Inventor · disambiguated record
Vladimir Mihailovitch Krivtsun
Also filed as: KRIVTSUN VLADIMIR MIHAILOVITCH
24 granted patents·8 pending applications·116 citations·filing 2003–2014
94Inventor score
Files withASML NETHERLANDS BV20BANINE VADIM YEVGENYEVICH3YAKUNIN ANDREI MIKHAILOVICH3IVANOV VLADIMIR VITALEVICH2KRIVTSUN VLADIMIR MIHAILOVITCH2
Top patents by PatentIndex Score
32 records- 0197US9261784B2Lithographic patterning process and resists to use thereinWUISTER SANDER FREDERIK·Filed 2012·Granted Feb 16, 2016·23 cites·31 claims
- 0295US8921814B2Photon source, metrology apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Dec 30, 2014·28 cites·20 claims
- 0388US9357626B2Photon source, metrology apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted May 31, 2016·7 cites·20 claims
- 0487US7372058B2Ex-situ removal of deposition on an optical elementASML NETHERLANDS BV·Filed 2005·Granted May 13, 2008·8 cites·10 claims
- 0576US9411238B2Source-collector device, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Aug 9, 2016·4 cites·8 claims
- 0672US7061574B2Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jun 13, 2006·11 cites·26 claims
- 0771US7767989B2Ex-situ removal of deposition on an optical elementASML NETHERLANDS BV·Filed 2006·Granted Aug 3, 2010·1 cites·29 claims
- 0869US8755032B2Radiation source and lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2009·Granted Jun 17, 2014·2 cites·25 claims
- 0967US7696492B2Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Apr 13, 2010·6 cites·35 claims
- 1065US7518134B2Plasma radiation source for a lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Apr 14, 2009·6 cites·21 claims
- 1163US7528395B2Radiation source, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted May 5, 2009·10 cites·42 claims
- 1261US8493548B2Lithographic apparatus and device manufacturing methodIVANOV VLADIMIR VITALEVICH·Filed 2007·Granted Jul 23, 2013·3 cites·39 claims
- 1360US8598550B2Ex-situ removal of deposition on an optical elementBANINE VADIM YEVGENYEVICH·Filed 2012·Granted Dec 3, 2013·0 cites·27 claims
- 1460US7462851B2Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Granted Dec 9, 2008·5 cites·18 claims
- 1556US8134136B2Ex-situ removal of deposition on an optical elementBANINE VADIM YEVGENYEVICH·Filed 2010·Granted Mar 13, 2012·0 cites·11 claims
- 1649US7772570B2Assembly for blocking a beam of radiation and method of blocking a beam of radiationASML NETHERLANDS BV·Filed 2006·Granted Aug 10, 2010·0 cites·22 claims
- 1749US7557366B2Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Granted Jul 7, 2009·2 cites·42 claims
- 1847US2011037960A1Lithographic apparatus, device manufacturing method, cleaning system and method for cleaning a patterning deviceASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 1944US2008266654A1Extreme ultraviolet microscopeASML NETHERLANDS BV·Filed 2007·Application pending·0 cites
- 2044US2013287968A1Lithographic apparatus and device manufacturing methodIVANOV VLADIMIR VITALEVICH·Filed 2013·Application pending·0 cites
- 2143US8294128B2Apparatus with plasma radiation source and method of forming a beam of radiationKRIVTSUN VLADIMIR MIHAILOVITCH·Filed 2010·Granted Oct 23, 2012·0 cites·17 claims
- 2240US2010141909A1Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2007·Application pending·0 cites
- 2339US9007565B2Spectral purity filterYAKUNIN ANDREI MIKHAILOVICH·Filed 2010·Granted Apr 14, 2015·0 cites·17 claims
- 2438US9411250B2Radiation system and lithographic apparatusBANINE VADIM YEVGENYEVICH·Filed 2009·Granted Aug 9, 2016·0 cites·41 claims
- 2538US9366967B2Radiation sourceYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Jun 14, 2016·0 cites·13 claims
- 2637US7335900B2Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted Feb 26, 2008·0 cites·9 claims
- 2737US2013010275A1Lithographic apparatus and spectral purity filterASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
- 2836US2013015373A1EUV Radiation Source and EUV Radiation Generation MethodASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
- 2936US2011020752A1Extreme ultraviolet radiation source and method for producing extreme ultraviolet radiationASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 3035US7872244B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Jan 18, 2011·0 cites·36 claims
- 3133US9307624B2Lithographic apparatusGLUSHKOV DENIS ALEXANDROVICH·Filed 2009·Granted Apr 5, 2016·0 cites·15 claims
- 3229US2012229785A1Multilayer mirror, lithograpic apparatus, and methods for manufacturing a multilayer mirror and a productKRIVTSUN VLADIMIR MIHAILOVITCH·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →