Inventor
OKAJIMA YUSAKU
JP39 patents
⚠️ This page may combine multiple inventors who share the name “OKAJIMA YUSAKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
29 patentsUSD916037SApr 13, 2021
Cover of seal cap for reaction chamber for semiconductor
KOKUSAI ELECTRIC CORP9 citations86
USD937385SNov 30, 2021
Return nozzle
KOKUSAI ELECTRIC CORP10 citations85
USD888196SJun 23, 2020
Gas nozzle for substrate processing apparatus
KOKUSAI ELECTRIC CORP16 citations85
US10453735B2Oct 22, 2019
Substrate processing apparatus, reaction tube, semiconductor device manufacturing method, and recording medium
KOKUSAI ELECTRIC CORP8 citations84
USD1003834SNov 7, 2023
Heat insulator cover of semiconductor manufacturing apparatus
KOKUSAI ELECTRIC CORP5 citations75
USD1003243SOct 31, 2023
Heat insulator cover of semiconductor manufacturing apparatus
KOKUSAI ELECTRIC CORP2 citations73
US11453942B2Sep 27, 2022
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP1 citations73
US10961625B2Mar 30, 2021
Substrate processing apparatus, reaction tube and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP2 citations73
US10731254B2Aug 4, 2020
Protective plate, substrate processing apparatus, and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP3 citations73
US11685992B2Jun 27, 2023
Substrate processing apparatus, quartz reaction tube and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP2 citations72
USD1112115SFeb 10, 2026
Insulation plate for a semiconductor manufacturing apparatus
KOKUSAI ELECTRIC CORP0 citations62
USD1108381SJan 6, 2026
Filler block for substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations62
USD1086086SJul 29, 2025
Separator of substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations62
US12272579B2Apr 8, 2025
Substrate processing apparatus, substrate suppport and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
US12203167B2Jan 21, 2025
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
USD1042340SSep 17, 2024
Tubular reactor
KOKUSAI ELECTRIC CORP0 citations62
USD1022907SApr 16, 2024
Tubular reactor
KOKUSAI ELECTRIC CORP0 citations62
USD1022904SApr 16, 2024
Tubular reactor
KOKUSAI ELECTRIC CORP0 citations62
USD1022906SApr 16, 2024
Tubular reactor
KOKUSAI ELECTRIC CORP0 citations62
USD1022933SApr 16, 2024
Wafer support of semiconductor manufacturing apparatus
KOKUSAI ELECTRIC CORP0 citations62
USD1022905SApr 16, 2024
Tubular reactor
KOKUSAI ELECTRIC CORP0 citations62
US11898247B2Feb 13, 2024
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations62
US11859280B2Jan 2, 2024
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
USD928106SAug 17, 2021
Supporting column of insulation unit for semiconductor manufacturing apparatus
KOKUSAI ELECTRIC CORP0 citations62
US12435423B2Oct 7, 2025
Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations60
USD1110978SFeb 3, 2026
Gas nozzle for a substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations54
USD1109711SJan 20, 2026
Gas nozzle for a substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations53
US12293932B2May 6, 2025
Substrate processing apparatus, elevator and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations52
US10923366B2Feb 16, 2021
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations52
HITACHI INT ELECTRIC INC
10 patentsUSD846514SApr 23, 2019
Boat of substrate processing apparatus
HITACHI INT ELECTRIC INC28 citations94
USD813181SMar 20, 2018
Cover of seal cap for reaction chamber of semiconductor
HITACHI INT ELECTRIC INC41 citations91
USD872037SJan 7, 2020
Cover of seal cap for reaction chamber for semiconductor manufacturing
HITACHI INT ELECTRIC INC9 citations84
USD855027SJul 30, 2019
Cover of seal cap for reaction chamber of semiconductor
HITACHI INT ELECTRIC INC8 citations84
USD847105SApr 30, 2019
Boat of substrate processing apparatus
HITACHI INT ELECTRIC INC13 citations84
USD843958SMar 26, 2019
Reaction tube
HITACHI INT ELECTRIC INC8 citations84
USD842823SMar 12, 2019
Reaction tube
HITACHI INT ELECTRIC INC9 citations84
USD853979SJul 16, 2019
Reaction tube
HITACHI INT ELECTRIC INC10 citations83
USD889596SJul 7, 2020
Gas nozzle for substrate processing apparatus
HITACHI INT ELECTRIC INC5 citations72
US10573535B2Feb 25, 2020
Substrate processing apparatus, lid cover and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations39