims
- 2357US9724798B2Cover for component of polishing apparatus, component of polishing apparatus, and polishing apparatusEBARA CORP·Filed 2015·Granted Aug 8, 2017·0 cites·8 claims
- 2453US11642755B2Apparatus for polishing and method for polishingEBARA CORP·Filed 2019·Granted May 9, 2023·0 cites·21 claims
- 2553US6824454B2Polishing apparatusEBARA CORP·Filed 2001·Granted Nov 30, 2004·5 cites·12 claims
- 2652US9028297B2Polishing apparatusEBARA CORP·Filed 2013·Granted May 12, 2015·0 cites·13 claims
- 2752US2018304320A1Substrate processing apparatus and hand shower gunEBARA CORP·Filed 2018·Application pending·0 cites
- 2850US9764446B2Rotary joint and polishing apparatusEBARA CORP·Filed 2015·Granted Sep 19, 2017·0 cites·11 claims
- 2950US2014030048A1Workpiece transport deviceEBARA CORP·Filed 2013·Application pending·0 cites
- 3050US2019299360A1Polishing apparatus and substrate processing apparatusEBARA CORP·Filed 2019·Application pending·0 cites
- 3149US10987776B2Calibration method and non-transitory computer-readable storage medium storing a program of calibrationEBARA CORP·Filed 2018·Granted Apr 27, 2021·0 cites·8 claims
- 3248US9530704B2Polishing apparatus and wear detection methodEBARA CORP·Filed 2015·Granted Dec 27, 2016·0 cites·16 claims
- 3348US2009067959A1Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatusTAKAHASHI NOBUYUKI·Filed 2007·Application pending·0 cites
- 3447US2016256900A1Substrate processing apparatus and hand shower gunEBARA CORP·Filed 2016·Application pending·0 cites
- 3547US2015118944A1Polishing apparatus, method for attaching polishing pad, and method for replacing polishing padEBARA CORP·Filed 2014·Application pending·0 cites
- 3647US2016233118A1Workpiece transport deviceEBARA CORP·Filed 2016·Application pending·0 cites
- 3746US9666469B2Lifting device, substrate processing apparatus having lifting device, and unit transferring methodEBARA CORP·Filed 2014·Granted May 30, 2017·0 cites·12 claims
- 3846US2012193506A1Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatusTAKAHASHI NOBUYUKI·Filed 2012·Application pending·0 cites
- 3944US10730162B2Turntable cloth peeling jigEBARA CORP·Filed 2017·Granted Aug 4, 2020·0 cites·10 claims
- 4042US11465256B2Apparatus for polishing and method for polishingEBARA CORP·Filed 2019·Granted Oct 11, 2022·0 cites·10 claims
- 4142US2014080385A1Polishing apparatusEBARA CORP·Filed 2013·Application pending·0 cites
- 4242US2009247057A1Polishing platen and polishing apparatusEBARA CORP·Filed 2006·Application pending·0 cites
- 4333US2015273659A1Substrate polishing apparatusEBARA CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →