P

Inventor

JANG HYUN SOO

KR49 patents
⚠️ This page may combine multiple inventors who share the name “JANG HYUN SOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM IP HOLDING BV

20 patents
US10662525B2May 26, 2020

Thin film deposition apparatus

ASM IP HOLDING BV282 citations99
USD802546SNov 14, 2017

Outer wall of reactor for semiconductor manufacturing apparatus

ASM IP HOLDING BV485 citations99
USD789888SJun 20, 2017

Electrode plate for semiconductor manufacturing apparatus

ASM IP HOLDING BV486 citations99
US10190214B2Jan 29, 2019

Deposition apparatus and deposition system having the same

ASM IP HOLDING BV378 citations98
USD796458SSep 5, 2017

Gas flow control plate for semiconductor manufacturing apparatus

ASM IP HOLDING BV504 citations98
USD790041SJun 20, 2017

Gas dispersing plate for semiconductor manufacturing apparatus

ASM IP HOLDING BV406 citations98
USD724553SMar 17, 2015

Substrate supporter for semiconductor deposition apparatus

ASM IP HOLDING BV580 citations98
USD716742SNov 4, 2014

Substrate supporter for semiconductor deposition apparatus

ASM IP HOLDING BV598 citations98
USD787458SMay 23, 2017

Gas supply plate for semiconductor manufacturing apparatus

ASM IP HOLDING BV504 citations97
US10934619B2Mar 2, 2021

Gas supply unit and substrate processing apparatus including the gas supply unit

ASM IP HOLDING BV6 citations84
USD785578SMay 2, 2017

Substrate supporting arm for semiconductor manufacturing apparatus

ASM IP HOLDING BV10 citations84
US9567672B2Feb 14, 2017

Deposition apparatus and cleansing method using the same

ASM IP HOLDING BV8 citations84
US10358721B2Jul 23, 2019

Semiconductor manufacturing system including deposition apparatus

ASM IP HOLDING BV9 citations82
US11222772B2Jan 11, 2022

Substrate processing apparatus

ASM IP HOLDING BV5 citations73
US11001925B2May 11, 2021

Substrate processing apparatus

ASM IP HOLDING BV3 citations73
US10822695B2Nov 3, 2020

Thin film deposition apparatus

ASM IP HOLDING BV2 citations73
US10738381B2Aug 11, 2020

Thin film deposition apparatus

ASM IP HOLDING BV2 citations71
US11396702B2Jul 26, 2022

Gas supply unit and substrate processing apparatus including the gas supply unit

ASM IP HOLDING BV0 citations62
US11069510B2Jul 20, 2021

Substrate processing apparatus

ASM IP HOLDING BV1 citations58
US10060031B2Aug 28, 2018

Deposition apparatus and cleansing method using the same

ASM IP HOLDING BV0 citations52

HYOSUNG TNS INC

13 patents

NAUTILUS HYOSUNG INC

4 patents

CHA JIN HWAN

3 patents

SAMSUNG ELECTRONICS CO LTD

2 patents

LEE JEONG HO

1 patent

KIM WOO CHAN

1 patent

ASM GENITECH KOREA LTD

1 patent

UNIV SUNGKYUNKWAN FOUND

1 patent

STI CO LTD

1 patent

LUMIGNTECH CO LTD

1 patent

AMOGREENTECH CO LTD

1 patent