Inventor · disambiguated record
Garlen C. Leung
Also filed as: LEUNG GARLEN · LEUNG GARLEN C
11 granted patents·6 pending applications·112 citations·filing 2003–2016
90Inventor score
Top patents by PatentIndex Score
17 records- 0193US9362186B2Polishing with eddy current feed meaurement prior to deposition of conductive layerAPPLIED MATERIALS INC·Filed 2015·Granted Jun 7, 2016·10 cites·8 claims
- 0293US7553214B2Polishing article with integrated window stripeAPPLIED MATERIALS INC·Filed 2007·Granted Jun 30, 2009·23 cites·10 claims
- 0386US8439723B2Chemical mechanical polisher with heater and methodMARKS ROBERT A·Filed 2008·Granted May 14, 2013·21 cites·18 claims
- 0486US7601050B2Polishing apparatus with grooved subpadAPPLIED MATERIALS INC·Filed 2007·Granted Oct 13, 2009·11 cites·14 claims
- 0582US7063597B2Polishing processes for shallow trench isolation substratesAPPLIED MATERIALS INC·Filed 2003·Granted Jun 20, 2006·30 cites·14 claims
- 0681US7179159B2Materials for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2005·Granted Feb 20, 2007·8 cites·17 claims
- 0774US7841925B2Polishing article with integrated window stripeAPPLIED MATERIALS INC·Filed 2009·Granted Nov 30, 2010·3 cites·20 claims
- 0871US7429210B2Materials for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2007·Granted Sep 30, 2008·3 cites·18 claims
- 0970US9811077B2Polishing with pre deposition spectrumAPPLIED MATERIALS INC·Filed 2014·Granted Nov 7, 2017·2 cites·19 claims
- 1059US8211325B2Process sequence to achieve global planarity using a combination of fixed abrasive and high selectivity slurry for pre-metal dielectric CMP applicationsDIAO JIE·Filed 2010·Granted Jul 3, 2012·1 cites·20 claims
- 1157US2014237905A1Method of forming polishing sheetAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 1251US2010112919A1Monolithic linear polishing sheetAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1349US10651098B2Polishing with measurement prior to deposition of outer layerAPPLIED MATERIALS INC·Filed 2016·Granted May 12, 2020·0 cites·17 claims
- 1444US2008182413A1Selective chemistry for fixed abrasive cmpMENK GREGORY E·Filed 2007·Application pending·0 cites
- 1542US2007212976A1Smart polishing media assembly for planarizing substratesAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 1641US2012021671A1Real-time monitoring of retaining ring thickness and lifetimeMCREYNOLDS PETER·Filed 2010·Application pending·0 cites
- 1737US2004072518A1Platen with patterned surface for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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