USD872037SActiveUtility

Cover of seal cap for reaction chamber for semiconductor manufacturing

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Assignee: HITACHI INT ELECTRIC INCPriority: Aug 9, 2017Filed: Jan 30, 2018Granted: Jan 7, 2020
Est. expiryAug 9, 2037(~11.1 yrs left)· nominal 20-yr term from priority
Inventors:Yusaku OkajimaHidenari YoshidaShuhei SaidoTakafumi Sasaki
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PatentIndex Score
9
Cited by
9
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a cover of seal cap for reaction chamber for semiconductor manufacturing, as shown (and described).

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