US2016343591A1PendingUtilityA1

Reduction of underfill filler settling in integrated circuit packages

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Assignee: INTEL CORPPriority: Dec 20, 2012Filed: Aug 1, 2016Published: Nov 24, 2016
Est. expiryDec 20, 2032(~6.5 yrs left)· nominal 20-yr term from priority
H10W 74/00H10W 74/15H10W 90/734H10W 90/724H10W 72/353H10W 72/351H10W 72/325H10W 72/29H10W 74/473H10W 72/90H10W 72/20H10W 74/012H01L 2224/0401H01L 21/563H01L 23/295H01L 24/09H01L 2224/29499H01L 24/17
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Claims

Abstract

Embodiments of the present disclosure are directed to techniques and configurations for an integrated circuit (IC) package having an underfill layer with filler particles arranged in a generally random distribution pattern. In some embodiments, a generally random distribution pattern of filler particles may be obtained by reducing an electrostatic charge on one or more components of the IC package assembly, by applying a surface treatment to filler to reduce filler electrical charge, by applying an electric force against the filler particles of the underfill material in a direction opposite to a direction of gravitational force, by using an underfill material with a relatively low maximum filler particle size, and/or by snap curing the underfill layer at a relatively low temperature. Other embodiments may be described and/or claimed.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A method, comprising:
 forming an interconnect structure between a die and an integrated circuit substrate, the interconnect structure being configured to route electrical signals between the die and the integrated circuit substrate;   depositing an underfill material between the die and the integrated circuit substrate to form a package, the underfill material comprising a plurality of filler particles, wherein the underfill material surrounds at least a portion of the interconnect structure; and   reducing an electrostatic charge on one or more of the underfill material and the interconnect structure.   
     
     
         2 . The method of  claim 1 , further comprising:
 curing the underfill material; and   applying a magnetic field to the package during the depositing or the curing of the underfill material, wherein the magnetic field applies a force to the filler particles in a direction generally opposite to a direction of gravitational force.   
     
     
         3 . The method of  claim 1 , further comprising:
 inverting the package to position the integrated circuit substrate above the die relative to a downward direction of gravitational force; and   curing the underfill material while the package is inverted with the integrated circuit substrate above the die.   
     
     
         4 . The method of  claim 2 , further comprising curing the underfill material at a cure temperature in the range of 120° C.-130° C., wherein the underfill material has a gel temperature that is less than or equal to the cure temperature. 
     
     
         5 . The method of  claim 1 , wherein the filler particles are 5 μm or less in diameter.

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