Inventor · disambiguated record
Vladimir B. Fleurov
Also filed as: FLEUROV VLADIMIR · FLEUROV VLADIMIR B
14 granted patents·3 pending applications·414 citations·filing 1999–2015
93Inventor score
Top patents by PatentIndex Score
17 records- 0197US6757316B2Four KHz gas discharge laserCYMER INC·Filed 2001·Granted Jun 29, 2004·97 cites·43 claims
- 0297US6317447B1Electric discharge laser with acoustic chirp correctionCYMER INC·Filed 2000·Granted Nov 13, 2001·108 cites·9 claims
- 0395US6904073B2High power deep ultraviolet laser with long life opticsCYMER INC·Filed 2003·Granted Jun 7, 2005·78 cites·87 claims
- 0492US6466602B1Gas discharge laser long life electrodesCYMER INC·Filed 2000·Granted Oct 15, 2002·69 cites·31 claims
- 0591US9000405B2Beam position control for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2014·Granted Apr 7, 2015·9 cites·15 claims
- 0691US8633459B2Systems and methods for optics cleaning in an EUV light sourceBYKANOV ALEXANDER N·Filed 2011·Granted Jan 21, 2014·11 cites·20 claims
- 0783US9271381B2Methods and apparatus for laser produced plasma EUV light sourceCymer LLC·Filed 2014·Granted Feb 23, 2016·6 cites·21 claims
- 0880US7643528B2Immersion lithography laser light source with pulse stretcherCYMER INC·Filed 2007·Granted Jan 5, 2010·6 cites·11 claims
- 0973US8855166B26 KHz and above gas discharge laser systemUJAZDOWSKI RICHARD C·Filed 2012·Granted Oct 7, 2014·3 cites·19 claims
- 1069US6553049B1ArF laser with low pulse energy and high rep rateCYMER INC·Filed 1999·Granted Apr 22, 2003·22 cites·18 claims
- 1165US9516730B2Systems and methods for buffer gas flow stabilization in a laser produced plasma light sourceFLEUROV VLADIMIR B·Filed 2011·Granted Dec 6, 2016·3 cites·19 claims
- 1261US9000404B2Systems and methods for optics cleaning in an EUV light sourceCymer LLC·Filed 2013·Granted Apr 7, 2015·1 cites·16 claims
- 1355US9148941B2Thermal monitor for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2013·Granted Sep 29, 2015·1 cites·28 claims
- 1451US2010074295A1Immersion lithography laser light source with pulse stretcherCYMER INC·Filed 2009·Application pending·0 cites
- 1550US9167679B2Beam position control for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2015·Granted Oct 20, 2015·0 cites·10 claims
- 1646US2006222034A16 Khz and above gas discharge laser systemCYMER INC·Filed 2005·Application pending·0 cites
- 1735US2006146906A1LLP EUV drive laserCYMER INC·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →