Inventor · disambiguated record
Tom E. Blomberg
Also filed as: BLOMBERG TOM · BLOMBERG TOM E
67 granted patents·19 pending applications·1,708 citations·filing 2003–2025
99Inventor score
Top patents by PatentIndex Score
86 records- 0199US10428419B2Combination CVD/ALD method, source and pulse profile modificationASM IP HOLDING BV·Filed 2017·Granted Oct 1, 2019·391 cites·20 claims
- 0298US10428421B2Selective deposition on metal or metallic surfaces relative to dielectric surfacesASM IP HOLDING BV·Filed 2016·Granted Oct 1, 2019·63 cites·12 claims
- 0398US10283319B2Atomic layer etching processesASM IP HOLDING BV·Filed 2017·Granted May 7, 2019·18 cites·19 claims
- 0498US10273584B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2017·Granted Apr 30, 2019·17 cites·28 claims
- 0598US9129897B2Metal silicide, metal germanide, methods for making the samePORE VILJAMI J·Filed 2012·Granted Sep 8, 2015·558 cites·29 claims
- 0698US8841182B1Silane and borane treatments for titanium carbide filmsASM IP HOLDING BV·Filed 2013·Granted Sep 23, 2014·529 cites·22 claims
- 0797US11739427B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2021·Granted Aug 29, 2023·2 cites·24 claims
- 0897US10280519B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2017·Granted May 7, 2019·14 cites·20 claims
- 0996US11437249B2Showerhead device for semiconductor processing systemASM IP HOLDING BV·Filed 2020·Granted Sep 6, 2022·3 cites·20 claims
- 1096US9062390B2Crystalline strontium titanate and methods of forming the sameBLOMBERG TOM E·Filed 2012·Granted Jun 23, 2015·10 cites·18 claims
- 1194US10982325B2Fluid distributing device for a thin-film deposition apparatus, related apparatus and methodsPICOSUN OY·Filed 2020·Granted Apr 20, 2021·5 cites·31 claims
- 1294US10662533B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2019·Granted May 26, 2020·3 cites·23 claims
- 1393US11739428B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2021·Granted Aug 29, 2023·1 cites·27 claims
- 1492US9790594B2Combination CVD/ALD method, source and pulse profile modificationASM IP HOLDING BV·Filed 2014·Granted Oct 17, 2017·3 cites·11 claims
- 1592US9412602B2Deposition of smooth metal nitride filmsASM IP HOLDING BV·Filed 2013·Granted Aug 9, 2016·12 cites·21 claims
- 1692US8524322B2Combination CVD/ALD method and sourceBLOMBERG TOM E·Filed 2010·Granted Sep 3, 2013·6 cites·17 claims
- 1791US11640899B2Atomic layer etching processesASM IP HOLDING BV·Filed 2021·Granted May 2, 2023·1 cites·19 claims
- 1890US9941425B2Photoactive devices and materialsASM IP HOLDING BV·Filed 2015·Granted Apr 10, 2018·2 cites·19 claims
- 1989US11114283B2Reactor, system including the reactor, and methods of manufacturing and using sameASM IP HOLDING BV·Filed 2018·Granted Sep 7, 2021·4 cites·15 claims
- 2089US10662534B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2019·Granted May 26, 2020·1 cites·22 claims
- 2189US2025037970A1Atomic layer etching processesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 2288US12320012B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2023·Granted Jun 3, 2025·0 cites·20 claims
- 2388US10529563B2Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structuresASM IP HOLDING BV·Filed 2018·Granted Jan 7, 2020·3 cites·15 claims
- 2488US10056249B2Atomic layer deposition of antimony oxide filmsASM INT NV·Filed 2016·Granted Aug 21, 2018·4 cites·20 claims
- 2588US10043880B2Metal silicide, metal germanide, methods for making the sameASM INT NV·Filed 2017·Granted Aug 7, 2018·3 cites·14 claims
- 2688US9379011B2Methods for depositing nickel films and for making nickel silicide and nickel germanidePORE VILJAMI J·Filed 2012·Granted Jun 28, 2016·7 cites·15 claims
- 2787US12312696B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2023·Granted May 27, 2025·0 cites·7 claims
- 2887US12146218B2Precursor containerPICOSUN OY·Filed 2023·Granted Nov 19, 2024·0 cites·6 claims
- 2987US11230769B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2020·Granted Jan 25, 2022·1 cites·31 claims
- 3086US12237182B2Showerhead device for semiconductor processing systemASM IP HOLDING BV·Filed 2024·Granted Feb 25, 2025·0 cites·20 claims
- 3186US11230770B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2020·Granted Jan 25, 2022·1 cites·33 claims
- 3286US9520562B2Method of making a resistive random access memoryASM IP HOLDING BV·Filed 2014·Granted Dec 13, 2016·7 cites·56 claims
- 3386US9236247B2Silane and borane treatments for titanium carbide filmsASM IP HOLDING BV·Filed 2014·Granted Jan 12, 2016·5 cites·22 claims
- 3486US2025273463A1Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structuresASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 3585US12094686B2Atomic layer etching processesASM IP HOLDING BV·Filed 2023·Granted Sep 17, 2024·0 cites·20 claims
- 3685US9023427B2Methods for forming multi-component thin filmsMATERO RAIJA·Filed 2012·Granted May 5, 2015·5 cites·20 claims
- 3784US12241156B2Combination CVD/ALD method, source and pulse profile modificationASM IP HOLDING BV·Filed 2022·Granted Mar 4, 2025·0 cites·9 claims
- 3883US12354872B2Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structuresASM IP HOLDING BV·Filed 2023·Granted Jul 8, 2025·0 cites·19 claims
- 3983US9634106B2Doped metal germanide and methods for making the sameASM INT NV·Filed 2015·Granted Apr 25, 2017·2 cites·18 claims
- 4082US11873558B2Precursor containerPICOSUN OY·Filed 2022·Granted Jan 16, 2024·0 cites·10 claims
- 4181US11365478B2Combination CVD/ALD method, source and pulse profile modificationASM IP HOLDING BV·Filed 2019·Granted Jun 21, 2022·0 cites·10 claims
- 4280US11948813B2Showerhead device for semiconductor processing systemASM IP HOLDING BV·Filed 2022·Granted Apr 2, 2024·0 cites·24 claims
- 4380US11658030B2Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structuresASM IP HOLDING BV·Filed 2019·Granted May 23, 2023·1 cites·12 claims
- 4480US11174550B2Selective deposition on metal or metallic surfaces relative to dielectric surfacesASM IP HOLDING BV·Filed 2019·Granted Nov 16, 2021·0 cites·20 claims
- 4580US9704716B2Deposition of smooth metal nitride filmsASM IP HOLDING BV·Filed 2016·Granted Jul 11, 2017·2 cites·23 claims
- 4680US2025154662A1Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 4778US11823976B2Fluorine-containing conductive filmsASM IP HOLDING BV·Filed 2022·Granted Nov 21, 2023·0 cites·20 claims
- 4877US11549177B2Process for passivating dielectric filmsASM INT NV·Filed 2019·Granted Jan 10, 2023·0 cites·19 claims
- 4977US10665425B2Atomic layer etching processesASM IP HOLDING BV·Filed 2019·Granted May 26, 2020·0 cites·20 claims
- 5077US2025167013A1Showerhead device for semiconductor processing systemASM IP HOLDING BV·Filed 2025·Application pending·0 cites
Showing the top 50 of 86 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →