Inspection method and inspection device

Abstract

An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects.

1 . An inspection method for detecting a composition of a surface of an inspection object, an internal composition of said inspection object and materials of a foreign matter adhering to the surface by scattered light occurring from the surface of said inspection object by irradiation of inspection light, comprising the step of:
 conducting detection by inelastic or anti-stokes scattered light selected from said scattered light.   
     
     
         2 - 26 . (canceled)