US10685897B2ActiveUtilityA1

Semiconductor package having routable encapsulated conductive substrate and method

82
Assignee: AMKOR TECHNOLOGY INCPriority: Sep 8, 2015Filed: Jul 11, 2018Granted: Jun 16, 2020
Est. expirySep 8, 2035(~9.2 yrs left)· nominal 20-yr term from priority
H10W 70/6565H10W 72/5522H10W 74/00H10W 72/884H10W 90/754H10W 72/072H10W 72/075H10W 72/07337H10W 72/952H10W 72/354H10W 90/724H10W 90/734H10W 99/00H10P 72/7424H10P 72/744H10P 72/74H10W 90/701H10W 72/9415H10W 72/923H10W 72/00H10W 70/685H10W 70/635H10W 70/458H10W 70/451H10W 70/442H10W 70/435H10W 70/424H10W 70/65H10W 70/047H10W 70/05H10W 42/121H10W 20/425H10W 72/90H10W 72/20H10W 70/479H10W 70/456H10W 74/10H10W 74/01H10W 74/117H10W 70/68H01L 24/29H01L 23/49816H01L 2224/05599H01L 21/6835H01L 24/45H01L 23/49822H01L 21/4839H01L 2224/48227H01L 2924/01079H01L 23/53223H01L 2224/32225H01L 2924/01028H01L 2924/01047H01L 2924/00014H01L 2224/05026H01L 23/49827H01L 24/81H01L 23/49579H01L 2924/181H01L 23/49586H01L 2221/68381H01L 2224/2919H01L 23/48H01L 24/16H01L 2221/68345H01L 2224/8385H01L 23/49537H01L 24/32H01L 24/91H01L 2224/48091H01L 24/85H01L 23/562H01L 23/49534H01L 23/49861H01L 2224/83439H01L 2224/83444H01L 2224/16225H01L 2924/01029H01L 23/49558H01L 2224/73265H01L 2224/45144H01L 23/3128H01L 2224/85444H01L 2924/15311H01L 24/06H01L 2224/85439H01L 2224/85447H01L 2924/00012H01L 21/4846H01L 23/49838H01L 24/14H01L 2224/83447H01L 24/73H01L 23/53238H01L 24/48H01L 23/49548H01L 21/4857
82
PatentIndex Score
2
Cited by
32
References
20
Claims

Abstract

A packaged semiconductor device includes a routable molded lead frame structure with a surface finish layer. In one embodiment, the routable molded lead frame structure includes a first laminated layer including the surface finish layer, vias connected to the surface finish layer, and a first resin layer covering the vias leaving the top surface of the surface finish layer exposed. A second laminated layer includes second conductive patterns connected to the vias, bump pads connected to the second conductive patterns, and a second resin layer covering one side of the first resin layer, the second conductive patterns and the bump pads. A semiconductor die is electrically connected to the surface finish layer and an encapsulant covers the semiconductor die and another side of the first resin layer. The surface finish layer provides a customizable and improved bonding structure for connecting the semiconductor die to the routable molded lead frame structure.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A semiconductor device structure comprising:
 a routable encapsulated conductive substrate comprising:
 a first conductive structure encapsulated within a first laminated layer, wherein:
 the first conductive structure comprises:
 a first surface finish layer; and 
 first conductive vias coupled to at least a portion of the first surface finish layer; and 
 
 the first laminated layer defines a top substrate surface of the routable encapsulated conductive substrate; 
 the first surface finish layer is exposed by the top substrate surface; 
 
 a second conductive structure electrically coupled to the first conductive vias and encapsulated within a second laminated layer, wherein:
 the second conductive structure comprises:
 a conductive pattern structure; and 
 conductive pads connected to the conductive pattern structure; 
 
 the second laminated layer defines a bottom substrate surface of the routable encapsulated conductive substrate; 
 the second laminated layer covers a portion of the first laminated layer; and 
 lower surfaces of the conductive pads proximate to the bottom substrate surface are devoid of the second laminated layer so that the lower surfaces are adapted for coupling to a next level assembly; 
 
 
 a semiconductor device electrically coupled to the first surface finish layer and 
 a package body covering the semiconductor device, at least portions of the first surface finish layer, and at least portions of the top substrate surface. 
 
     
     
       2. The semiconductor device structure of  claim 1 , wherein:
 the first surface finish layer and the first conductive vias comprise different conductive materials. 
 
     
     
       3. The semiconductor device structure of  claim 2 , wherein:
 the first surface finish layer comprises silver (Ag); and 
 the first conductive vias comprise copper (Cu). 
 
     
     
       4. The semiconductor device structure of  claim 1 , wherein:
 the semiconductor device is attached to the top substrate surface; and 
 the semiconductor device is electrically connected to the first surface finish layer structure with conductive wires. 
 
     
     
       5. The semiconductor device structure of  claim 1 , further comprising:
 first conductive patterns disposed within the first laminated layer, wherein:
 a first part of the first conductive patterns are interposed between the first conductive vias and the first surface finish layer; and 
 a second part of the first conductive patterns are devoid of the first conductive vias and devoid of the first surface finish layer. 
 
 
     
     
       6. The semiconductor device of  claim 1 , wherein:
 a portion of the conductive pattern structure is provided devoid of the conductive pads. 
 
     
     
       7. The semiconductor device of  claim 1 , wherein:
 the first surface finish layer is substantially coplanar with the top substrate surface; 
 surfaces of the conductive pads are recessed within openings in the second laminated layer; and 
 the semiconductor device further comprises a second surface finish layer coupled to the conductive pads. 
 
     
     
       8. The semiconductor device of  claim 1  further comprising a second surface finish layer connected to the conductive pads. 
     
     
       9. The semiconductor device of  claim 8 , wherein:
 the second surface finish layer comprises one or more of nickel/gold (Ni/Au), silver (Ag) or tin (Sn). 
 
     
     
       10. A semiconductor device structure comprising:
 a routable encapsulated conductive substrate comprising:
 a first conductive structure encapsulated within a first laminated layer, wherein:
 the first conductive structure comprises:
 a first surface finish layer; and 
 first conductive vias connected to at least a portion of the first surface finish layer; and 
 
 the first laminated layer defines a top substrate surface of the routable encapsulated conductive substrate; 
 the first surface finish layer is exposed by the top substrate surface; 
 
 a second conductive structure electrically coupled to the first conductive vias and encapsulated within a second laminated layer, wherein:
 the second conductive structure comprises:
 a conductive pattern structure; and 
 conductive pads connected to the conductive pattern structure; 
 
 the second laminated layer defines a bottom substrate surface of the routable encapsulated conductive substrate; 
 the second laminated layer covers a portion of the first laminated layer; 
 lower surfaces of the conductive pads proximate to the bottom substrate surface are devoid of the second laminated layer so that the lower surfaces are adapted for coupling to a next level assembly; and 
 a second surface finish layer is coupled to the lower surfaces of the conductive pads; 
 
 
 a semiconductor device electrically coupled to the first surface finish layer; and 
 a package body covering the semiconductor device, at least portions of the first surface finish layer, and at least portions of the top substrate surface. 
 
     
     
       11. The semiconductor device of  claim 10 , wherein:
 the first surface finish layer and the first conductive vias comprise different conductive materials; 
 surfaces of the conductive pads are recessed within openings in the second laminated layer; and 
 the second surface finish layer is substantially coplanar with an outer surface of the second laminated layer. 
 
     
     
       12. The semiconductor device structure of  claim 10 , wherein:
 the first surface finish layer comprises silver (Ag); and 
 the first conductive vias comprise copper (Cu). 
 
     
     
       13. The semiconductor device structure of  claim 10 , further comprising:
 first conductive patterns disposed within the first laminated layer, wherein:
 a first part of the first conductive patterns are disposed between the first conductive vias and the first surface finish layer; and 
 a second part of the first conductive patterns are devoid of the first conductive vias and devoid of the first surface finish layer. 
 
 
     
     
       14. The semiconductor device of  claim 10 , wherein:
 a portion of the conductive pattern structure is provided devoid of the conductive pads. 
 
     
     
       15. A semiconductor device structure comprising:
 a routable encapsulated conductive substrate comprising:
 a first conductive structure encapsulated within a first laminated layer, wherein:
 the first conductive structure comprises:
 a first surface finish layer; and 
 first conductive vias connected to at least a portion of the first surface finish layer; and 
 
 the first laminated layer defines a top substrate surface of the routable encapsulated conductive substrate; 
 the first surface finish layer is exposed by the top substrate surface; 
 
 a second conductive structure electrically coupled to the first conductive vias and encapsulated within a second laminated layer, wherein:
 the second conductive structure comprises:
 a conductive pattern structure; and 
 conductive pads connected to the conductive pattern structure; 
 
 the second laminated layer defines a bottom substrate surface of the routable encapsulated conductive substrate; 
 the second laminated layer covers a portion of the first laminated layer; 
 lower surfaces of the conductive pads proximate to the bottom substrate surface are devoid of the second laminated layer so that the lower surfaces are adapted for coupling to a next level assembly; and 
 a second surface finish layer is coupled to the lower surfaces of the conductive pads; 
 
 
 a semiconductor device electrically coupled to the first surface finish layer; and 
 a package body covering the semiconductor device, at least portions of the first surface finish layer, and at least portions of the top substrate surface, wherein:
 the first surface finish layer and the first conductive vias comprise different conductive materials. 
 
 
     
     
       16. The semiconductor device structure of  claim 15 , wherein:
 the first surface finish layer comprises silver (Ag); and 
 the first conductive vias comprise copper (Cu). 
 
     
     
       17. The semiconductor device of  claim 15 , wherein:
 surfaces of the conductive pads are recessed within openings in the second laminated layer; 
 the second surface finish layer is substantially coplanar with an outer surface of the second laminated layer. 
 
     
     
       18. The semiconductor device of  claim 15 , further comprising:
 first conductive patterns disposed within the first laminated layer, wherein:
 a first part of the first conductive patterns are disposed between the first conductive vias and the first surface finish layer; 
 a second part of the first conductive patterns are devoid of the first conductive vias and devoid of the first surface finish layer; and 
 at least a portion of the second part is recessed below the top substrate surface. 
 
 
     
     
       19. The semiconductor device of  claim 15 , wherein:
 the first surface finish layer is substantially coplanar with the top substrate surface. 
 
     
     
       20. The semiconductor device structure of  claim 15 , wherein:
 second surface finish layer comprises one or more of nickel/gold (Ni/Au), silver (Ag) or tin (Sn).

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