Method for reducing microloading in etching high aspect ratio structures

Abstract

A method for etching features of different aspect ratios in a conductive layer is provided. The method comprises: depositing over the conductive layer with an aspect ratio dependent deposition; etching features into the conductive layer with an aspect ratio dependent etching of the conductive layer; and repeating the depositing and the etching at least once.

1. A method for etching features of different aspect ratios in a conductive layer, comprising
 depositing over the conductive layer with an aspect ratio dependent deposition, wherein the depositing selectively deposits more on bottoms of wider features than bottoms of narrower features and sidewalls of the features; 
 etching features into the conductive layer with an aspect ratio dependent etching of the conductive layer, wherein the etching selectively etches the wider features faster than the narrower features, and wherein the etching removes the deposition and the etching of the deposition finishes in the narrower features before the wider features, and wherein the etching of the conductive layer starts on the narrower features before the wider features; and 
 repeating the depositing and the etching at least once; 
 wherein the depositing is stopped before the features are significantly narrowed. 
 
   
   
     2. The method, as recited in  claim 1 , wherein the depositing deposits a silicon-oxide or hydrofluorocarbon based deposition. 
   
   
     3. The method, as recited in  claim 2 , wherein the conductive layer is one selected from the group consisting of tungsten (W), tungsten silicide (WSi 2 ), and aluminum (Al). 
   
   
     4. The method, as recited in  claim 3 , wherein aspect ratios of the features are greater than 7:1. 
   
   
     5. The method, as recited in  claim 4 , wherein widths of wider features are at least 5 times wider than widths of narrower features. 
   
   
     6. The method, as recited in  claim 5 , wherein the widths of narrower features are not greater than 30 nanometers. 
   
   
     7. A method for etching features of different aspect ratios in a conductive layer, comprising:
 depositing over the conductive layer with an aspect ratio dependent deposition; 
 etching features into the conductive layer with an aspect ratio dependent etching of the conductive layer; and 
 repeating the depositing and the etching at least once, 
 wherein
 aspect ratios of the features are greater than 7:1, 
 widths of wider features are at least 5 times wider than widths of narrower features, 
 the depositing selectively deposits more on bottoms of the wider features than bottoms of the narrower features and sidewalls of the features and 
 the etching selectively etches the wider features faster than the narrower features. 
 
 
   
   
     8. The method, as recited in  claim 7 , wherein the etching removes the deposition and the etching of the deposition finishes in the narrower features before the wider features. 
   
   
     9. The method, as recited in  claim 7 , wherein the etching of the conductive layer staffs on the narrower features before the wider features. 
   
   
     10. The method, as recited in  claim 7 , wherein the depositing is stopped before the features are significantly narrowed.